3
Abbreviations in the text
TMS = Temperature management system
TCM = Magnetic bearing controller
TMP = Turbomolecular pump
Abbreviations on the type plate of the pump
TMH 1600
M
:
Fully magnetic bearing pump
Suffix”
C
“:
Surface protection for passive protection of
the pump
Suffix ”
P
“:
Purge gas connection for the prevention of
the ingress of aggressive gases into the motor
and bearing area
Suffix: ”
T
“:
Integrated temperature management
system
Suffix ”
H
“:
High level gas throughputs for process
technology
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions
Danger of burns from
touching hot parts.
Danger of an electric shock.
Danger of personal injury.
Danger of damage to the pump
or to the system.
Danger of injury from rotating parts.
Attention to particulary important information on
the product, handling the product or to a
particular part of the documentation.
Modifications reserved.
☞
PLEASE NOTE
☞
Read and follow all instructions in this manual.
☞
Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞
Avoid exposing any part of the body to vacuum.
☞
Observe the safety and accident prevention regulations.
☞
Regularly check that all accident prevention measures are
being complied with.
☞
Do not operate the turbopump with open high vacuum
flange.
☞
Do not carry out any unauthorised conversions or
alterations to the turbopump.
☞
When returning the turbopump observe the shipping
instructions.
☞
Use at least 6 bracket screws to connect the high vacuum
flange.
☞
The turbopump must be anchored in accordance with the
installation instructions.
☞
Do not disconnect the pump cable during operations.
☞
When the turbopump is open disconnect the voltage
supply to the magnetic bearing.
☞
After switching off the turbopump only disconnect the
magnetic bearing from the mains once the rotor is at rest.
☞
If a heater is in use temperatures of up to 120 °C can be
present in the area of the high vacuum flange.
Take care to avoid burns!
☞
When the temperature management system is in operati-
on, surface temperatures of up to 100 °C can arise on the
middle and upper part of the pump. Because even higher
temperatures are possible as a result of malfunctions, it is
adviseable to take protective measures against accidental
touching for temperatures of up to 150 °C.
☞
Keep leads and cables well away from hot
surfaces (> 70 °C).
☞
When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞
When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞
The unit has been accredited protection class IP 20. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken.
1.1. For Your Orientation
Instruction in the text
➡
Working instruction: Here, you have to do something.
Symbols used
The following symbols are used throughout in illustrations.
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Electric connection
Sealing gas connection
Air cooling
1. Safety Instructions
