Laurell WS-650 lite Series, Руководство по эксплуатации

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Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
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2.1.9 VACUUM PUMP (OPTION) ...................................................................................................... 22
2.1.10 SECONDARY CONTAINMENT AND SPILL PREVENTION FEATURES............................. 22
2.2 INSTALLATION ............................................................................................................................... 23
2.2.1 SPIN PROCESSOR CONNECTIONS ...................................................................................... 23
2.2.1.1 COMPRESSION FITTING ASSEMBLY ............................................................................ 24
2.2.2 DIMENSIONAL DRAWINGS .................................................................................................... 24
2.2.3 DRAIN AND EXHAUST CONNECTIONS ................................................................................ 25
2.2.4 INDECK CONNECTIONS ......................................................................................................... 27
SECTION 3 - OPERATION PROCEDURES – 650 CONTROLLER ............................. 29
3.1 POWER ............................................................................................................................................ 30
3.2 INTERLOCKS .................................................................................................................................. 30
3.2.1 LID INTERLOCK ....................................................................................................................... 30
3.2.2 VACUUM INTERLOCK ............................................................................................................. 30
3.2.3 SEAL PURGE INTERLOCK ..................................................................................................... 32
3.3.4 EXHAUST FLOW INTERLOCK ................................................................................................ 32
3.3 - KEYPAD ......................................................................................................................................... 33
3.3.1 OPERATIONAL KEYS ............................................................................................................. 34
3.4 - THE LCD DISPLAY ....................................................................................................................... 39
3.4.1 “SELECT PROCESS” SCREENS........................................................................................ 39
3.4.2 “RUN MODE” SCREENS ......................................................................................................... 40
3.4.2.1 “RUN MODE” – DISPLAYED FIELDS – see figure 3-11 ................................................ 41
3.4.2.2 “RUN MODE” – OPERATION .......................................................................................... 45
3.4.3 “EDIT MODE” SCREENS ........................................................................................................ 48
3.4.3.1 EDIT MODE – DISPLAYED FIELDS – see figure 3-15 ................................................... 48
3.4.3.2 “EDIT MODE” – OPERATION .......................................................................................... 50
3.4.4 “INFO MODE” SCREENS .................................................................................................... 53
3.4.4.1 “INFO MODE” - STATISTICS - DISPLAYED FIELDS – see figures 3-21A & 3-21B .... 53
3.4.4.2 “INFO MODE” - CONFIGURATION - DISPLAYED FIELDS – see figures 3-22A-3-22E54
3.4.4.3 “INFO MODE” - ABOUT - DISPLAYED FIELDS – see figures 3-23A ........................... 57
3.5 – PROGRAMMING THE 650 CONTROLLER ................................................................................. 57
3.6 - RUNNING THE 650 CONTROLLER ............................................................................................. 58
3.7 - REMOVING/CHANGING CHUCKS ............................................................................................... 59
3.7.1 “SCREW ON” CHUCK ............................................................................................................. 59
3.7.2 “PRESS-ON” OR “SCREW DOWN” CHUCK ......................................................................... 59
3.7.3 HIGH PERFORMANCE DRIVE (HPD2) MOTOR - PRESS-ON OR SCREW DOWN CHUCK 61
3.8 – HIGH PERFORMANCE DRIVE MOTOR (HPD2) ......................................................................... 61
3.8.1 PROGRAMMING THE HPD2 ................................................................................................... 61
3.9 – FIRMWARE VERSION .................................................................................................................. 63
3.10 – WAFER SIZE vs. SPIN SPEED .................................................................................................. 63
SECTION 4 - MAINTENANCE ...................................................................................... 65