MKS T3PIA, Инструкция по эксплуатации, Страница: 31 / 70

Startup Chapter Two: Installation
23
Startup
Power Up
At power up, your instrument performs checks on its communications link and internal diagnostic checks of
the EEPROM and RAM. The results of these checks are indicated by the color (green or red) and condition
(solid or flashing) of the status LEDs on top of the unit (refer to Figure 13. page 32). Refer to page 33 for
more information on the status LEDs.
When you apply power to your device, the following LED sequence occurs:
1. The Position Status LED flashes one time from GREEN to RED, for approximately 0.25 seconds each,
and then turns GREEN.
2. The Pressure Status LED flashes one time from GREEN to RED, for approximately 0.25 seconds each,
and then turns OFF.
3. The Position Status LED illuminates solid GREEN when the initialization is complete.
After initialization, the LEDs will change to indicate the current status. This will vary depending on the
previous settings.
Note
If the power up LED sequence does not function properly, contact MKS for assistance.
Warm Up Time
After installation and power up, your T3P controller requires less than 1 minute to warm up. The Heater
System, if installed, requires approximately 4 hours.
Maximum Differential Pressure
During pressure control (throttling) observe the following maximum differential pressures.
Table 15: Differential Pressure
Nominal Size
Maximum Throttling
Differential Pressure
mm inch Torr
320
250
200
160
100
12
10
8
6
4
3.75
5
5
20
40