Newport FSM-300, Руководство пользователя

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16 Fast Steering Mirror Technology
Two significant advantages of FSM technology are derived from the flexure
suspension:
1. FSM flexure suspension eliminates bearing surfaces
often used with
galvanometer scanners, and eliminates their associated stiction and wear.
With bearing surfaces, stiction interrupts the smooth motion of the
actuator and limits its accuracy (smallest incremental motion). Wear sets
a device lifetime based on the number of commanded cycles. On the other
hand, properly designed flexure suspensions have infinite cycle lifetimes.
2. FSM flexure suspension delivers motion about two axes intersecting
at a common pivot point.
When the pivot point is placed at the surface
of the mirror, the design is called gimbaled. The advantage is that a
mirror-centered optical beam does not experience a change in path length
with angular rotation. The FSM is such a gimbaled design. On the other
hand, the two galvanometers and two mirrors used in dual-axis galvano-
meter-based designs make it impossible for the axes to intersect, with no
common pivot point and no gimbaled motion. Relay optics can solve the
problem by imaging the first galvo mirror onto the second, but at
substantially increased complexity and cost. The lack of a common pivot
point complicates post-objective and pre-objective scanning applications,
requiring a compromised optical design to accommodate the separate
rotation axes.
The FSM-300 System
comes with a 1” (25.4 mm) diameter, λ /10 Pyrex
mirror, which is available with a choice of reflective coatings for different
wavelengths. The mirror is bonded to an aluminum carrier, which is user
replaceable in the event that wavelength requirements are changed or the
mirror surface has been damaged. Two standard mirrors can be specified at
the time of order:
•
10D20ER.1: Enhanced Aluminum Coating.
Multi-layer dielectric
stack deposited over an aluminum film for improved performance in the
visible and enhanced durability of the coating. Average reflectivity is
> 93% from 450-700 nm.
•
10D20ER.4: Protected Gold Coating.
Multi-layer dielectric stack
deposited over a gold film for excellent reflectivity from the near IR to
the far IR. Average reflectivity is > 96% from 650- 1700 nm and > 98%
from 1.7-2.0 µm.
Actuators