Ultimate pressure
< 1 · 10
-7
hPa
< 1 · 10
-7
hPa
< 1 · 10
-7
hPa
Pumping speed for N
2
22 l/s
22 l/s
22 l/s
Pumping speed backing pump at 50
Hz
1 m³/h
0.75 m³/h
1.8 m³/h
Pump-down time for vacuum chamber
size 1 l
56 s
84 s
15 s
Pump-down time for vacuum chamber
size 10 l
560 s
836 s
145 s
Pump-down time for vacuum chamber
size 100 l
5595 s
8358 s
1451 s
Mains requirement: voltage
100 – 240 V
100 – 240 V
100 – 240 V
Mains requirement: frequency (range)
50/60 Hz
50/60 Hz
50/60 Hz
Cooling method, standard
Air
Air
Air
Relative humidity of air
5 – 85 %, not condens-
ing
5 – 85 %, not condens-
ing
5 – 85 %, not condens-
ing
Weight
11.7 kg
13.4 kg
13.3 kg
Tbl. 18:
Technical data HiCube 30 Eco, DN 40 ISO-KF
Classification
HiCube 30 Eco
HiCube 30 Eco
HiCube 30 Eco
Flange (in)
DN 63 CF-F
DN 63 CF-F
DN 63 CF-F
Flange (out)
Silencer, G 1/8"
Silencer, G 1/8"
Silencer, G 1/8"
Turbopump
HiPace 30
HiPace 30
HiPace 30
Backing pump
MVP 015-2
MVP 015-4
MVP 030-3
Ultimate pressure
< 1 · 10
-8
hPa
< 1 · 10
-8
hPa
< 1 · 10
-8
hPa
Pumping speed for N
2
32 l/s
32 l/s
32 l/s
Pumping speed backing pump at 50 Hz
1 m³/h
0.75 m³/h
1.8 m³/h
Pump-down time for vacuum chamber
size 1 l
56 s
84 s
15 s
Pump-down time for vacuum chamber
size 10 l
560 s
836 s
145 s
Pump-down time for vacuum chamber
size 100 l
5595 s
8358 s
1451 s
Mains requirement: voltage
100 – 240 V
100 – 240 V
100 – 240 V
Mains requirement: frequency (range)
50/60 Hz
50/60 Hz
50/60 Hz
Cooling method, standard
Air
Air
Air
Relative humidity of air
5 – 85 %, not condens-
ing
5 – 85 %, not condens-
ing
5 – 85 %, not condens-
ing
Weight
12.9 kg
14.6 kg
14.5 kg
Tbl. 19:
Technical data HiCube 30 Eco, DN 63 CF-F
Classification
HiCube 30 Eco
HiCube 30 Eco
HiCube 30 Eco
Flange (in)
DN 63 ISO-K
DN 63 ISO-K
DN 63 ISO-K
Flange (out)
Silencer, G 1/8"
Silencer, G 1/8"
Silencer, G 1/8"
Turbopump
HiPace 30
HiPace 30
HiPace 30
Backing pump
MVP 015-2
MVP 015-4
MVP 030-3
Technical data and dimensions
51/60
Содержание HiCube 30 Eco
Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HICUBE ECO Turbo pumping stations...
Страница 59: ...59 60...
Страница 60: ...PT0553 ed D Date 1901 P N PT0553BEN...