Pfeiffer Vacuum HiCube 30 Eco, Руководство по эксплуатации

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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Instructions in the text 7
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
2 Safety 10
2.1 General safety instructions 10
2.2 Safety instructions 10
2.3 Safety precautions 13
2.4 Limits of use of the product 13
2.5 Proper use 14
2.6 Foreseeable improper use 14
3 Product description 15
3.1 Identifying the product 15
3.2 Scope of delivery 16
3.3 Function 16
3.3.1 Control interface 16
3.3.2 Drive 17
3.3.3 Cooling 17
4 Transportation and Storage 18
4.1 Transporting the pumping station 18
4.2 Transport protection 18
4.3 Storing the pumping station 19
5 Installation 20
5.1 Preparing for set-up 20
5.2 Setting up the pumping station 20
5.3 Anchoring pumping station 20
5.4 Connecting the high vacuum side 21
5.4.1 Designing the counter flange 21
5.4.2 Using accessories for the high vacuum connection 22
5.4.3 Connecting the turbopump externally 23
5.4.4 Installation of ISO-KF flange 23
5.4.5 Attaching ISO-K flange onto ISO-K 24
5.4.6 Installation of ISO-K flange onto ISO-F 24
5.4.7 Fastening CF flange to CF-F 26
5.5 Connecting the exhaust side 27
5.6 Modifying the DCU for remote operation 28
5.7 Connecting accessories for the pumping station 29
5.8 Removing transport lock 29
5.9 Grounding the pumping station 30
5.10 Establishing the mains connection 30
6 Operation 32
6.1 Commissioning 32
6.2 Switching on the turbo pumping station 33
6.3 Normal operation 33
6.4 Operation with gas ballast (applies to MVP 015-2 only) 33
6.5 Operation monitoring 35
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