2
Index
Page
Page
1.
Safety Instructions .................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2.
Understanding The
TMH 1600 M/ TMU 1600M....................... 4
2.1. Main Features..................................................................... 4
2.2. Differences Between The Pump Types.......................... 4
2.3. Temperature Management System (TMS) .....................4
3.
Installation............................................... 5
3.1. Preparations For Installation............................................ 5
3.2. Installing The Pump, Connecting The
High Vacuum Side.............................................................. 5
Fitting The Splinter Shield (Accessory).......................... 6
3.3. Connecting The Fore-Vacuum Side ................................ 6
3.4. Connecting The Cooling Unit............................................ 6
Water Cooling..................................................................... 6
Air Cooling (Accessory) .................................................... 7
3.5. Connecting The Venting Valve ........................................ 7
3.6. Connecting The Sealing Gas............................................ 8
3.7. Connecting The Casing Heating Unit.............................. 8
3.8. Connecting The Magnetic Bearing Controller .............. 8
3.9. Connecting The
Temperature Management System (TMS) .................... 9
4.
Operations ................................................ 9
4.1. Before Switching ON......................................................... 9
4.2. Switching ON...................................................................... 9
4.3. Heating (only for pumps with casing heating unit)....... 9
4.4. Operations With The TMS .............................................. 10
4.5. Intermittent Mode Operations
Of The Backing Pump...................................................... 10
4.6. Gas Type Dependent Operations ...................................10
4.7. Safety Bearings.................................................................11
4.8. Switching OFF And Venting............................................ 11
4.9. Shutting Down For Longer Periods ............................... 11
5.
What To Do In Case
Of Breakdowns? .................................... 12
6.
Maintenance .......................................... 13
7.
Service.................................................... 13
8.
Technical Data....................................... 14
8.1. Dimensions.........................................................................15
9.
Spare Parts............................................. 16
10. Accessories ........................................... 17
Declaration of Contamination............................................... 18
Manufacturer’s Declaration............ last page
Please note:
Current operating instructions are available via
www.pfeiffer-vacuum.de under ”Infoservice”.
