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Declaration of Conformity

We hereby declare that the product cited below satisfies all relevant provisions of the follow-
ing

EU Directives

●

Machinery 006/42/EC (Appendix II, No. 1 A)

●

Electro-magnetic Compatibility 2014/30/EU

●

Restrictions on the Use of Specific Hazardous Substances 2011/65/EU

Authority for compiling the technical documents rests with Mr. Helmut Bernhardt, Pfeiff-
er Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

Turbo pumping station
HiCube Eco

Harmonized standards and national standards and specifications which have been
applied:

DIN EN ISO 12100:2011

DIN EN 1012-2:2011

DIN EN 61000-3-2:2014

DIN EN 61000-3-3:2014

DIN EN 61010-1:2010

DIN EN 61326-1:2013

DIN EN 62061:2013

Signature:

Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany

(Dr. Ulrich von Hülsen)
Managing director

Asslar, 2016-09-10

Содержание HiCube 30 Eco

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HICUBE ECO Turbo pumping stations...

Страница 2: ...pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and...

Страница 3: ...Installation 20 5 1 Preparing for set up 20 5 2 Setting up the pumping station 20 5 3 Anchoring pumping station 20 5 4 Connecting the high vacuum side 21 5 4 1 Designing the counter flange 21 5 4 2 Us...

Страница 4: ...maintenance 38 7 4 1 Removing the electrical connections 39 7 4 2 Dismantling the turbopump from the pumping station 39 8 Decommissioning 41 8 1 Shutting down for longer periods 41 8 2 Recommissioning...

Страница 5: ...38 Tbl 12 Troubleshooting 43 Tbl 13 Warning and error messages when using the DCU 43 Tbl 14 Error and warning messages for turbopump electronic drive unit 45 Tbl 15 Error and warning messages for MVP...

Страница 6: ...nnection 27 Fig 13 Remove DCU from pumping station 28 Fig 14 DCU connection as remote control 29 Fig 15 Backing pump transport lock 30 Fig 16 Example Connecting the grounding cable 30 Fig 17 Power sup...

Страница 7: ...e Eco ling turbopump stations HiCube 30 Eco HiCube 80 Eco HiCube 300 Eco 1 2 Target group This operating instructions are aimed at all persons performing the following activities on the product transp...

Страница 8: ...PORT PROTECTION Transport protection This sticker indicates that the backing pump transport lock must be released prior to commissioning warranty seal Closure seal The product is sealed ex factory Dam...

Страница 9: ...ement of the rotation speed of a vacuum pump frequency in rpm or Hz HV High vacuum flange high vacuum side ISO flange Connector conforming to ISO 1609 and ISO 2861 LC Display Liquid crystal display LC...

Страница 10: ...important information on the product or on this document 2 2 Safety instructions All safety instructions in this document are based on the results of the risk assessment carried out in accordance with...

Страница 11: ...en jamming of the rotor generates high destructive torques in accordance with ISO 27892 When using a vibration compensator this will probably lead to the turbopump being sheared off in use The energy...

Страница 12: ...ironmental damage Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media Decontaminate affected parts before carrying out maintenance work Wear p...

Страница 13: ...or changes the original product or installs additional equipment Following installation into a system the operator is required to check and re evaluate as necessary the conformity of the overall syste...

Страница 14: ...s The turbo pumping station is only intended for use in enclosed interior spaces The turbo pumping station is intended for use as a table top unit 2 6 Foreseeable improper use Improper use of the prod...

Страница 15: ...e size DN 40 DN 63 DN 100 Turbopump HiPace 30 PT 0510 BN HiPace 80 PT 0208 BN HiPace 300 PT 0202 BN HiPace 300 H PT 0509 BN Electronic drive unit TC 110 TC 110 TC 110 PT 0204 BN Diaphragm Pump MVP 015...

Страница 16: ...7 8 9 10 11 12 13 14 15 Fig 3 Example combinations product overview 1 Housing 9 DCU 002 display and control unit 2 HiPace 80 turbopump DN 63 ISO K 10 Attachment hooks HiCube 300 Eco only 3 Electronic...

Страница 17: ...tus icons 4 Control keys 3 3 2 Drive Electronic drive unit of the turbopump Electronic drive unit of the backing pump 3 3 3 Cooling Air cooling Water cooling optional At excessively high temperatures...

Страница 18: ...g 5 Transporting the turbo pumping station manually 1 Protective cover 3 Footprint 2 Recessed handle Instructions for safe transport without packaging For transport without packaging HiCube Eco turbo...

Страница 19: ...inal protective caps 2 Close all other connections e g exhaust with the corresponding protective caps 3 Only store the turbo pumping station within the specified limits 4 In rooms with humid or aggres...

Страница 20: ...ion are grease free dust free and dry 5 2 Setting up the pumping station WARNING Risk of cuts on moving sharp edged parts when reaching into the open high vacuum flange With the high vacuum flange ope...

Страница 21: ...ttach the lashing straps at the customer site so that they are able to withstand loads of up to 2000 N per attachment point 5 4 Connecting the high vacuum side 5 4 1 Designing the counter flange NOTIC...

Страница 22: ...ance values and the size of the high vacuum flange Flange size Reduced pumping speed in for the gas type H2 He N2 Ar Splinter shield DN 40 6 9 17 18 Splinter shield DN 63 3 6 15 16 Protective screen D...

Страница 23: ...urbopump externally Depending on the configuration the turbopump can be operated independently from the pumping sta tion Dismantling the turbopump Please see the descriptions for removing a turbopump...

Страница 24: ...hten the bracket screws cross wise in 3 steps Tightening torque 5 15 25 2 Nm 5 4 6 Installation of ISO K flange onto ISO F The connection types for the installation of ISO K with ISO F flange are Claw...

Страница 25: ...n end into the holes in the counter flange Observe the minimum tensile strength of the flange material and the screw in depth 3 Place the collar flange over the high vacuum flange on the turbopump 4 I...

Страница 26: ...acuum 2 If used Insert the protective screen or splinter shield with clamping lugs downwards in the turbo pump high vacuum flange 3 Place the seal exactly in the hollow 4 Connect the flange with the c...

Страница 27: ...toxic gases being expelled without an exhaust line Exhaust gases and vapors are released from the turbo pumping station unhindered during normal us age In the case of processes with toxic media there...

Страница 28: ...rk safely disconnect device from mains 1 Shut down the device 2 Wait until all components are at a complete standstill 3 Switch off the master switch 4 Disconnect the mains cable from the device 1 2 3...

Страница 29: ...ble using the corresponding connection cable and or adapter on the X3 multi functional connection Configuration of the required accessory output via RS 485 using Pfeiffer Vac uum display and control u...

Страница 30: ...le to divert applicative interferences 2 Route the connection in accordance with locally applicable provisions 3 Use the turbopump ground terminal M4 female thread 5 10 Establishing the mains connecti...

Страница 31: ...ime Fig 17 Power supply connector and master switch on HiCube Eco 1 Mains plug 2 Country specific power supply cable in shipment Establish mains power supply for HiCube Eco 1 Make sure that the master...

Страница 32: ...utput DO1 config uration 15 Pump state 15 Pump state 15 Pump state P 025 OpMode Backing pump op erating mode 1 Interval mode 1 Interval mode 1 Interval mode P 035 Cfg Acc A1 Connection A1 ac cessories...

Страница 33: ...he pumping station into operation Switch on the turbo pumping station 6 3 Normal operation Operating the DCU When working with the DCU 002 Pfeiffer Vacuum display and control unit please see the assoc...

Страница 34: ...t valve manually 1 Open advanced parameter set if necessary see chapter Normal operation page 33 2 Shut down the turbo pumping station 3 Scroll through the entire first parameter set and the second pa...

Страница 35: ...unchanged in the electronic drive unit For information purposes various status queries are prepared in the parameter set The drive power of the turbopump is reduced in case of impermissible motor temp...

Страница 36: ...m venting valve is an optional accessory for installation on the turbopump The venting valve is normally closed Control is via the turbopump electronic drive unit and configura tion of parameters P 01...

Страница 37: ...nance intervals and responsibilities Instructions for carrying out maintenance 1 Carry out the required maintenance on the pumping station components in accordance with the instructions in the individ...

Страница 38: ...ire removal from the pumping station frame NOTICE Malfunction due to changing the connection configuration The pumping station connections are pre configured at the factory If the control lines on the...

Страница 39: ...nection X3 4 Mains cable 2 Connection cable connecting plug 5 Master switch 3 Control cable accessory Procedure 1 Disconnect the connection plug from the multi function connection on the turbopump ele...

Страница 40: ...e vacuum hose 3 Unscrew all 4 fixing screws and washers from the mounting plate Fixing screw tightening torque for subsequent reassembly 10 Nm 4 Remove the entire turbopump and mounting plate from fra...

Страница 41: ...ommissioning the pumping station 1 Check the pumping station for impurities and moisture 2 Clean the turbopump station exterior with a lint free cloth and a little isopropanol 3 If necessary arrange f...

Страница 42: ...s gases can escape There is a risk of very serious injuries including death and extensive property damage Take suitable safety precautions on site for the compensation of the occurring torques Before...

Страница 43: ...external RAM faulty Contact Pfeiffer Vacuum Service Error E042 Hardware error EPROM checksum incorrect Contact Pfeiffer Vacuum Service Error E043 Hardware error 2 EPROM write error Contact Pfeiffer Va...

Страница 44: ...Rotation speed measure ment faulty Contact Pfeiffer Vacuum Service Acknowledge only at rotation speed f 0 E109 Software not released Contact Pfeiffer Vacuum Service E110 Operating fluid evaluation fa...

Страница 45: ...pump informa tion Connection to the pump faulty Contact Pfeiffer Vacuum Service F100 Rotation speed raised to minimum value Permissible specifica tions for rotation speed operation or stand by in cor...

Страница 46: ...Faulty cooling Improve the cooling Check the operating conditions E173 Pump overflow Contact Pfeiffer Vacuum Service E174 Pump blocked Contact Pfeiffer Vacuum Service Tbl 15 Error and warning messages...

Страница 47: ...and addresses can be found on our website in the Pfeiff er Vacuum Service section Advice on the optimum solution is available from your Pfeiffer Vacuum contact partner For quick and smooth handling of...

Страница 48: ...containers e Observe the applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Affix the declaration of contamination to the outside of the packaging 7 Then send your product to your local Servi...

Страница 49: ...11 Accessories We recommend Please refer to the accessories list for the individual components in their respective operating instructions or online at pfeiffer vacuum de Accessories 49 60...

Страница 50: ...er temperature 25 C Integral leakage rate with 100 helium concentration 10 s measurement duration Sound pressure level at distance to vacuum pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1...

Страница 51: ...urbopump HiPace 30 HiPace 30 HiPace 30 Backing pump MVP 015 2 MVP 015 4 MVP 030 3 Ultimate pressure 1 10 8 hPa 1 10 8 hPa 1 10 8 hPa Pumping speed for N2 32 l s 32 l s 32 l s Pumping speed backing pum...

Страница 52: ...8 Turbopump HiPace 80 HiPace 80 HiPace 80 Backing pump MVP 015 2 MVP 015 4 MVP 030 3 Ultimate pressure 1 10 7 hPa 1 10 7 hPa 1 10 7 hPa Pumping speed for N2 35 l s 35 l s 35 l s Pumping speed backing...

Страница 53: ...P 015 4 MVP 030 3 Ultimate pressure 1 10 7 hPa 1 10 7 hPa 1 10 7 hPa Pumping speed for N2 67 l s 67 l s 67 l s Pumping speed backing pump at 50 Hz 1 m h 0 75 m h 1 8 m h Pump down time for vacuum cham...

Страница 54: ...densing 5 85 not condensing 5 85 not condensing 5 85 not condensing 5 85 not condensing 5 85 not condensing Weight 17 9 kg 19 6 kg 19 5 kg 17 9 kg 19 6 kg 19 5 kg Tbl 24 Technical data HiCube 300 Eco...

Страница 55: ...e 50 60 Hz 50 60 Hz 50 60 Hz 50 60 Hz 50 60 Hz 50 60 Hz Cooling method standard Air Air Air Air Air Air Relative hu midity of air 5 85 not condensing 5 85 not condensing 5 85 not condensing 5 85 not c...

Страница 56: ...nsions of HiCube 30 Eco DN 63 CF F Fig 24 Dimensions of HiCube 30 Eco DN 63 ISO K Fig 25 Dimensions of HiCube 80 Eco DN 40 ISO KF Fig 26 Dimensions of HiCube 80 Eco DN 63 CF F Technical data and dimen...

Страница 57: ...Fig 27 Dimensions of HiCube 80 Eco DN 63 ISO K Fig 28 Dimensions of HiCube 300 Eco DN 100 CF F Fig 29 Dimensions of HiCube 300 Eco DN 100 ISO K Technical data and dimensions 57 60...

Страница 58: ...piling the technical documents rests with Mr Helmut Bernhardt Pfeiff er Vacuum GmbH Berliner Stra e 43 35614 A lar Turbo pumping station HiCube Eco Harmonized standards and national standards and spec...

Страница 59: ...59 60...

Страница 60: ...PT0553 ed D Date 1901 P N PT0553BEN...

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