PV8959-F4E005 50
7.8.[THICKNESS] Window
The result of film thickness analysis is displayed on the [THICKNESS] window.
The progress information of film thickness analysis displayed on this window varies
depending on the setting state of [Analysis method] on a LAYER setting window. It is
separately described below.
7.8.1. Peak-valley method: PV
㻌
Each wavelength of the analysis [Analysis method] used, analysis results, and the detected
peak and valley is displayed on this window when [PV] (peak-valley method) is selected for
[Analysis method] on a LAYER setting window. The [Method] field displays an analysis
method, and the [ND[nd] (D[nm])] field displays the analyzed optical film thickness (physical
film thickness). The items below display the detected peak and valley wavelengths. At that
time, the refractive index corresponding to the peak and valley wavelengths is also displayed
when the refractive index of a substrate is used.
7.8.2. Fourier transform method: FFT
㻌
The film thickness analysis method and analysis result for each layer are displayed on this
window when [FFT] (Fourier transform method) is selected for [Analysis method] on a LAYER
setting window. The [Method] field displays a film thickness analysis method, and [ND(n)[nd]
(D(n)[nm])] field displays the analyzed optical film thickness (physical film thickness). A
subscript (n) ([1] in the figure) indicates the layer number of a film.
