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MKS T3PIA Скачать руководство пользователя страница 4

Copyright © 2009 by MKS Instruments, Inc.

All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.

Printed in the United States of America

US Patent 6,089,537 and other Patents Pending

DeviceNet™ is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL.

SEMI

®

is a registered trademark of Semiconductor Equipment and Materials International, Mountain View,

CA.

Swagelok

®

and VCR

®

are registered trademark of Swagelok Marketing Co., Solon, OH.

Firmware version: 01.02

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Содержание T3PIA

Страница 1: ...MKS Type T3PIA Pendulum Valve With Analog TTL Interface Instruction Manual Six Shattuck Road Andover MA 01810 2449 Main 978 975 2350 137363 P1 www mksinst com Analog TTL Interface Rev C...

Страница 2: ...Representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS home office in Andover Massachusetts USA This warranty does not apply to...

Страница 3: ...MKS Type T3PIA Pendulum Valve With Analog TTL Interface...

Страница 4: ...stem except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America US Patent 6 089 537 and other Patents Pending DeviceNet is a trademark of Open Devic...

Страница 5: ...olos hallados en la unidad 7 Procedimientos y precauciones de seguridad 7 Chapter One General Information 9 Introduction 9 How This Manual is Organized 10 Customer Support 10 Chapter Two Installation...

Страница 6: ...27 Figure 6 Typical Chamber Pump Speed Curve 27 Figure 7 Phase Set Too High 28 Figure 8 Phase Set Too Low 28 Figure 9 Gain Set Too High 29 Figure 10 Gain Set Too Low 29 Figure 11 Trip Point Direction...

Страница 7: ...ible Forces 15 Table 9 Mounting Screw Length 16 Table 10 Required Air Pressure Based on Valve Size 16 Table 11 Auxiliary Connector Pin Out 20 Table 12 Analog Sensor 1 High Connector Pin Out 21 Table 1...

Страница 8: ...viii This page intentionally left blank...

Страница 9: ...ound on the Unit On Supply IEC 417 No 5007 Off Supply IEC 417 No 5008 Earth ground IEC 417 No 5017 Protective Earth ground IEC 417 No 5019 Frame or Chassis IEC 417 No 5020 Equipotentiality IEC 417 No...

Страница 10: ...to eliminate all traces of the previously used flow material USE PROPER PROCEDURES WHEN PURGING This valve must be purged under a ventilation hood and gloves must be worn for protection DO NOT OPERATE...

Страница 11: ...ebenheit aufmerksam Erkl rung der am Ger t angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen die am Ger t angebracht sein k nnen Tabelle 2 Bedeutung der am Ger t...

Страница 12: ...s Ventils mit Gas Nach dem Installieren oder vor dem Ausbau aus einem System mu das Ventil unter Einsatz eines reinen Trockengases vollst ndig gesp lt werden um alle R ckst nde des Vorg ngermediums zu...

Страница 13: ...tuation pr sentant un int r t particulier Symboles figurant sur l unit Le tableau suivant d crit les symboles pouvant appara tre sur l unit Tableau 3 D finition des symboles sur l unit Marche sous ten...

Страница 14: ...et sec afin d liminer toute trace du produit de flux utilis pr c demment UTILISATION DES PROC DURES APPROPRI ES POUR LA PURGE Cette valve doit tre purg e sous une hotte de ventilation et il faut port...

Страница 15: ...4 Definici n de los s mbolos hallados en la unidad Encendido alimentaci n el ctrica IEC 417 N 5007 Apagado alimentaci n el ctrica IEC 417 N 5008 Puesta a tierra IEC 417 N 5017 Protecci n a tierra IEC...

Страница 16: ...n gas limpio y seco para eliminar todo resto de la sustancia l quida empleada anteriormente USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA La v lvula debe purgarse debajo de una campana de ventil...

Страница 17: ...ressure signal used for control applications directly from an MKS Baratron pressure transducer All of the unit s operational settings are controlled using the serial communication protocol When the T3...

Страница 18: ...ance required to keep the instrument in good working condition and provides a checklist for reference should the instrument malfunction Appendix A Product Specifications lists the specifications of th...

Страница 19: ...hipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Caution Only qualified individuals should perform the installation and any user ad...

Страница 20: ...um length Refer to Figures 1 and 2 A inch piece of 22 wire may be undesirably long since it has approximately 5 nH of inductance equivalent to 31 ohms at 1000 MHz After picking up the braid ground kee...

Страница 21: ...he T3P can supply up to 750 mA maximum combined High and Low sensors for heated pressure transducers The input voltage is provided by the power connector Refer to Table 14 page 22 for more information...

Страница 22: ...onfiguration is shown in Figure 3 Figure 3 Typical System Configuration Installation into the Vacuum System Tightening Torque for Mounting Screws on Flanges Mounting with the Centering Ring and Spacer...

Страница 23: ...n Mounting with the O Ring in Groove Nominal Size Max Tightening Torque Nm Max Tightening Torque lbf ft mm inch ISO F JIS ISO F JIS 320 250 200 160 100 12 10 8 6 4 N A 35 40 35 40 35 40 20 23 65 70 65...

Страница 24: ...1 Install the control valve on the vacuum chamber Chamber mounting side is indicated on the outline drawing and is the side opposite the motor 2 Connect compressed air Connections are for 1 4 tube Us...

Страница 25: ...able 10 page 16 Transducer for high pressure range default if using one transducer Transducer for low pressure range Heater power connectors if using heater option Interlock jumper Aux IO 25 pin pin 2...

Страница 26: ...peed Pedestal Speed Up option 5 Output Configurations Process alarms relays Encoder Electrical Information Connectors The T3P throttle valve controller has four connectors located on its top panel ref...

Страница 27: ...Electrical Information Chapter Two Installation 19 Figure 4 Top Panel of the T3P Unit...

Страница 28: ...d DIN 4 Valve Close Command DIN 5 Pressure Position Mode Command DIN 6 PID ST Mode Command DIN 7 LEARN Valve DIN 8 LEARN Conductance DIN 9 Analog Setpoint Input 10 Analog Setpoint Input 11 Pressure Ou...

Страница 29: ...se with analog Baratron sensors Table 12 Analog Sensor 1 High Connector Pin Out Pin Number Description 1 No Connection 2 Pressure Input Signal 3 No Connection 4 No Connection 5 Sensor Power Return 6 1...

Страница 30: ...ction 9 No Connection 10 No Connection 11 No Connection 12 Pressure Signal Input 13 No Connection 14 24 Volt Power Output 15 Chassis Ground Power Connector The 9 pin male Type D Power connector provid...

Страница 31: ...lashes one time from GREEN to RED for approximately 0 25 seconds each and then turns OFF 3 The Position Status LED illuminates solid GREEN when the initialization is complete After initialization the...

Страница 32: ...Chapter Two Installation Startup 24 This page intentionally left blank...

Страница 33: ...ystem using either Pressure or Position control Parameters for the control modes are adjusted and viewed via digital communications In Pressure Control the T3P unit moves the valve in order to maintai...

Страница 34: ...e entered turn off the volume estimator b If you are unsure of the actual chamber volume turn on the volume estimator The volume estimator will determine the volume during the system learn and use thi...

Страница 35: ...Flow too low Flow too high Figure 5 Typical Pressure Response in LEARN Mode The typical chamber pump speed versus valve position is shown in Figure 6 0 10 20 30 40 50 60 70 80 90 100 0 10 20 30 40 50...

Страница 36: ...ssure regions Phase The phase provides a control signal that is proportional to the change in the error signal The error signal is the difference between the actual pressure and the setpoint The phase...

Страница 37: ...ain setting generally results in a faster response to setpoint and the best rejection of disturbances such as changes in flow rate or noise in the system However if the gain is too large the pressure...

Страница 38: ...trip point value The default hysteresis value of 10 can be adjusted with a digital command refer to Trip Point Hysteresis in the MKS Type T3BIA T3PIA Valves with RS 232 Interface Supplement for more...

Страница 39: ...e pressure rises above the value defined by the corresponding trip point hysteresis as shown in Figure 11 Pressure TRIP POINT HYSTERESIS TRIP POINT VALUE Trip Point Condition Trip Point Status OFF Tri...

Страница 40: ...Table 13 page 22 for the Analog Sensor connector pin out Auxiliary Connector The 25 pin female Type D Auxiliary connector provides access to the alarm relay outputs for use with an analog sensor and...

Страница 41: ...evice is learning valve steps Table 16 Position Status LED Indicators LED State Meaning Solid Green Position Control Mode Flashing Green Solid Red Unrecoverable fault Flashing Red Interlock not enable...

Страница 42: ...he serial number label lists the serial number product model code full scale range and calibration gas for your device The label also displays the CE mark signifying compliance with the European CE re...

Страница 43: ...ust be held low continuously for the T3 unit to use the selected parameters Once the signal goes high the controller will default back to the state associated with the high signal within 50 millisecon...

Страница 44: ...2 Commands with an Analog T3P RS 232 settings are baud rate for an Analog T3P is 19 200 8 data bits None parity 1 stop bit The RS 232 should be used for configuration or to read parameters but not to...

Страница 45: ...on the cables and inspect the enclosure for visible signs of damage Cleaning the Unit Periodically wipe down the unit with a damp cloth Preventive Maintenance Disassembly of Gate and Seal Ring The T3...

Страница 46: ...e to the 50 position and allow access to the bolt s holding in the gate 7 Observe the bolt s attaching the gate to the main shaft If there is only one bolt skip to Step 8 Otherwise loosen the outer bo...

Страница 47: ...to be unlocked Note The software looks for the MAINTENANCE button only if the valve is in position mode AND the valve is at 100 percent 12 While keeping the maintenance button depressed unlock the sea...

Страница 48: ...the following quantity of grease is distributed constant on the whole circumference Refer to Figure 20 Figure 20 Lubricating O Ring Groove Table 20 Seal Ring Quantity of Grease Nominal Size Quantity...

Страница 49: ...button 5 Install the gate and tighten the bolt The bolt s that attach the gate to the shaft are to be torqued to 175 lbf in 20 Nm Make sure the gate is fully engaged on the shaft before tightening Fo...

Страница 50: ...the logic level on the AUX I O connector pin 5 LOW Move Gate to 50 Percent Position Set the analog set point signal on the AUX I O connector pin 9 to 5 00 Volts and pin 10 to 0 00 Volts Move Gate to...

Страница 51: ...bleshooting 43 Figure 22 Removing Phillips Head Screws 5 Allow the cover with the fan attached to gently hang in place 6 Remove the battery pack connector from the PC board 7 Remove the battery pack f...

Страница 52: ...ive Maintenance and Troubleshooting Preventive Maintenance 44 8 Reverse the procedure to install the new battery pack 9 Torque the 4 Phillips head screws to 15 lbf in Figure 24 Installing the New Batt...

Страница 53: ...alve Failed solenoid valve MKS Repair to replace Valve does not open Defective valve Return to MKS repair facility Insufficient air pressure Increase pneumatic air pressure Refer to Table 10 page 16 M...

Страница 54: ...t correct Configure crossover pressure for installed manometers Manometer not zeroed Zero manometer Valve reports negative pressure Manometer does not have power Verify power to manometer Manometer Fu...

Страница 55: ...Connectors Auxiliary Analog Sensors Power 25 Pin Female Type D 15 Pin Female Type D 9 Pin Male Type D Power Requirements 24 0 VDC 3 Amp 2 Amps for the motor drive and up to 750 mAmps for the pressure...

Страница 56: ...re Protection Manual reset thermal switch on valve Mains Protection This device is protected by an individual fuse located in the power plug 100 to 120 VAC devices only 10 Amp 250 VAC for flange size...

Страница 57: ...as follows T3PIA XX Y Z A B C D VV T3PIA XX Y Z A B C D VV where Type Number Flange Size Valve Bore Flange Flange Type Finish Main Seal Heater Orientation Controller Options Firmware Version Type Numb...

Страница 58: ...0 VAC F 120 C 115 VAC H 120 C 230 VAC J Orientation C Spring to close seal opposite motor and Model Number Ordering Code Counter Clockwise Close Horizontal F Counter Clockwise Close Vertical P Clockwi...

Страница 59: ...Appendix C Dimensions 51 Appendix C Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses All dimensions are for reference only...

Страница 60: ...Appendix C Dimensions 52...

Страница 61: ...Appendix C Dimensions 53...

Страница 62: ...Appendix C Dimensions 54...

Страница 63: ...Appendix C Dimensions 55...

Страница 64: ...Appendix C Dimensions 56...

Страница 65: ...Appendix C Dimensions 57...

Страница 66: ...Appendix C Dimensions 58...

Страница 67: ...Appendix C Dimensions 59...

Страница 68: ...Appendix C Dimensions 60...

Страница 69: ...steresis description of 30 Introduction 9 Labels pump 34 serial number 34 LEDs module status 33 network status 33 power up sequence 23 Maintenance 37 Model code 49 Module status LED 33 Mounting instru...

Страница 70: ...Index 62...

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