Newport FSM-300, Руководство пользователя

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Table of Contents 7
Table of Contents
EU Declaration of Conformity..............
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Warranty................................................................................................. 5
Confidentiality & Proprietary Rights..................................................... 6
Table of Contents ................................................................................... 7
1. Safety Precautions.................................................................. 11
1.1 General Safety Warnings............................................................ 11
1.2 General Cautions ........................................................................ 11
2. Fast Steering Mirror Technology........................................... 13
3. Typical Specifications ............................................................ 17
3.1 FSM System ............................................................................... 17
3.2 Standard Mirror Options............................................................. 18
3.3 FSM-CD300B Controller/Driver................................................ 19
3.4 Bode Plots................................................................................... 20
3.5 Safe Operating Area ................................................................... 21
4. Unpacking the FSM................................................................. 23
4.1 Packing List ................................................................................ 23
4.2 Freeing the Mirror Head............................................................. 23
4.3 Storing and Shipping the Mirror Head ....................................... 24
4.4 Replacing the Mirror .................................................................. 24
5. System Components .............................................................. 25
5.1 FSM Mirror Head Assembly ...................................................... 25
5.2 FSM-CD300B Controller/Driver................................................ 27
5.3 FSM Electronics ......................................................................... 28
5.4 FSM-CD300B Controller/Driver Cable Pin Connections.......... 29
5.5 Interface I/O Pin Connections .................................................... 31
6. System Operation ................................................................... 32
6.1 Installation Location & Ventilation............................................ 32
6.2 Electrical Connections................................................................ 32
6.3 Command Inputs ........................................................................ 33
6.4 Position Outputs ......................................................................... 34
6.5 Fault Indication........................................................................... 34
6.6 External Sensor Feedback Control Mode................................... 35
6.7 Open Loop Control Mode .......................................................... 36
6.8 Maintenance & Service .............................................................. 37