MKS T3PIA, Инструкция по эксплуатации, Страница: 35 / 70

Control Mode Chapter Three: Product Overview
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0 5 10 15 20 25 30
0
10
20
30
40
50
60
70
80
90
100
110
Time, sec
Me
a
s
u
red
pr
essu
re
, %
of
t
ran
sd
ucer
f
u
ll
sca
le
Pressure response during LEARN mode
Optimum flow
Flow too low
Flow too high
Figure 5: Typical Pressure Response in LEARN Mode
The typical chamber pump speed versus valve position is shown in Figure 6.
0
10 20 30 40 50 60 70 80 90 100
0
10
20
30
40
50
60
% open
lit
e
r/
sec
Valve pump speed curve
Figure 6. Typical Chamber Pump Speed Curve
Refer to the MKS Type T3BIA/T3PIA Valves with RS-232 Interface Supplement for more information on how
to learn the system.