Laurell Technologies
Operations Manual WS-650 Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
72
4.1.3 VACUUM CHUCK WET TEST
To prevent chemicals from entering into the vacuum path, the chuck and o-ring
surface must be clean and defect free. A chuck wet test can be performed to
check the integrity of the o-ring seal. See Fig.4-2. Using a clear substrate, place
the wafer on the chuck and press the vacuum key. Using a bottle of DI water
spray water around the periphery of the substrate where it meets the chuck while
manually rotating the chuck. Check to see if there is any leakage across the o-
ring.
If there is no leakage, the chuck is ok to use.
10
- Press
the two
remaining
sections
onto the
first
section,
also
making
sure that
the o-rings
are firmly
in place.
11
- With the
entire
assembly in
tact, insert
the first
screw.
12
- Insert each
screw loosely.
DO
NOT
totally tighten
until all four screws
have been
inserted.
13
- Tighten
screws firmly,
but do not
over tighten.
When
tightening the
screws, work
in a criss-
cross pattern.
14
- Make sure
screws are secure,
but not over
tightened.
Also check to see
if all o-rings are in
place.
