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MKS Baratron 740C Скачать руководство пользователя страница 19

Informations relatives à la sécurité pour le
transducteur de pression

Symboles utilisés dans ce manuel d'utilisation

9

Informations relatives à la sécurité pour le transducteur

de pression

Symboles utilisés dans ce manuel d'utilisation

Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce
manuel.

Avertissement

L'indication AVERTISSEMENT signale un danger pour le
personnel. Elle attire l'attention sur une procédure, une
pratique, une condition, ou toute autre situation
présentant un risque d'accident pour le personnel, en
cas d'exécution incorrecte ou de non respect des
consignes.

Attention

L'indication ATTENTION signale un danger pour l'appareil.
Elle attire l'attention sur une procédure d'exploitation, une
pratique, ou toute autre situation, présentant un risque
d'endommagement ou de destruction d'une partie ou de la
totalité de l'appareil, en cas d'exécution incorrecte ou de non
respect des consignes.

Remarque

L'indication REMARQUE signale une information importante. Elle
attire l'attention sur une procédure, une pratique, une condition, ou
toute autre situation, présentant un intérêt particulier.

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Содержание Baratron 740C

Страница 1: ...1034255 001 REV B 3 13 MKS Type 740C 750C 742C 752C Baratron Pressure Transducers and R7xxC Series Relay Systems...

Страница 2: ...Printed in the United States of America Baratron is a registered trademark of MKS Instruments Inc Andover MA USA Swagelok VCR and VCO are registered trademarks of Swagelok Company Solon OH USA Bendix...

Страница 3: ...ssion 9 Symboles utilis s dans ce manuel d utilisation 9 Symboles apparaissant sur l unit 10 Mesures de s curit et pr cautions 11 Medidas de seguridad del transductor de presi n 13 S mbolos usados en...

Страница 4: ...or option 1 pinout 40 How To Check the Transducer Zero 41 How To Zero an Absolute Transducer 42 How To Zero a Gage Unit 43 Span Adjustment 44 Chapter Three Overview 46 General 46 Sensor 46 Signal Cond...

Страница 5: ...r Six Maintenance and Troubleshooting 63 General 63 Zero Adjustment 63 Troubleshooting 64 Appendix A Product Specifications 65 700 Series Specifications 65 General Description 67 Product Type 67 Full...

Страница 6: ......

Страница 7: ...4 to 20 mA Unit 31 Figure 9 Electrical Scheme for a Voltage Unit 32 Figure 10 Dimensional Drawing of the Single Ended Design 37 Figure 11 Dimensional Drawing of the Flow Through Design 38 Figure 12 T...

Страница 8: ......

Страница 9: ...for Connectors and Fittings for Single Ended Units 37 Table 15 Dimensions for Connectors and Fittings for Flow Through Units 38 Table 16 Connections Between PDR Readout and a Transducer Type D Connec...

Страница 10: ......

Страница 11: ...a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention...

Страница 12: ...20206 Caution refer to accompanying documents ISO 3864 No B 3 1 Caution risk of electric shock ISO 3864 No B 3 6 Caution hot surface IEC 417 No 5041 Table 1 Definition of Symbols Found on the Unit O n...

Страница 13: ...rvice must be made by qualified service personnel only USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety p...

Страница 14: ...urce install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit befor...

Страница 15: ...stand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger...

Страница 16: ...anschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg ng...

Страница 17: ...ng nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal...

Страница 18: ...eeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr auf...

Страница 19: ...ition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l...

Страница 20: ...masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu...

Страница 21: ...age doit tre uniquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise d...

Страница 22: ...r un disque d chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits...

Страница 23: ...ales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilida...

Страница 24: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente cont...

Страница 25: ...BEN SER EFECTUADAS NICAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento...

Страница 26: ...hallar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de...

Страница 27: ...Series Model Selection Guide STANDARD Process Measurement Gage Absolute Single ended 740C 750C Single ended with Relay System R740C R750C Flow Through 742C 752C Table 5 The 7xxC Series Model Selection...

Страница 28: ...the organization of the manual Chapter Two Installation explains the environmental requirements and describes how to mount the instrument in your system Chapter Three Overview gives a brief descripti...

Страница 29: ...of your 7xxC Series instrument or to obtain information about the companion products and services that MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to retur...

Страница 30: ...Customer Support Chapter One General Information 20 This page intentionally left blank...

Страница 31: ...nter before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Unpacking Checklist Standard Parts Type 740C 742C 750C 752C pressure...

Страница 32: ...and Requirements Chapter Two Installation 22 Product Location and Requirements Ambient operating temperature 0 to 50 C 32 to 122 F For additional product requirements refer to Appendix A Product Speci...

Страница 33: ...rall metal braided shielded cable properly grounded at both ends is required during use to meet CE specifications 2 To order an overall metal braided shielded cable add an S after the cable type desig...

Страница 34: ...the connector s must make good contact to the device s case ground Good contact is about 0 01 ohms and the ground should surround all wires Contact to ground at just one point may not suffice 4 For s...

Страница 35: ...lamp Making Firm Contact To Braid Braid Here Is Desirable but not usually necessary Keep Wires and Braid Flat Against Case Metal Cable Clamp Screw Split Lock Washer External Tooth Lock Washer Transduc...

Страница 36: ...e unit has a low full scale pressure less than 20 psi and is used with gases that contain particulates mount it in a vertical position with the cylindrical end of the unit pointing upward as shown in...

Страница 37: ...ny direction In addition with the flow through design the fittings can be positioned to accommodate either a vertical or horizontal flow Figure 5 Acceptable Horizontal Mounting Positions Single Ended...

Страница 38: ...when single or double metal ferrule compression type vacuum fittings are used because damage will occur to the transducer when improper tightening procedures are followed 2 Before proceeding to the S...

Страница 39: ...welding procedures at all times Making Mechanical Connections To make mechanical connections in line to a system use the recommended installation practices as specified by the fitting manufacturer or...

Страница 40: ...ation For example RLN should not exceed 450 ohms for a 24 Volt supply 0 200 400 600 800 1000 1200 Voltage Resistance 13 18 23 28 33 Total Resistance in Line Figure 7 Total Resistance in Line The maxim...

Страница 41: ...ake more than one calibration cycle to accurately complete the adjustments Always recheck the zero calibration after adjusting the span Refer to Span Adjustment page 44 for more information Figure 8 E...

Страница 42: ...of any external power supply and readout should be the same as the transducer ground chassis ground to minimize any possible ground loops and power supply noise which can affect the performance and s...

Страница 43: ...listed below 9 pin Standard Type D refer to Table 8 page 34 15 pin High Density Type D refer to Table 9 page 34 Two configurations of a Bendix connector refer to Table 10 and Table 11 page 35 Two conf...

Страница 44: ...to 20 mA negative excitation Table 8 9 Pin Type D Connector Pinout 15 Pin High Density Type D Connector Pinout Pin Signal 1 Reserved 2 Pressure Output 3 Reserved 4 Reserved 5 Power Return or 4 to 20 m...

Страница 45: ...Power Return or 4 to 20 mA negative excitation Table 10 Bendix 4 Position PTO Connector Option 1 Pinout Bendix 4 Position PTO Connector Option 2 Pinout Pin Signal A 4 to 20 mA positive excitation B J...

Страница 46: ...mA negative excitation Green Power Input or 4 to 20 mA positive excitation Table 12 Flying Leads Model Code F Pinout Flying Leads Model Code L Pinout Color Signal Red Power Input or 4 to 20 mA positiv...

Страница 47: ...5 pin Type D Bendix Flying Leads 0 19 4 8 0 19 4 8 0 41 10 5 0 73 18 5 Dimension B 4 VCR M or F 8 VCR F Tube NW 16 KF Low Range 0 94 23 9 1 40 35 5 0 76 19 2 0 86 21 7 High Range 1 36 134 4 1 71 43 4...

Страница 48: ...15 pin Type D Bendix Flying Leads 0 19 4 8 0 19 4 8 0 35 8 9 0 73 18 5 Dimension B Overall Body Length inches mm 4 VCR male fixed Tube Low Range 2 78 70 6 2 00 50 8 High Range 2 24 56 9 2 045 51 9 Tab...

Страница 49: ...on replaces the color code information found in the PDR manuals Type D Connector either 9 pin or 15 pin High Density The correct cable to use for the 9 pin Type D connector is CB700 2 the cable for 15...

Страница 50: ...R end Table 10 lists the pin assignments for the various colored wires on the flying leads end of the cable Connections Between a PDR Readout and a Transducer Bendix Connector Transducer Signal Flying...

Страница 51: ...ting the zero potentiometer located on the top cover of the transducer or on the front panel of an MKS Power Supply Readout if you are using one Note To set the zero on a compound calibration gauge yo...

Страница 52: ...subsequent readings are then linear and accurate relative to the offset value Note If your system cannot achieve a sufficiently low pressure to set the transducer zero you may use a vacuum leak detec...

Страница 53: ...1 psia Table 18 Highest Pressure for Proper Zero Adjustment How To Zero a Gage Unit Standard non compound Gage Units To properly zero a standard non compound gage unit 1 Install the transducer in a sy...

Страница 54: ...al atmospheric pressure This is the output value of the unit whenever the input pressure equals the local atmospheric pressure even if the local atmospheric pressure has changed since the zero was set...

Страница 55: ...Chapter Two Installation How To Check the Transducer Zero 45...

Страница 56: ...mic disc containing two electrodes The diaphragm in the single ended version is positioned opposite the inlet port The diaphragm on the flow through version is positioned above the gas stream Figure 3...

Страница 57: ...dge circuitry self compensated for thermal stability with ambient temperature changes The circuit board construction uses surface mount technology The output is either a DC voltage or mA current which...

Страница 58: ......

Страница 59: ...ave stable temperature and air flow Lowest Suggested Pressure to Use for Control The pressures listed in the last column of Table 20 are for reference and represent the pressure reading of the transdu...

Страница 60: ...General Chapter Four Operation 50 This page intentionally left blank...

Страница 61: ...bove the trip point Each relay functions independently The initial configuration is described in Table 21 Initial Settings for the Relay System Parameter Setting Trip Point A State Setting Energized b...

Страница 62: ...Module refer to Figure 13 The adjustment voltage ranges from 0 to 10 V corresponding to zero to full scale The pots are initially configured to 5 5 V that is 55 of FS Figure 13 Location of the Trip P...

Страница 63: ...essure falls below the specified trip point level The trip point is not deenergized until the pressure rises above the value defined by the Trip Point A hysteresis as shown in Figure 14 Figure 14 Trip...

Страница 64: ...er Two Installation page 21 for instructions on installing your R700 R800 unit Cabling The pressure transducer has a 19 inch permanently attached cable that connects the unit to the relay module Refer...

Страница 65: ...referenced in parentheses The tolerances for the dimensions are 0 1 X X and 0 01 X XX Figure 16 Dimensions of the Relay Module 3 31 84 1 2 81 71 4 0 12 3 05 9 Pin Female Type D Power Interface Connect...

Страница 66: ...ive Type R7xxC Relay System 56 Figure 17 Top View of the Type R7xxC Unit Figure 18 Side View of the Type R7xxC Unit 0 86 21 8 3 125 79 4 4 VCR female 2 75 Max 69 9 J2 Connector Span Pot Zero Pot 3 310...

Страница 67: ...Relay Module Ensure that the holes in the large rectangular part of the bracket align with the mounting holes on the Relay Module refer to Figure 16 page 55 Also ensure that the small part of the bra...

Страница 68: ...r 2 Position the Relay Module so that the holes in the right angle bend of the bracket line up with the screw holes on the transducer 3 Replace the two 2 screws removed in step 1 to secure the Relay M...

Страница 69: ...r Pinout Pin Number Assignment 1 Relay A Normally Open 2 Pressure Output 3 Reserved 4 Reserved 5 Power Return 6 15 Volt 7 15 Volt 8 Relay A Normally Closed 9 Relay B Normally Closed 10 Trip Point A Se...

Страница 70: ...grasp the Relay Module so that the rear panel of the unit faces up 4 Insert a coin flathead screwdriver or the thumb nail of your other hand at any point along the cover seam and gently bend the side...

Страница 71: ...elay Module PC Board TP A Jumper JP1 Trip Point B Jumper JP2 Trip Point A jumper JP1 initially positioned over pins 1 2 Relay set to be energized below the trip point value Trip Point B jumper JP2 ini...

Страница 72: ...How To Configure the Trip Points Chapter Five Type R7xxC Relay System 62 This page intentionally left blank...

Страница 73: ...to MKS Instruments for service In production operations verify the transducer zero and adjust if necessary each time the equipment is shut down for routine maintenance Note The zero and trip point ad...

Страница 74: ...connector Inspect cable and transducer Replace if necessary Measurement slowly goes positive over time Overpressure and or a build up of contamination in the Px cavity Return to MKS for servicing or t...

Страница 75: ...anges Absolute Gage Compound 10 Torr through 3000 psia 50 psig through 3000 psig 30 0 30 through 30 0 3000 inHg psig Input Required 0 to 5 Volt output 0 to 10 Volt output two wire 4 to 20 mA 10 8 VDC...

Страница 76: ...istive Dimensions 6 735 H x 3 31 L x 2 68 D 17 1 cm H x 8 4 cm L x 6 8 cm D Hysteresis 0 3 Full Scale maximum Input Required 15 VDC 5 75 mA LED Status Green when energized No color when de energized T...

Страница 77: ...al Description The ordering code information is included in this section for reference only Product Type The 7xxC Series transducers covered in this manual include 740C R740C 742C 750C R750C 752C Prod...

Страница 78: ...wo letter designation since it requires two numbers to define the range Refer to Table 24 for a list of the order codes for the full scale ranges Full Scale Ordering Code Full Scale Range Ordering Cod...

Страница 79: ...1000 psig 13P 100 psia 12P 2000 psig 23P 1000 psia 13P 3000 psig 33P 3000 psia 33P Table 26 Examples of Full Scale and Engineering Unit Ordering Codes Fittings The type of fittings used is designated...

Страница 80: ...ut Selection Ordering Code Input Output Ordering Code 13 to 32 VDC 0 to 10 VDC 2 10 8 to 32 VDC 0 to 5 VDC 3 13 to 36 VDC 4 to 20 mA two wire 4 Table 28 Input Output Selection Ordering Code Accuracy T...

Страница 81: ...Type D A 15 Pin High Density Type D C Bendix 4 Position PT02A8 4P male 4 20 mA on pins A and D voltage output on pins B and C D Flying Leads refer to Table 12 page 36 for the pinout F Bendix 4 Positio...

Страница 82: ...General Description Appendix A Product Specifications 72 This page intentionally left blank...

Страница 83: ...Line resistance 30 Location requirements 22 M Maintenance 61 Manual organization 18 Mounting information 26 Mounting instructions relay module option 55 O Optional accessories 22 Output configuration...

Страница 84: ...r zero 41 44 Trip point direction 51 jumpers 58 Trip points 17 Type R700 R800 Relay System cabling 52 connections 57 electrical 57 setup 52 U Ultraclean processing 17 Unpacking 21 Z Zero adjustment 61...

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