Pfeiffer Vacuum HiCube 30 Eco, Руководство по эксплуатации

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6.5.1 Operating mode display via LED 35
6.5.2 Temperature monitoring 35
6.6 Switching off and venting 35
6.6.1 Shutting down the turbo pumping station 35
6.6.2 Venting 36
7 Maintenance 37
7.1 General maintenance information 37
7.2 Maintenance intervals and responsibilities 37
7.3 Replacing mains fuses 37
7.4 Removing components for maintenance 38
7.4.1 Removing the electrical connections 39
7.4.2 Dismantling the turbopump from the pumping station 39
8 Decommissioning 41
8.1 Shutting down for longer periods 41
8.2 Recommissioning 41
8.3 Disposing of the vacuum pump 41
9 Malfunctions 42
9.1 General 42
9.2 Troubleshooting 42
9.3 Error codes 43
10 Service solutions from Pfeiffer Vacuum 47
11 Accessories 49
12 Technical data and dimensions 50
12.1 General 50
12.2 Technical data 50
12.3 Dimensioned drawings 55
Declaration of Conformity 58
Table of contents
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