13
Installation
5.4 Connections to the turbopump
Fig. 5: Connection designations for turbopumps with electronic drive unit TC 600
Connecting the fore-
vacuum side
Recommendation:
As backing pump, use a dry-compressing diaphragm pump or
rotary vane pumps from the Pfeiffer Vacuum programme. The backing pump must
generate a vacuum pressure of
≤
5 mbar.
Î
With rigid pipe connections: Install bellows for attenuation of vibrations in the
connection line.
Î
Connect the fore-vacuum line with small-flange components or threaded hose
couplings. Do not narrow the free cross section of the fore-vacuum flange!
Î
The backing pump is connected electrically via a relay box. Insert the control line
of the relay box into the "FV PUMP" connection of the TC 600 .
Cooling
Pfeiffer Vacuum turbopumps must be cooled by means of air or water cooling.
• When operating the pump with more than 50 % of the maximum gas load,
sealing gas must be used to ensure rotor cooling.
• In case of increased backing pressure (> 0.1 mbar) and/or operation with gas
loads, either air or water cooling may be used.
• Generally use water cooling if the ambient temperature is > +35 °C.
Î
Connect air cooling for the corresponding pump type in accordance with the ac-
cessory's operating manual.
Î
Connect water cooling for the corresponding pump type in accordance with the
accessory's operating manual.
Venting valve
The TVF 005 venting valve is used for automatic flooding in case of shut-down or
power failure. The maximum permissible pressure at the venting valve is 1.5 bar
absolute.
Installation of the venting valve
Î
Unscrew the venting screw from the venting connection of the turbopump.
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Screw in the venting valve with seal ring.
HEAT/TMS
VENT
FV PUMP
FAN
REMOTE
RS 485
H
F
VV
TC 600
WARNING
Damage to health due to poisonous gases
Process gases can damage health and contaminate the environment.
Î
Safely guide away the gas emission from the backing pump!
Î
Observe all safety recommendations of the gas producer.