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General Information Chapter Five: Maintenance and Troubleshooting
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Chapter Five: Maintenance and Troubleshooting
General Information
In general, the T3P requires no maintenance other than proper installation and operation. If the controller fails
to operate properly upon receipt, check for shipping damage and check the cables for correct continuity. Any
damage should be reported to the carrier and MKS Instruments immediately.
If it is necessary to return the unit to MKS for service, obtain an ERA Number (Equipment Return
Authorization Number) from any MKS Calibration and Service center before shipping. Please refer to the
inside back cover of this manual for a list of MKS Calibration and Service Centers.
Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or
toxic materials.
Maintenance
Periodically check for wear on the cables and inspect the enclosure for visible signs of damage.
Cleaning the Unit
Periodically wipe down the unit with a damp cloth.
Preventive Maintenance
Disassembly of Gate and Seal Ring
The T3P Pendulum Analog/TTL valve has a serial communication interface to the tool computer.
The procedure for the maintenance of the pendulum is performed by activating commands on the Pendulum
Maintenance Mode Screen on the tool computer.
The tool computer Pendulum Maintenance Mode Screen must contain the following 6 commands (see the
software command reference in Table 23, page 42, to program the commands):
“Select Position Control Mode”
“Move Gate to 50 Percent Position”
“Move Gate to 100 Percent Position”
“Learn Valve”
“Close Valve”
“Select Pressure Control Mode”
1. Close (seal) the valve (valve is now at 0 percent position).
2. Vent both the chamber and pump sides of the valve.
Warning The moving parts in the valve create a risk of personal injury until the valve is
securely incorporated into a system. To avoid injury keep all objects away from
any valve opening.