Pfeiffer Vacuum TMH 261 Скачать руководство пользователя страница 33

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Accessories

12 Accessories

Designation

Size

Order Number

Operating
instructions

Notes

Order
Qty

Power supllies

DCU 200 power supply with Dis-
play Control Unit

200 W

PM C01 695

PM 0477 BN
PM 0547 BN

TPS 200 power supply for wall/
standard rail mounting

200 W

PM 041 813 -T

PM 0521 BN

TPS 201 power supply 19" rack
module 3HU

200 W

PM 041 819 -T

PM 0521 BN

Mains cable

Mains cable with safety plug

230 V, 3 m

P 4564 309 ZA

Other lengths on
request

Mains cable with UL plug

115 V, 3 m

P 4564 309 ZE

Mains cable with UL plug

208 V, 3 m

P 4564 309 ZF

Connecting cable

TC 600 - TPS / DCU

3 m

PM 051 103 -T

Other lengths on
request

TC 600 - TPS / DCU, shielded

3 m

PM 051 843 -T

Control panel

DCU 001 Display Control Unit

PM 041 816 -T

PM 0477 BN
PM 0547 BN

HPU 001 Handheld Programming
Unit

PM 051 510 -T

PT 0101 BN

Accessories package for HPU

PM 061 005 -T

Components for venting

TTV 001 Air drier

PM Z01 121

PM 0022 BN

incl. Zeolite filling

TVF 005 Venting valve

24 V DC, G 1/8"

PM Z01 135

PM 0507 BN

closed without current

Venting flange

DN 10 ISO-KF

PM 033 737 -T

Circlip for venting flange

DN 10-15 ISO-KF

PF 102 016 -T

Components for heating

Heating jacket, safety plug

230 V,

PM 041 903 -T

PM 0542 BN

Water cooling required

Heating jacket, UL plug

208 V

PM 041 904 -T

Heating jacket, UL plug

115 V

PM 041 905 -T

Components for cooling

Air cooling

24 V DC

PM Z01 252

PM 0543 BN

Water cooling

PM 016 040 -T

PM 0546 BN

TZK 400 Water cooling unit

230 V, 50 Hz

PM Z01 245

PM 0369 BN

Dirt trap

G 3/8"

P 4161 300 2R

Fore-vacuum triggering

Relay box 1-phase

5 A

PM 041 937 -T

PT 0030 BN

Relay box 1-phase

20 A

PM 041 938 -T

TVV 001 Fore-vacuum valve

230 V, DN 16 ISO-KF

PM Z01 205

PM 0263 BN

TVV 001 Fore-vacuum valve

115 V, DN 16 ISO-KF

PM Z01 206

Accessories, general

Sealing gas valve

M6 / DN 10 ISO-KF

PM Z01 142

PM 0229 BN

Hose nipple, sealing gas valve

DN 16 ISO-KF-10

PF 144 020

Vibration compensator

DN 100 ISO-K

PM 006 459 -X

Vibration compensator

DN 100 CF-F

PM 006 488 -X

PWM box rotation speed control

10 - 30 V DC

PM 051 028 -U

PM 0563 BN

Pfeiffer Vacuum protocol

RS232/RS485

PM 0488 BN

interface protocol

TIC 001 Interface converter

RS232 in RS485

PM 051 054 -T

PM 0549 BN

TIC 250 Profibus-DP gateway

PM 051 257 -T

PM 0599 BN

TIC 260 DeviceNet gateway

PM 061 166 -T

PT 0177 BN

USB/RS485 converter
Connection cable

RS485/M12 in USB
3 m

PM 061 207 -T
PM 051 726 -T

incl. CD-ROM

TC 600 cover for IP 54

PM 051 327 -U

PT 0024 BN

Installation material, accessories for flange fastening

(see p. 9, chap. 5.3)

Содержание TMH 261

Страница 1: ...Betriebsanleitung Operating Instructions PM 0470 BE O 0709 Compact Turbo TurboDrag Pump TMH 261 TMU 261 Translation of the Original Operating Instructions...

Страница 2: ...5 6 Connecting the remote control 17 5 7 Connections diagram TC 19 6 Operation 20 6 1 Operation modes 20 6 2 Commissioning 20 6 3 Function description 21 6 4 Monitoring of the operation conditions 24...

Страница 3: ...ventions Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk evaluations and hazard analyses and are oriented on international certification standar...

Страница 4: ...t the diagrams High vacuum flange Fore vacuum flange Venting connection Cooling water connection Air cooling Electric connection Sealing gas connection Prohibition of an action or activity in connecti...

Страница 5: ...ions up to protection class IP 30 Only operate the turbopump together with a water cooling unit or in ambient conditions up to protection class IP 54 after installing a specified TC cover plate NOTE D...

Страница 6: ...riodically occurring forces The connection to a power supply with earthing of a direct voltage pole The use of accessories which are not named in this manual or not authorised by Pfeiffer Vacuum 3 Tra...

Страница 7: ...e turbopumps TMH U 261 form a complete unit together with the electronic drive unit TC 600 For the voltage supply only Pfeiffer Vacuum power supplies may be used e g TPS oder DCU The use of other powe...

Страница 8: ...vacuum flange 8 Electronic drive unit TC 600 17 Venting screw 20a Fore vacuum flange 98 Remote plug H F VV 4 17 20a 8 98 NOTE Observe the connection instructions On delivery turbopumps with TC 600 ar...

Страница 9: ...All flange components must be grease free dust free and dry at installation The operating fluid reservoir is already installed and filled for the turbopumps TMH U 261 Use of a splinter shield or prot...

Страница 10: ...ponents for installing the turbo pumps are special designs of Pfeiffer Vacuum Ob serve the minimum strength of 170 N mm2 for the flange material CAUTION Danger from the pump being ripped off When a P...

Страница 11: ...se in three steps Tightening torque 3 10 16 1 Nm Installation of CF flanges NOTE Possible damage to the pump If a pump with an ISO K flange is fastened to a vacuum chamber with an ISO F flange or if I...

Страница 12: ...and tigh ten circularly with a torque of 22 2 Nm After this check the torque since flo wing of the sealing material may make it necessary to tighten the screws Hexagon screw and through hole If used I...

Страница 13: ...ximum gas load sealing gas must be used to ensure rotor cooling In case of increased backing pressure 0 1 mbar and or operation with gas loads either air or water cooling may be used Generally use wat...

Страница 14: ...f corrosive or dusty processes The connection is made via a sealing gas valve Fig 6 Connecting the sealing gas valve Unscrew the screw plug with sealing ring out of the sealing gas connection of the t...

Страница 15: ...g to the TC 600 with a screw and lock washer 8c 1 Connect the X2 plug on the 8a connection cable to the TPS 200 DCU 200 power supply pack at the X2 connection Fasten the X2 plug to the power supply wi...

Страница 16: ...of a RS232 oder USB interface is possible via a TIC 001 or the USB RS485 converter NOTE Observe the connection instructions On delivery turbopumps with TC 600 are set up for operations with Remote Co...

Страница 17: ...pump is started On delivery Pin 1 Pin 2 Pin 3 and Pin 4 are bridged in the remote plug Shielded cable must be used Connect the shielding on the plug side for the TC 600 to the TC housing Pin assignmen...

Страница 18: ...tion acknow ledgement can be processed 6 Standby Standby off The turbopump is controlled to 66 of its nominal rotation speed 7 Rotation speed setting mode Rotation speed setting mode is off The rotati...

Страница 19: ...MS 1 2 3 4 5 6 Relay box Heating Mains input heating 115 208 230 VAC HEATING L N PE PE N L REMOTE 1 2 3 4 5 6 24 VDC max 50 mA Venting release Motor TMP Pumping station Heating Reset opt sealing gas S...

Страница 20: ...with a series of adapted accessories The installation operation and maintenance of connected devices are described in detail in the operating instructions of the individual components For information...

Страница 21: ...ents for operation with Pfeiffer Vacuum display and control units Operating instructions DCU Operating instructions HPU 001 Pumping operations with DCU Operation with re mote control Remote control op...

Страница 22: ...gned a dual function see p 17 chap 5 6 Point 5 Re set Standby With the use of Standby the turbopump can be operated either at 66 of the nominal rotation speed Standby ON or at the nominal rotation spe...

Страница 23: ...pump s capacity for each gas type Gas mode 0 factory setting for gases with the molecular mass 40 e g Ar Gas mode 1 for all lighter gases Fig 10 Gas mode power characteristic Settings are possible via...

Страница 24: ...n the venting connection of the pump about one turn Venting with venting valve TVF 005 Enable venting via the functions of the electronic drive unit Settings are possible via the RS485 on the TC 600 b...

Страница 25: ...nation carry out appropriate safety precautions in order to pre vent danger to health through dangerous substances Decontaminate affected parts before carrying out maintenance work NOTE Disclaimer of...

Страница 26: ...ntion to O ring Using tweezers lift out the lubricant reservoir Remove impurities from the turbopump and the end cover with a clean lint free cloth Do not use any cleaning fluids Push the new operatin...

Страница 27: ...Remove impurities from the turbopump and the end cover with a clean lint free cloth Do not use any cleaning fluids Using tweezers insert new Porex rods 8 pieces Push the new operating fluid reservoir...

Страница 28: ...is switched off the subsequently running turbopump delivers voltages 50 V eff There is a danger of electric shock when touching open contacts on conducting parts Never separate the electronic drive u...

Страница 29: ...eiffer Vacuum Service clean the turbopump completely If necessary have the bearings replaced Take into account the total running time Change the operating fluid reservoir Installation and commissionin...

Страница 30: ...ction Check gaskets and flange fasteners Eliminate leaks Gas load too high Reduce process gas feed Rotor runs hard defective bearing Check bearing for noise development Contact Pfeiffer Vacuum Service...

Страница 31: ...Close the flange openings by using the original protective covers If possible send pump in the original packaging Contaminated vacuum pumps No units will be accepted if they are contaminated with mic...

Страница 32: ...otes Pieces Order Qty 6 End cover M40 x 1 PM 003 619 A 1 7 Lubricant reservoir PM 063 265 T incl O ring 1 7 Lubricant reservoir Y PM 053 266 T incl 8 x Porex rod 7a O ring felt washer 1 8 Electronic d...

Страница 33: ...g jacket safety plug 230 V PM 041 903 T PM 0542 BN Water cooling required Heating jacket UL plug 208 V PM 041 904 T Heating jacket UL plug 115 V PM 041 905 T Components for cooling Air cooling 24 V DC...

Страница 34: ...gas throughputs at least 10 m3 h 10 m3 h Pumping speed for N2 210 l s 210 l s Pumping speed for He 220 l s 220 l s Pumping speed for H2 175 l s 175 l s Pumping speed for Ar 200 l s 200 l s Cooling me...

Страница 35: ...ISO KF G1 8 M6 3 120 53 5 48 119 138 5 86 5 96 5 128 5 146 162 5 194 5 100 95 58 88 7 14 104 2 125 50 M8 30 60 45 67 113 5 82 3 3 M8 8 5 F F G G H VV VV DN 100 CF F DN 25 ISO KF M6 G1 8 3 3 M8 M8 50...

Страница 36: ...atibility 2004 108 EC The agent responsible for compiling the technical documentation is Mr J rg Stanzel Pfeiffer Vacuum GmbH Berliner Stra e 43 35614 A lar TMH 261 TMU 261 Guidelines harmonised stand...

Страница 37: ...0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Component...

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