Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
35
2 – RUN MODE –
press
this key to enter a selected program from the “Select
Process” screen into the run mode. This key is active when the green LED is
illuminated. The start key (
11
) is active; pressing this key will begin processing.
Figure 3-7 shows the “Run” mode screen. When the run mode is selected a number
of keys become active as indicated by illuminated green LEDs. From the run mode
the user can enter the “Select Process Mode”, Edit Mode” or “Info Mode”. The “Up
arrow (
)” and “Down arrow (
)” keys can be used to move between “Valv”, “Sens”
and “Type” line. The F1 key (
9
) becomes active when the “Valv” or “Sens” line is
highlighted. The F1 key will send the user to the valve or sensor submenu. Vacuum
(
8
) can be turned on or off.
Displayed fields are the operation mode/program name, step-of-steps, vacuum
status, set point time, agitation rate, actual wafer RPM, set point RPM and spin
rotation direction, valve, sensor and type status for each step of a program. The last
line of the display will show the processor status and error messages.
Figure 3-7
RUN MODE SCREEN
