4
2.1. Main Features
Cooling
Standard:
Water cooling
Alternative: Air cooling as an accessory (permissible ambient
temperature < 30 °C).
Bearings
High vacuum side: Wear free permanent magnetic bearing.
Fore-vacuum side: Wear free, electromagnetic radial and
axial bearings.
In addition:
Dry running safety bearings.
Proper use
– The Turbomolecular Pumps TMH/TMU 1600M may only be
used for the purpose of generating vacuum.
– The Turbomolecular Pumps TMH/TMU 1600M C (please
see the rating plate) are designed to pump corrosive gases
and vapours. Where corrosive gas processes are involved,
gas bonding and particles which can damage the surfaces
of the pump can be produced. The motor and bearing com-
partments have to be protected with sealing gas.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
Feature
TMH 1600M
TMU 1600M
TMH 1600M H
High vacuum flange DN 200 ISO-K
DN 200 CF-F
DN 200 ISO-K
DN 250 ISO-K
DN 250 CF-F
DN 250 ISO-K
Seal
Viton
Metal
Viton
Attainable
< 1 · 10-8 mbar
< 1 · 10-10 mbar < 5 · 10-8
final pressure
(without baking-out) (with baking-out) (without baking-out)
2.3. Temperature Management System (TMS)
Pumps with the designation TMH 1600M T/TMU 1600M T
(please see the rating plate) can be heated in the area of the
pressure stages with the heaters integrated in the casing and
temperature sensors up to a maximum of 90 °C.
The connections for heating and sensors are accessible cen-
trally via a separate connection box.
When the TMS is in operation the additional casing heating
unit on the turbomolecular pump is not possible.
2. Understanding The TMH 1600M / TMU 1600M
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– The turbopump may only be operated in conjunction with a
PFEIFFER Magnetic Bearing Controller TCM 1601 with
relevant cables.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– The turbopump may only be operated subject to the
ambient conditions in accordance with protection class
IP 20.
Improper use
The following is regarded, inter alia, as improper:
– The pumping of explosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 8. ”Technical Data”).
– The use of accessories which are not named in this
manual or which have not been agreed by the
manufacturer.
– Operating the pump in environments which require a pro-
tection class superior to IP 20.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
Turbomolecular Drag Pump TMH 1600M
1
High vacuum flange
2
Fore-vacuum flange
3
Cooling water connection
5
Electric connection
9
Locking screw/sealing gas connection
42 Venting valve
1
3
2
9
5
42
