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Oxygen content:

max.

4 mg/kg

Chloride content:

max.

100 mg/kg

Carbonate hardness:

max.

10 ° dH

Consumption of

potassium permanganate:

max.

10 mg/kg

Carbon dioxide:

Undetectable

Ammonia:

Undetectable

pH-value:

7 – 9

Max. fore-line over pressure:

max.

6 bar

Minimum flow rate: 

see 8. ”Technical Data“

6

Fitting The Splinter Shield (Accessory)

Insert the splinter shield in the ISO-K flange in condition on
delivery.

Inserting the splinter shield in ISO-KF flange

A

Strap (Condition on delivery)

3.3. Connecting The Fore-Vacuum Side

Recommended PFEIFFER backing pump:

– dry compressing diaphragm pump 
– for large vacuum chambers UniDry™ 050-3.

Connecting the backing pump

All connections of the fore-vacuum line: With the usual small
flange components or hose screw connections.

Be sure to conduct away the exhaust gases

from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.

The exhausted process gases and vapours can

represent a health hazard and can also be envi-
ronmentally damaging. 
Comply with all the gas manufacturer’s safety
instructions.

22

23

21

V

Connecting the backing pump

21 Backing pump
22 Fore-vacuum safety valve
23 Fore-vacuum line

The electrical connection of the backing pump: Please see
the operating instructions for the Magnetic Bearing
Controller TCM 1601, PM 800 478 BN.

3.4. Connecting The Cooling Unit

The Turbopumps TMH/TMU 1600M are water cooled as stan-
dard. 
The permissible ambient temperature for water 
cooling is 35 °C.
When operating with reduced levels of gas load, air cooling is
possible (please see ”Accessories“)
The permissible ambient temperature with air cooling 
is < 30 °C and the maximum gas flow and fore-vacuum pres-
sure are reduced compared with water cooling (please refer
to Section 8. Technical Data).

Water Cooling

The cooling water can be drawn either
– from the cooling water mains or
– from Recycled Water Cooling Unit TZK in closed circuit.

Cooling from the cooling water mains

To prevent deposits collecting in the pump the cooling water
must be filtered.
The minimum requirements for the cooling water:
Mechanically clean, optically clear, no turbidity, no sediment,
chemically neutral and temperature > dew point.

Fit the delayed opening fore-vacuum safety valve (e.g. 
TVV 001, Accessory) in the fore-vacuum line (in PFEIFFER
rotary vane vacuum pumps already integrated as
standard). This prevents the vacuum chamber being venti-
lated via the backing pump.

With rigid pipe connections: Fit a bellows in the
connecting line to reduce vibration.

Before insert the splinter shield in the CF flange the strap

must

be bent.

Inserting the splinter shield in CF-F flange

A

Strap (bent)

A

A

Содержание TMH 1600M

Страница 1: ...Operating Instructions Turbomolecular Drag Pumps With Magnetic Bearings TMH 1600M TMU 1600M PM 800 344 BE C 0011...

Страница 2: ...cting The Casing Heating Unit 8 3 8 Connecting The Magnetic Bearing Controller 8 3 9 Connecting The Temperature Management System TMS 9 4 Operations 9 4 1 Before Switching ON 9 4 2 Switching ON 9 4 3...

Страница 3: ...opump When returning the turbopump observe the shipping instructions Use at least 6 bracket screws to connect the high vacuum flange The turbopump must be anchored in accordance with the installation...

Страница 4: ...g and sensors are accessible cen trally via a separate connection box When the TMS is in operation the additional casing heating unit on the turbomolecular pump is not possible 2 Understanding The TMH...

Страница 5: ...e volume flow rate of the pump by approximately 15 For fitting splinter shields please refer to Fitting the splinter shield The high vacuum side can be flanged directly to the vacuum chamber or via a...

Страница 6: ...g pump Please see the operating instructions for the Magnetic Bearing Controller TCM 1601 PM 800 478 BN 3 4 Connecting The Cooling Unit The Turbopumps TMH TMU 1600M are water cooled as stan dard The p...

Страница 7: ...M turbopump see the operating instructions for the TCM 1601 PM 800 478 BN Alternatively either the casing heating unit or the TMS can be connected to the control line Simultaneous operations of the fu...

Страница 8: ...ted during installation When baking out do not touch the heating sleeve pump casing and vacuum chamber Screw the heating sleeve tightly onto the casing with the securing screws and fit protection agai...

Страница 9: ...ing hazardous gases and observe the safety precautions of the gas manu facturer 4 3 Heating only for pumps with casing heating unit The heating duration is dependent on the degree of contami nation an...

Страница 10: ...somewhat lower frequency 4 4 Operations With The TMS If the pump is equipped with the temperature management system TMS TMH TMU 1600M C T see rating plate heating is possible in the area of the pressu...

Страница 11: ...01 Close the fore vacuum safety valve if available Where Pumping Station Control Unit TCS 180 is involved the valve closes automatically With water cooling Shut off the water supply Shut off the suppl...

Страница 12: ...e vacuum pressure too high Reduce fore vacuum pressure ambient temperature too high Reduce ambient temperature Pump doesn t attain final pressure Pump dirty Bake out pump If seriously contaminated Req...

Страница 13: ...and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated mi...

Страница 14: ...otation speed max N2 Cooling type water mbar l s 9 15 Ar Cooling type water mbarl s 4 5 6 Gas throughput with TMS operation at nominal rotation speed max1 N2 Cooling type water mbarl s 7 12 Ar Cooling...

Страница 15: ...mensions M8 8x 190 162 2 0 1 2 8 4 5 1 5 7 5 3 5 5 189 9 37 45 4 5 2 8 5 6 5 2 0 331 282 272 228 6 159 295 250 21 257 384 5 397 5 130 DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F DN 40 ISO KF DN...

Страница 16: ...on 2 1 16 USIT ring 2 P 3529 133 A 54 Venting Valve TVF 005 1 G 1 8 PM Z01 135 see Section 2 1 97 Temperature sensor complete 1 PM 073 593 X see Section 3 9 Spare parts for the air cooling unit 36 Fan...

Страница 17: ...bration compensator TMH DN 200 ISO K PM 006 668 X DN 250 ISO K PM 006 670 X TMU DN 200 CF F PM 006 669 X DN 250 CF F PM 006 671 X Fore Vacuum Safety Valve TVV 001 115 V PM Z01 206 PM 800 263 BN 230 V...

Страница 18: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 19: ...certify that the product specified below is intended for installation in a machine which is for bidden to be put into operation until such time as it has been determined that the end product is in ac...

Страница 20: ...elefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 1010 A telephone...

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