Pfeiffer Vacuum TMH 1600M, Руководство по эксплуатации

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14
8. Technical Data
Feature Unit TMH 1600M TMH 1600M TMH 1600M H
TMU 1600M TMU 1600M
Connection nominal diameter:
Inlet DN 200 ISO-K DN 250 ISO-K DN 200 ISO-K DN 250 ISO-K
DN 200 CF-F DN 250 CF-F
Outlet DN 40 ISO-KF DN 40 ISO-KF
Magnetic bearing controller TCM 1601 TCM 1601
Nominal rotation speed without TMS 1/min 36 000 36 000
Nominal rotation speed with TMS 1/min 33 000 33 000
Standbyrotation speed 1/min 24 000 24 000
Start-up time (up to 90% of the nominal
rotation speed with TCM 1601)
(bis 90 % Nenndrehzahl mit TCM 1601)
min 6 7
Noise level dB (A) 55 55
Maximum permissible rotor temperature °C 120 120
Permissible heat radiation power W 27 27
Volume flow rate (with oil-sealed rotary vane vacuum pump):
Stickstoff N2 l/s 1000 1400 1000 1400
Helium He l/s 1100 1180 1100 1230
Wasserstoff H2 l/s 750 780 750 850
Compression ration for:
N2 – > 1 · 1010 > 1 · 108
He – 5 . 105 2 . 104
H2 – 1 · 104 2 · 103
Critical backing pressure, max.
N2
Cooling type: water mbar 9 3
Gas throughput without TMS operation at nominal rotation speed, max.
N2 Cooling type: water mbar l/s 9 15
Ar Cooling type: water mbarl/s 4,5 6
Gas throughput with TMS operation at nominal rotation speed, max1)
N2 Cooling type: water mbarl/s 7 12
Ar Cooling type: water mbarl/s 3,5 5
Gas throughput at 0,1 mbar intake pressure
N2 Cooling type: water mbarl/s 16 20
Ar Cooling type: water mbarl/s 12 14
Vertex power characteristics line2)
A W / Hz 400 400
B W / Hz 580 480
C W / Hz 360 360
D W / Hz 360 360
Theoretical final pressure mbar < 1 · 10-11 < 1 · 10-11
Final pressure 1 (metal seal with backing out) mbar < 1 · 10-10 –
Final pressure 2 (viton seal without backing out) mbar < 1 · 10-8 < 5 · 10-8
Cooling water consumtion with water at 15 ˚C
without TMS operation l/h 20 20
with TMS operation and gas load l/h 100 100
Cooling water temperature ˚C 5 - 25 5 - 25
Permissible ambient temperature with
air cooling ˚C 5 - 30 5 - 30
water cooling °C 5 - 35 5 - 35
Power consumption of:
casing heating unit W 170 170
TMS heating W 1000 1000
Permissible magnetic field mT 4 4
Protection class IP 20 IP 20
Weight kg 61/63 62/64 61 63
Relative humidity % 5-85 non-condensing 5-85 nicht betauend
1) Operation with TMS only with water cooling
2) For gas type characteristics line please refer to Section 4.6.