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Malfunction Check/Remedy
If normal cultivation cannot
be done and chamber gas
density is suspect
•
The environment around the unit is not normal. The source of the
contaminated gas is nearby.
•
The unit is installed in an enclosed space.
If it takes much time to
recover the gas density
•
HEPA filter is provided in the gas piping. If it takes much time to
recover the gas density even though the gas pressure is normal, it may
be that dust on the HEPA filter prevents the gas flow. Consult the our
sales representative or agent.
Note:
If the malfunction is not eliminated after checking the above items, or the malfunction is not shown in the
above table, contact our sales representative or agent.
Содержание MCO-5M Series
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