24
Operation
6.4 Mon
i
toring of the operation conditions
Operating mode dis-
play via LED
LEDs in the front panel of the TC 600 show basic operating conditions of the tur-
bopump and TC. A differentiated malfunction and warning display is possible only
for operation with DCU or HPU.
Temperature monito-
ring
The motor current is reduced in case of impermissible motor temperature or im-
permissibly high housing temperature. This can cause the motor to fall below the
set rotation speed switchpoint and so result in switching off of the turbomolecular
pump.
6.5 Switching off and venting
Switching off
After the turbopump is switched off, it must be vented to avoid contamination due
to particles streaming back from the fore-vacuum area.
Î
Close the fore-vacuum line. Switch off the backing pump or close a fore-vacuum
valve.
Î
Switch off the turbopump on the control unit or via remote control.
Î
Venting (possibilities, see below)
Î
For water cooling: Shut off the water supply.
Venting
Manually Venting
Î
Open the venting screw (included) in the venting connection of the pump about
one turn.
Venting with venting valve TVF 005
Î
Enable venting via the functions of the electronic drive unit.
Î
Settings are possible via the RS485 on the TC 600 by using DCU, HPU or PC.
1)
When mains power is restored the venting procedure is aborted.
Basic information for the rapid venting
Venting of the vacuum chamber in two steps. Ask for details on individual solutions
from Pfeiffer Vacuum.
Î
Vent for 20 seconds at a rate of pressure rise of max. 15 mbar/s.
– The valve cross section for the venting rate of 15 mbar/s must be adapted to
the size of the vacuum chamber.
LED green
LED red
Cause
glows
power supply is o.k.
function ”pumping station on“ is carried out
flashes short
(1/12s active)
power supply is o.k.
pumping station is off
blinks
(1/2s active)
voltage drop; mains power failure
glows
Collective malfunction, e.g.
– run-up time failure
– excess temperature of the pump
– switching output 2 active (low)
blinks
(1/2s active)
Warning, e.g.
– ground leak of the supply voltage
– mains power failure
Venting frequency Switch off the pumping station Mains power failure
1)
50% of the final
rotation speed
Venting valve opens for 3600 s (1 h,
works setting)
Venting valve opens for 3600 s (1 h,
works setting)
