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Pfeiffer Vacuum PrismaPro QMA 250 F1, Перевод оригинала

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NOTICE

Damage to the analyzer caused by external voltages and magnetic fields

Never expose the analyzer electrode system to external voltages that are hazardous in the event of 
contact, as a result of galvanic connections, contact, flashover, plasma, ion or electron beams, etc. If 
such danger sources exist in the vacuum chamber, you must provide protective measures that safely 
rule out such influences. Even smaller external voltages acting on the analyzer will lead to damage to 
the electronics and unreliable measuring results.

► Meet appropriate protective measures against external voltages (for example, better arrange-

ment, shielding, earthing, etc.).

► Do not mount the analyzer near to magnetic fields with > 0.2 mT.
► Ensure mechanical protection against contact of the analyzer and the parts installed.
► Ensure compulsory separation of the current supply when opening the system (using a door con-

tact, for example).

► Observe the standards applicable for the vacuum system.

NOTICE

Impairment of the function caused by incorrect installation

You must install the QMA analyzer correctly in terms of vacuum technology, so that the gases to be 
tested have unobstructed access to the analyzer. This is the only way to correctly determine the gas 
composition in the vacuum chamber. When materials vaporize or vacuum coatings have deposited in 
the vacuum chamber, you must protect the analyzer against separation of these materials onto its 
surfaces, using a deflector plate or baffle.

► Always carry out a correct installation.
► Make sure that the gas exchange between the analyzer and the vacuum chamber is not im-

paired.

► Install a cover plate or a baffle in order to avoid vacuum coating of the analyzer.
► Include the analyzer in the baking out area if you are heating the system.

– You can also fit the analyzer with a separate heating.

Horizontal analyzer positioning

The analyzer is suitable for installation on the vacuum system in any position. Pfeiffer Vac-
uum recommends a horizontal mounting position. This has the following advantages:

● Optimum protection for the electronic unit against falling items
● Easier installation
● Easy access to the front panel of the electronic unit

Required tools

● 2 open-end wrenches, 

WAF 10

Required material

● 1 copper gasket (490DFL040-S-G-S5)
● Yellow-green or bare copper wires, 2.5 mm

2

 or 4.0 mm

2

 cross section surface

Installation 

31/86

Содержание PrismaPro QMA 250 F1

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original QMG 250 PRISMAPRO Compact mass spectrometer ...

Страница 2: ...o pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and variants of your product Note that your product may not be equipped with all features described in this document Pfeiffer Vacuum constantly adapts its products to the latest state of the art without ...

Страница 3: ... Pfeiffer Vacuum 17 2 9 Operator requirements 17 3 Product description 18 3 1 Scope of delivery 18 3 2 System overview 18 3 2 1 Structure of the system 18 3 2 2 Analyzer QMA 250 20 3 2 3 Electronic unit QME 250 21 3 2 4 PV MassSpec software 22 3 3 Interfaces 22 3 3 1 POWER SUPPLY 22 3 3 2 Ethernet LAN 23 3 3 3 AUX I O 23 3 3 4 EXT I O 24 3 3 5 TP GAUGE 26 3 3 6 USB 26 3 4 Identifying the product 2...

Страница 4: ...53 9 5 1 Replacing the open ion source 53 9 5 2 Replacing the cross beam ion source 54 9 5 3 Replacing the grid ion source 56 9 6 Calibrating high frequency and the mass scale 57 9 6 1 Factory calibration 57 9 6 2 Attaining a stable operating temperature for PrismaPro 58 9 6 3 Selecting the gas mixture for the mass calibration 58 9 6 4 Setting high frequency for both polarities 58 9 6 5 Perform ma...

Страница 5: ... 4 1Spare parts 74 14 4 2Set of small parts PT 163 544 for open ion source 75 14 4 3Set of small parts PT 163 543 for crossbeam ion source 75 14 4 4Set of small parts PT 163 534 for grid ion source 75 15 Technical data and dimensions 76 15 1 General 76 15 2 Technical data PrismaPro QMG 250 F 76 15 3 Technical data PrismaPro QMG 250 M 77 15 4 Dimensions 79 NRTL certification 83 Declaration of confo...

Страница 6: ...mmunication errors 62 Tbl 16 Hardware errors 64 Tbl 17 Operating and measuring errors 66 Tbl 18 Software error messages from PV MassSpec 66 Tbl 19 Measurements for checking the analyzer 68 Tbl 20 Electronic unit QME 250 73 Tbl 21 Analyzer QMA 250 74 Tbl 22 Filament units 74 Tbl 23 Ion sources 74 Tbl 24 Spare parts 75 Tbl 25 Set of small parts PT 163 544 for open ion source 75 Tbl 26 Set of small p...

Страница 7: ...on source with clamps 46 Fig 22 High frequency connections of the quadrupole mass filter 46 Fig 23 Disassembling the filament unit of the open ion source 49 Fig 24 Installing the filament unit of the open ion source 49 Fig 25 Filament unit of the crossbeam ion source 50 Fig 26 Support spring on the analyzer with crossbeam ion source 51 Fig 27 Filament unit of the grid ion source 52 Fig 28 Replacin...

Страница 8: ...pec part of the software Declaration of conformity part of these instructions Tbl 1 Applicable documents You can find these documents in the Pfeiffer Vacuum Download Center 1 1 2 Variants This document applies to products with the following part numbers Part number Designation PT M15 QMG 250 PrismaPro Faraday PT M16 QMG 250 PrismaPro Faraday electron multiplier Tbl 2 QMG 250 PrismaPro Part number ...

Страница 9: ...n find the part number on the rating plate of the product Pfeiffer Vacuum reserves the right to make technical changes without prior notification The figures in this document are not to scale Dimensions are in mm unless stated otherwise 1 2 Target group These operating instructions are aimed at all persons performing the following activities on the product Transportation Setup Installation Usage a...

Страница 10: ...n 1 3 3 Stickers on the product This section describes all the stickers on the product along with their meaning D 35614 Asslar Mod P N S N Input QMG 250 PT M16 312 210 4452 24 V DC 1 25 A 30 W Made in United States 2020 02 Rating plate example Rating plate for PrismaPro 1 2 3 3 Fig 1 Position of the stickers on the product 1 Rating plate for entire system QMG 250 3 Rating plate for analyzer QMA 25...

Страница 11: ...F High Frequency HV High voltage IP Intenet Protocol IQ Ion source Ir Y2O3 Yttrium oxide Y2O3 coated iridium Ir LAN Local area network M Metric ISO thread MAC Hardware address of a network adapter providing an unambiguous identifier for the device in a computer network media access control ME Unit of quantity MSL Mean sea level PP Partial pressure PV Pfeiffer Vacuum RF Radio frequency RGA Residual...

Страница 12: ...ct or about this docu ment 2 2 Safety instructions Safety instructions according to product s life stages All safety instructions in this document are based on the results of a risk assessment Pfeiffer Vacuum has taken into account all the relevant life stages of the product Risks during installation DANGER Danger to life caused by electric voltage on the QME electronic unit You may only attach th...

Страница 13: ...horized or unintentional reactivation Do not insert any objects into the vent openings Never open an external power supply pack Never operate an open or defective device Secure a defective device against accidental operation Protect the device against moisture DANGER Danger to life from electric shock Inadequate or incorrect grounding of the unit leads to contact sensitive voltage on the housing W...

Страница 14: ... process media result in contamination of devices or parts of them During maintenance work there is a risk to health from contact with these poisonous substances Illegal disposal of toxic sub stances causes environmental damage Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media Decontaminate affected parts before carrying out maintenance w...

Страница 15: ...he installation into a system the operator is required to check and re evalu ate the conformity of the overall system in the context of the relevant European Direc tives before commissioning that system Safety aspects Proper use will guarantee that personnel are provided protection by the device There are no electrical hazards posed by the device as long as proper use is observed as prescri bed It...

Страница 16: ...in the corresponding product documenta tion The operator is responsible for the process media used 2 7 Owner requirements Safety conscious working 1 Only operate the product in a technically flawless state 2 Operate the product in line with its intended purpose safety and hazard conscious and only in compliance with these operating instructions 3 Fulfill the following instructions and monitor the ...

Страница 17: ...orage operation and disposal fields Such training must ensure that individuals are capable of carrying out the required activi ties and work steps safely and properly 2 8 2 Personnel qualification for maintenance and repair Advanced training courses Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3 Adequately trained individuals are Maintenance level 1 Customer trained...

Страница 18: ...relief Cable plug 2 Amphenol 6 pin male for measuring tube connection Documentation Operating instructions multilingual Quick Start Guide multilingual Miscellaneous Test report accessible on device Web UI accessible on device PV MassSpec software downloadable via PV Cloud Unpacking the product and checking completeness of the shipment 1 Unpack the product 2 Remove the transport fasteners transport...

Страница 19: ...50 elec tronic unit is available with the IO 250 already installed Pfeiffer Vacuum can however also retrofit the QME 250 electronic unit with a IO 250 PrismaPro Web UI You can find detailed information on the use of PrismaPro Web UI in the corresponding op erating instructions Operation of the PrismaPro is possible via the Web UI user interface or with the highly comprehensive PV MassSpec software...

Страница 20: ...e piece DN 40 CF F 116 mm in length 1 2 3 4 5 Fig 4 Analyzers with transport protection 1 Analyzer QMA 250 F 4 Intermediate piece 2 Transport protection 5 Transport protection 3 Analyzer QMA 250 M The secondary electron multiplier EM is a current amplifier working under high vacuum conditions An alyzers with EM are used for residual gas and trace gas analysis at very low total pressure and applica...

Страница 21: ...ystem 4 Nut and adjusting screw for aligning and securing the quadrupole rod sys tem in the jacket tube 14 Screws 2 of the quadrupole mass filter 5 Screws 2 of the quadrupole mass filter 15 Ceramic insulators of the ion source wiring 6 Jacket tube 16 Ceramic insulators of the filament wiring 3 7 HF connection for quadrupole rod sys tem 17 Ion source connections 3 8 Fixing screws 2 of connection fl...

Страница 22: ...ion for IO 250 LED STAT Emission status on off LED POWER Power supply on off Tbl 7 Front panel elements 3 2 4 PV MassSpec software The PrismaPro mass spectrometer system can be configured and operated with the PV MassSpec soft ware The software allows measured data to be displayed evaluated compared and saved Fig 7 PV MassSpec 3 3 Interfaces 3 3 1 POWER SUPPLY The 24V 30W connection is comprised o...

Страница 23: ...transmission no connection Tbl 8 Status of the Ethernet connection 3 3 3 AUX I O The AUX I O connection is comprised of a 15 pin D Sub socket The PrismaPro electronic unit QME 250 supports I O functions via the AUX I O connection on the front panel 1 8 9 15 Fig 10 AUX I O 15 pin D Sub socket 1 Relay COM 10 Analog output 1 2 Relay NO 13 Digital input 1 pre setting Emission OFF 3 Relay NC 14 Digital...

Страница 24: ...lectronic unit QME 250 supports extended I O functions via the EXT I O connection on the front panel with IO 250 installed 1 22 43 21 42 62 Fig 11 EXT I O 62 pin HD D Sub socket 1 Digital input 13 32 Digital output 9 2 Digital input 14 33 Digital output 10 3 Digital input 15 34 Digital output 11 4 Digital input 16 35 Analog output 4 5 Digital input 17 36 Analog output 5 7 Digital output 2 37 Analo...

Страница 25: ...6 bit differential analog input channels analog input 2 to 9 Voltage range 10 V Digital outputs 10 digital output channels digital output 2 to 11 open collector Fig 12 Connection example Digital output EXT I O Digital inputs 5 digital input channels digital input 13 to 17 low active Product description 25 86 ...

Страница 26: ...ol C 091 A socket 1 Identification 4 Analog ground measurement signal 2 Ground GND 5 Screening shielding 3 Signal input measuring signal 0 to 10 V DC 6 Supply voltage 24 V DC 3 3 6 USB The mini USB connection USB is reserved for use by Pfeiffer Vacuum service personnel for service purposes 3 4 Identifying the product You will need all the data from the rating plate to safely identify the product w...

Страница 27: ...ole mass spectrometer system is a relative measuring instrument which requires calibration with respective calibration gases in order to achieve an accurate quantitative gas analysis The quadru pole mass spectrometer system electronics generate and control the direct high and HF voltages re quired for the ion sources mass filter and detector The quadrupole mass spectrometer system enables configur...

Страница 28: ...port protections prior to each transport 4 2 Storing the product NOTICE Damage caused by improper storage Improper storage will lead to damage to the product Static charging moisture etc lead to defects on the electronic components Comply with the instructions for safe storage Packing We recommend storing the product in its original packaging General information for safe storage Store the product ...

Страница 29: ...ock Before the installation check that the connection leads are voltage free Conduct the electrical connection in accordance with locally applicable regulations Make sure that the local mains voltage and frequency match rating plate specifications Make sure that the mains cable and extension cable meet the requirements for double isolation between input voltage and output voltage in accordance wit...

Страница 30: ...ue 2 Install the analyzer 3 Install the electronic unit 4 Connect the communication cable 5 Connect the power supply 5 2 Installing the analyzer DANGER Danger to life caused by electric voltage on the analyzer During operation dangerous voltage is present on the electrode system of the QMA analyzer In un favorable conditions other parts installed in the vacuum chamber e g gauges may be exposed to ...

Страница 31: ...y in terms of vacuum technology so that the gases to be tested have unobstructed access to the analyzer This is the only way to correctly determine the gas composition in the vacuum chamber When materials vaporize or vacuum coatings have deposited in the vacuum chamber you must protect the analyzer against separation of these materials onto its surfaces using a deflector plate or baffle Always car...

Страница 32: ...re use 4 Secure the analyzer with a new copper gasket electroconductively to the vacuum chamber CF flange DN 40 to ensure grounding of the analyzer as prescribed 5 Attach the screws with the screw heads on the same side as the electronic unit to avoid impair ments between the black fastening nut and the analyzer installation materials 6 For vacuum system without grounding Prepare a grounding conne...

Страница 33: ...of the QME and exit unob structed at the back of the device Observe the operating temperatures see Technical data NOTICE Damage due to bending contacts If you apply force to the red electronics housing when mounting the angled electronics unit you may cant the contacts This bends and damages the contacts Only apply force to the angled connection housing of the electronics unit Prerequisite QMA 250...

Страница 34: ...tributor with mains switch Route the control cable separately from the interference source Prerequisites Appropriate ambient conditions Adequate ventilation is guaranteed Mains voltage 100 240 V AC 50 60 Hz 80 W max Procedure 1 Slide back the lock on the 24 V cable plug of the current supply 2 Connect the cable to the 24 V socket on the electronic unit QME 250 3 Release the lock to engage the plug...

Страница 35: ...conflicts in the net work 1 Change the IP addresses of the PrismaPro devices being connected 2 Connect the PrismaPro devices to a network Using IP addresses Pfeiffer Vacuum recommends the use of static IP addresses Reserve a block of IP addresses for static use and ensure that these reserved IP address es are prohibited on the DHCP server host This will prevent any conflicts with double IP address...

Страница 36: ... 0 255 255 0 0 255 255 255 192 Network prefix 192 168 1 0 192 168 0 0 192 168 1 128 Host protocol 0 0 0 104 0 0 1 105 0 0 0 22 Tbl 11 Examples for sub networks The subnet masks define which octets of the IP address are used as a network prefix To allow 2 net work devices to communicate these must be located in the same sub network This means that they do not only have to be connected in the same i...

Страница 37: ...rismaPro directly with a host computer Only change the IP address of the PrismaPro if the host computer being used has a different net work prefix than that of the PrismaPro Change the IP address of the host computer if the host computer does not have the same network prefix and the same subnet mask as the PrismaPro Installing a single PrismaPro in an existing local network Change the standard IP ...

Страница 38: ...here and download latest version of PV MassSpec soft ware Password PrismaPro Fig 18 Desktop shortcut Procedure 1 Open the directory in the Pfeiffer Vacuum Cloud 2 Download the software 3 Start the software installation by double clicking PVMassSpec_Installer exe 4 If necessary acknowledge the User Account Control prompt with Yes 5 Follow the installation in the wizard 6 Accept the license with Yes...

Страница 39: ...d specialist personnel Before carrying out any installation and maintenance work switch the device off and disconnect it from the current supply After switching off wait about 60 seconds and then disconnect all cables power cable at the end Never open the device with the current supply connected Secure the current supply against unauthorized or unintentional reactivation Do not insert any objects ...

Страница 40: ...ple measurements as well as leak detection can be performed via the Web UI More over adjustment and setting of diverse device parameters are also possible 1 Insert the mains plug of the SP 250 power supply pack The LED POWER on the front panel of the electronic unit lights up and the QMG 250 PrismaPro is ready for operation 2 Switch on the PC 3 Start the PV MassSpec software Flickering of the yell...

Страница 41: ...ion on the use of PrismaPro Web UI can be found in the corresponding operating in structions 7 2 Use PV MassSpec Detailed information on the use of PV MassSpec can be found in the Help file for the software and in these operating instructions Operation 41 86 ...

Страница 42: ...components with bare hands increases the desorption rate and leads to in correct measurements Dirt e g dust fingerprints etc and damage impair the function During assembly and maintenance work on high or ultra high vacuum systems always wear clean lint free and powder free laboratory gloves Only use clean tools Make sure that the connection flanges are free of grease Remove protective caps and pro...

Страница 43: ...through completely first before you commence with work 9 1 Execution of maintenance work Maintaining the analyzer QMA 250 The analyzer ages in normal use and does not require preventive or regular maintenance work Carry out a visual inspection of the analyzer Eliminate malfunctions and faults resulting from a contaminated ion source or from a contaminat ed analyzer using the degas function of the ...

Страница 44: ...F file opens 9 3 Maintaining the analyzer QMA 250 NOTICE Filament damage from incorrect handling Filaments are highly sensitive pre assembled units You can easily damage filaments by incorrect handling Allow only qualified personnel to replace filaments Never touch the filament even with gloves Never bend the filament unit Never tilt the filament unit as otherwise you will bend the formation room ...

Страница 45: ... necessary Carry out all work in a well lit area Visual inspection before replacing the filament unit Inspect and assess the complete ion source before replacing the filament unit Pfeiffer Vac uum recommends replacing the complete ion source in the event of damage significant de posits or soiling as well as signs of contamination e g discoloration 9 3 1 Visually inspect the QMA 250 analyzer Prereq...

Страница 46: ...2 Fig 22 High frequency connections of the quadrupole mass filter 1 Screws of the quadrupole mass filter 2 High frequency connections Procedure 1 Inspect the filament connections for secure fastening of the clamps short circuit 2 Inspect the filament connections for oxidized areas 3 Inspect the ion source connections for secure fastening of the clamps short circuit 4 Inspect the ion source connect...

Страница 47: ...tures 200 C NOTICE Damage to the electron multiplier EM caused by excessive temperatures Switching on the electron multiplier at high temperatures will lead to permanent damage Do not switch on the electron multiplier at analyzer temperatures 150 C Prerequisites Vacuum system with heater for baking out the analyzer Temperature which can be attained with the heater 120 C High vacuum 1 10 5 hPa Dete...

Страница 48: ... even with gloves Never bend the filament unit Never tilt the filament unit as otherwise you will bend the formation room 9 4 1 Replacing the filament unit of the open ion source NOTICE Damage to open ion source filament anode from horizontal movement Excessive horizontal movement will lead to damage to the anode Place the filament unit onto the ion source carefully and thoroughly Make sure that t...

Страница 49: ...ions away from the filament unit 6 Carefully pull the filament unit away from the ion source 3 4 5 1 2 6 7 8 9 Fig 24 Installing the filament unit of the open ion source 1 Filament unit 6 Screw 3 M1 6 4 flat head 2 Counterbore 7 Clamp 3 M1 6 for filament 3 Nut 3 M1 6 hexagon stainless steel gold plated 8 Spring washer 4 Lock washer 3 9 Fixing screw 5 Brace 3 Installing the filament unit 1 Place th...

Страница 50: ...ecommends always renewing both filament holders with filaments Prerequisite PrismaPro deactivated Required tools Socket key WAF 3 2 Flat screwdriver 3 mm Torque wrench Flat pliers Required aid Mounting aid for the analyzer Required spare parts Filament unit for crossbeam ion source with tungsten filaments or Y2O3 coated iridium filaments If necessary set of parts PT 163 543 for the replacement of ...

Страница 51: ...ulder facing down towards the filament holder into the mounting hole 5 Tighten the nuts Tightening torque 0 15 Nm 6 Make sure that Wehnelt plates and filaments are positioned correctly When correctly installed the Wehnelt plates and filaments sit parallel to and at the same height as the lateral openings of the formation area 7 Insert the filament connections into the clamps 8 Hold the clamps with...

Страница 52: ...unit away from the ion source Installing the filament unit 1 Place the analyzer in the mounting aid 2 Carefully remove the new filament unit with attached support ring from the transport packaging 3 Place the new filament unit onto the stud bolts of the ion source 4 Install the ceramic insulators hoods washers and circlips 5 Tighten the nuts Tightening torque 0 15 Nm 6 Loosen the support ring bolt...

Страница 53: ...ce filaments Never touch the filament even with gloves Never bend the filament unit Never tilt the filament unit as otherwise you will bend the formation room 9 5 1 Replacing the open ion source NOTICE Property damage caused by falling ceramic insulators The fixing screws of the ion source only have 4 turns of thread and can quite easily fall into the quad rupole mass filter as the ion source is b...

Страница 54: ...rod system 4 Fasten the fixing screws of the ion source which secure the ion source to the quadrupole mass filter Tightening torque 0 40 Nm 5 Carefully bend the wiring away onto the ion source using the flat pliers 6 Hold the clamps for the filament unit and the clamps for the ion source supply with the flat pliers 7 Tighten the screws and nuts of the clamps Tightening torque 0 15 Nm 8 Check the w...

Страница 55: ...3 crosshead stainless steel gold plated 2 Screw of filament unit 4 M1 6 5 slot stainless steel gold plated 4 Cross beam ion source 1 Fig 30 Support spring on the analyzer with crossbeam ion source 1 Support spring Disassembling the ion source 1 Place the analyzer in the mounting aid 2 Remove the support spring 3 Hold the clamps and connections with the flat pliers 4 Loosen and remove the screws of...

Страница 56: ...lternatively enter mmsp sensorIonSource tPTripCount set 0 in the web browser and con firm with Enter 9 5 3 Replacing the grid ion source NOTICE Property damage caused by falling ceramic insulators The fixing screws of the ion source only have 4 turns of thread and can quite easily fall into the quad rupole mass filter as the ion source is being disassembled When turning the analyzer upside down to...

Страница 57: ...ing in the connections of the ion source Tightening torque 0 15 Nm 8 Check the wiring of filament and ion source 9 Check the filaments and the ion source by way of resistance measurement Setting parameters in the operating software to 0 zero Set the pressure cut off meter of the ion source to 0 zero in uCon with the command U204 Alternatively enter mmsp sensorIonSource tPTripCount set 0 in the web...

Страница 58: ...3 masses this increases the quality of the calibration 9 6 4 Setting high frequency for both polarities When the PrismaPro is initially commissioned after changing the analyzer or the electronic unit or in case of aging or changes to the installation conditions the HF stage of the PrismaPro must be retuned The Reset RF frequency function scans the high frequency range automatically and tunes the h...

Страница 59: ...o save the new high frequency value for the set polarity in the Hardware Configura tion file of the analyzer If you do not save the high frequency the HF warning Hardware information Hardware Warning RF board always appears when you turn the electronics unit off and on again 9 Repeat this procedure for Reverse polarity otherwise you are operating the analyzer with 2 dif ferent frequencies 10 As re...

Страница 60: ... average mass Calibration with higher mass 1 Calibrate with Argon Ar if the process does not contain any gases with masses 40 u 2 If the process contains higher masses calibrate a mass between the average mass and 100 u for analyzers with mass range of 100 u 3 If the process contains higher masses calibrate a mass between 100 u and 200 u for analyzers with mass range of 200 u 4 If the process cont...

Страница 61: ... AC Ensure that the output voltage at the SP 250 external power supply pack is between 20 and 30 V DC Replace the SP 250 external power supply pack Error in the electronic unit QME Contact Pfeiffer Vacuum Service LED STAT does not light up Emission off Filament defective Check the filament QME has no connection to the analyzer Check the connection between QME and analyzer Ensure that the contacts ...

Страница 62: ...w the maximum operating pressure 5 10 4 hPa Defective analyzer fila ment open or short circuited Check the ion source elements and analyzer ele ments for short circuit and insulation Ensure that the wiring screws are securely fas tened Replace the filament unit the ion source or the analyzer Electronic unit QME not attached to the analyzer correctly Make sure that the electronic unit QME has been ...

Страница 63: ...ure Total pressure error Total pressure too high Reduce the pressure Total pressure plate short circuited or contami nated Replace the ion source Contact Pfeiffer Vacuum Service Ion source contaminated Replace the ion source Contact Pfeiffer Vacuum Service Electrometer error Electrometer error Current too high 1 10 6 A or 1 10 6 A Reduce the pressure Reduce the EM voltage Check the feedthrough of ...

Страница 64: ...roken or short circuited Check the ion source elements and analyzer ele ments for short circuit and insulation Ensure that the wiring screws are securely fas tened Ensure that the flange or the pipe features an in ner diameter of 37 mm preferably 39 mm Replace the filament unit the ion source or the analyzer Poor contact of wiring Check the ion source elements and analyzer ele ments for short circ...

Страница 65: ...ibration faulty Set new mass positions and resolution tuning High frequency error Refer to the hardware error HF error Mass filter error Refer to the hardware error Mass filter error EM defective Contact Pfeiffer Vacuum Service Error in the electronic unit QME Contact Pfeiffer Vacuum Service DSP communication error Contact Pfeiffer Vacuum Service Low sensitivity Low sensitivity Analyzer contaminat...

Страница 66: ...e level High noise level System grounding Make sure that the vacuum system is ground ed Scan speed is too quick for the am plification setting Increase the dwell time Dwell Contact Pfeiffer Vacuum Service Electronic unit QME not attached to the analyzer correctly Make sure that the electronic unit QME has been completely pushed onto the analyzer Ensure that the contacts are straight and are not be...

Страница 67: ... intact filament The previous use of the PrismaPro may however have influ enced the performance of the second filament Prerequisites PrismaPro deactivated Analyzer QMA 250 and electronic unit QME 250 disconnected Required aids Ohmmeter 0 2 to 30 MΩ Procedure 1 Measure the resistance of each filament The measurement can also be performed in a vacuum 2 Measure the resistance of each pin with regard ...

Страница 68: ...defective see chapter Contacts on QMA 250 and QME 250 page 67 Tbl 19 Measurements for checking the analyzer 8 Although the measurements with the installed filament and ceramic shielding of the EM may be 30 MΩ it must be 30 MΩ when the filament and ceramic shielding of the electron multiplier have been removed 9 Exceptions Resistance between filament 1 and 2 Pin 3 and 4 and filament Common Pin 10 M...

Страница 69: ...Pfeiffer Vacuum decontaminates products not clearly declared Free of contamination at your expense Instructions for safe shipping Do not ship microbiological explosive or radioactively contaminated products Observe the shipping guidelines for the participating countries and transport companies Highlight any potential dangers on the outside of the packaging Download the explanation for contaminatio...

Страница 70: ...the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 12 1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle Dispose of our products according to the following Iron Aluminium Copper Synthetic Electronic components Oil and fat solvent free Observe the spe...

Страница 71: ...lity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum representa tive For fast and smooth service process handling we recommend the following 1 Download the up to date form templates Explanations of service requests Service requests Contamination declaration a ...

Страница 72: ...oduct in suitable stable transport containers only e Maintain applicable transport conditions ERKLÄRUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send your product to your local Service Center 8 You will receive an acknowledgment quotation from Pfeiffer Vac uum Our sales and delivery conditions and repair and maintenance conditions for vacuum devi...

Страница 73: ...ctronic unit QME 250 Part number Short description Mass range u Input Output Version PT M28 641 QME 250 M1 1 100 Standard without IO 250 straight PT M28 642 QME 250 M2 1 200 PT M28 643 QME 250 M3 1 300 PT M28 651 QME 250 M1 1 100 expanded with IO 250 PT M28 652 QME 250 M2 1 200 PT M28 653 QME 250 M3 1 300 PT M28 661 QME 250 M1 1 100 Standard without IO 250 90 angled PT M28 662 QME 250 M2 1 200 PT ...

Страница 74: ...21 Analyzer QMA 250 14 2 3 Filament units Part number IS type Filament material PT 163 311 open W PT 163 312 Ir Y2O3 PT 163 331 CB W PT 163 332 Ir Y2O3 PT 163 341 Grid W Tbl 22 Filament units 14 3 Spare parts Maintenance Level 2 Part number Type Filament material PT 163 211 open W PT 163 212 Ir Y2O3 PT 163 231 CB W PT 163 232 Ir Y2O3 PT 163 241 Grid W Tbl 23 Ion sources 14 4 Spare parts and small ...

Страница 75: ... steel gold plated 3 Tbl 25 Set of small parts PT 163 544 for open ion source 14 4 3 Set of small parts PT 163 543 for crossbeam ion source Designation Quantity pieces Screw M2 3 crosshead stainless steel gold plated 3 Clamp with M1 6 thread U shaped for ion source 4 Screw M1 6 5 slot stainless steel gold plated 4 Ceramic insulator 2 Nut M1 6 hexagon stainless steel 2 Nut square for connection 4 S...

Страница 76: ...0 F Standard conditions All values were measured after a 30 minute heat up phase under standard conditions as long as not specified otherwise Parameter QMG 250 F1 QMG 250 F2 QMG 250 F3 Detector type Faraday Mass range 1 to 100 u 1 to 200 u 1 to 300 u Connection flange DN 40 CF F Vacuum required max operating pressure 5 10 4 hPa Maximum underground cross sensitiv ity at 2 u 5 ppm 65 ppm 100 ppm Det...

Страница 77: ...nce 100 Ω Imax 10 mA resolution 16 bit Analog inputs 8 10 to 10 V input resistance 50 kΩ resolution 16 bit Digital outputs 10 open collector nominal 24 V max 28 V 200 mA Digital inputs 5 low active low 2 V high 3 V 24 V Output voltage 24 V max 1 A including current to 24 V output at standard control connection Mounting orientation Venting requirements min 25 mm open space around the QME 250 Mounti...

Страница 78: ...0 5 A hPa 3 10 5 A hPa Usage Installation location Indoor weatherproof Ambient conditions Protection degree IP 30 Relative humidity 98 at operating temperature non condensing Temperatures Operating temperature analyzer 150 C Operating temperature QME 5 to 50 C Bakeout temperature analyzer QME disassembled 300 C Temperature transport storage 25 to 70 C Temperature coefficient during 8 hours after 3...

Страница 79: ...rd control connection Mounting orientation Venting requirements min 25 mm open space around the QME 250 Mounting orientation Arbitrary Weight QMA 250 M Analyzer with mounted intermediate piece 1 54 kg Electronic unit QME 250 1 53 kg SP 250 Power supply unit 0 15 kg Substances in contact with the media Filament Tungsten W or Yttrium oxide coated iridium Ir Y2O3 Other substances stainless steel cera...

Страница 80: ...S straight QME 250 417 1 10 5 169 9 83 116 128 58 142 66 5 A Fig 37 Dimensions QMG 250 M crossbeam IS straight QME 250 A Formation room orientation 423 1 10 5 169 9 89 116 128 58 142 Fig 38 Dimensions QMG 250 M grid IS straight QME 250 Technical data and dimensions 80 86 ...

Страница 81: ...142 143 10 5 169 9 217 8 260 9 300 Fig 39 Dimensions QMG 250 F open IS 90 QME 250 128 58 142 83 116 10 5 169 9 217 8 260 9 356 Fig 40 Dimensions QMG 250 M open IS 90 QME 250 Technical data and dimensions 81 86 ...

Страница 82: ... 169 9 217 8 260 9 356 Fig 41 Dimensions QMG 250 M crossbeam IS 90 QME 250 A Formation room orientation 128 58 142 89 116 10 5 169 9 217 8 260 9 362 Fig 42 Dimensions QMG 250 M grid IS 90 QME 250 Technical data and dimensions 82 86 ...

Страница 83: ...The product QMG 250 PrismaPro conforms to the UL standard UL 61010 1 2012 is certified to the CAN CSA standard CAN CSA C22 2 No 61010 1 12 conforms to the IEC standard IEC 61010 1 2010 YJBA ...

Страница 84: ... EU Restriction of the use of certain hazardous substances 2011 65 EU Restriction of the use of certain hazardous substances delegated directive 2015 863 EU Harmonized standards and applied national standards and specifications DIN EN 61010 1 2011 07 DIN EN 61326 1 2013 07 DIN EN 55011 2009 A1 2010 Class A CISPR 11 2009 A1 2010 FCC Title 47 CFR Part 18 Class A Signature Pfeiffer Vacuum GmbH Berlin...

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Страница 88: ... BG6001 ed E Date 2101 P N BG6001BEN ...

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