Pfeiffer Vacuum HiCube 30 Eco, Руководство по эксплуатации

Страница: 53 / 60

Ultimate pressure
< 1 · 10 -8 hPa < 1 · 10 -8 hPa < 1 · 10 -8 hPa
Pumping speed for N
2
67 l/s 67 l/s 67 l/s
Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h
Pump-down time for vacuum chamber
size 1 l 56 s 83 s 14 s
Pump-down time for vacuum chamber
size 10 l 557 s 834 s 143 s
Pump-down time for vacuum chamber
size 100 l 5572 s 8335 s 1428 s
Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V
Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz
Cooling method, standard Air Air Air
Relative humidity of air 5 – 85 %, not condens-
ing 5 – 85 %, not condens-
ing 5 – 85 %, not condens-
ing
Weight 13.5 kg 15.2 kg 15.1 kg
Tbl. 22: Technical data HiCube 80 Eco, DN 63 CF-F
Classification HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco
Flange (in) DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K
Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"
Turbopump HiPace 80 HiPace 80 HiPace 80
Backing pump MVP 015-2 MVP 015-4 MVP 030-3
Ultimate pressure < 1 · 10 -7 hPa < 1 · 10 -7 hPa < 1 · 10 -7 hPa
Pumping speed for N
2
67 l/s 67 l/s 67 l/s
Pumping speed backing pump at 50
Hz 1 m³/h 0.75 m³/h 1.8 m³/h
Pump-down time for vacuum chamber
size 1 l 56 s 83 s 14 s
Pump-down time for vacuum chamber
size 10 l 557 s 834 s 143 s
Pump-down time for vacuum chamber
size 100 l 5572 s 8335 s 1428 s
Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V
Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz
Cooling method, standard Air Air Air
Relative humidity of air 5 – 85 %, not condens-
ing 5 – 85 %, not condens-
ing 5 – 85 %, not condens-
ing
Weight 12.1 kg 13.8 kg 13.7 kg
Tbl. 23: Technical data HiCube 80 Eco, DN 63 ISO-K
Classification HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco
Flange (in) DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F
Flange (out) Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8"
Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 H HiPace 300 H HiPace 300 H
Technical data and dimensions
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