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Laurell Technologies
Operations Manual WS-650-Lite Series

Revision Date: 7/26/2011

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

59

2. Open the lid; place and align a substrate on the chuck. Press the “Vacuum” key

to activate the vacuum valve if vacuum is required. Sufficient vacuum to hold the
substrate is required to start the motor. If using a non-vacuum chuck the vacuum
requirement can be disabled in the edit mode.

3. Close lid.
4. Press “Start” key to start a program. The program will not start until the vacuum

hold down requirement is met (vacuum chucks only), the seal purge requirement
is satisfied, exhaust flow is correct and the lid is closed. The program will stop
automatically if the lid is opened, the N

2

motor seal purge is not satisfied (>60

PSI), exhaust drops or increases beyond the set point or the vacuum
requirement for hold down is not maintained. The remaining process time will be
maintained.

5. “Done” will be displayed when the process is completed and the lid has not yet

been opened for wafer removal. Restarting the same sequence on the same
wafer is not allowed until the lid is opened or the “Edit “key is pressed then the
“Run” key.

3.7 - REMOVING/CHANGING CHUCKS

3.7.1 “SCREW ON” CHUCK



Hold the two horizontal arms on the column below the base of the chuck. Turn

the chuck counter-clockwise to remove (see fig. 3-12A), and clockwise to install,
making sure the chuck is snug (see fig.3-12B).



DO NOT OVER TIGHTEN (especially Teflon)!

Figure 3-12A

Figure 3-12B

3.7.2 “PRESS-ON” OR “SCREW DOWN” CHUCK

Laurell Technologies also uses a press-on or screw down chuck with our standard drive
motors. These two styles of chucks are interchangeable – the press-on is a chuck
which presses onto the motor shaft adapter and the screw down chuck screws onto the
motor shaft adapter. See photos below to identify which chuck design you have.

1. Press-on Chuck:

To remove the chuck, gently lift up on the edges; lift one side

then the other. To install a chuck (see figure 3-13), align the 2 locating pins on



Threaded motor
shaft and chuck



Horizontal arms



Installed chuck

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Содержание WS-650 lite Series

Страница 1: ...aurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 1 WS 650 LITE SERIES SPIN PROCESSOR OPERATION MANUAL P N 1...

Страница 2: ...TENTIAL EXPOSURE HAZARDS 11 1 5 1 ELECTRICAL HAZARDS 11 1 5 2 STATIC ELECTRICITY BONDING AND GROUNDING 12 1 5 2 1 BONDING 12 1 5 2 2 GROUNDING 12 1 5 3 MOVING PARTS HAZARDS 13 1 5 4 AUDIO NOISE HAZARD...

Страница 3: ...RLOCK 32 3 3 KEYPAD 33 3 3 1 OPERATIONAL KEYS 34 3 4 THE LCD DISPLAY 39 3 4 1 SELECT PROCESS SCREENS 39 3 4 2 RUN MODE SCREENS 40 3 4 2 1 RUN MODE DISPLAYED FIELDS see figure 3 11 41 3 4 2 2 RUN MODE...

Страница 4: ...a corporate officer 4 4 1 ERROR MESSAGES 66 4 1 1 VACUUM LOSS ON UNITS EQUIPPED WITH VACUUM SENSOR ONLY 69 4 1 2 REMOVING CLEANING AND INSTALLING THE VACUUM VALVE 69 4 1 3 VACUUM CHUCK WET TEST 72 4...

Страница 5: ...e tasks Whenever possible turn off and lockout gases chemical delivery valves and electrical power before service or maintenance is performed Possible hazards associated with the spin processor system...

Страница 6: ...azards associated with the spin processor system are clearly labeled on the equipment and in this manual using the preferred hazard warning trilogy of alert words pictograms and avoidance techniques T...

Страница 7: ...s should be taken See Figure 1 2B Caution Figure 1 2B CAUTION ALERT WARNING Depicted by black lettering on an orange background This indicates that an immediate hazard exists and special precautions a...

Страница 8: ...hazards and how the hazard may be avoided Laurell Technologies Corporation has adopted a series of pictograms used to identify various hazards which may be present in the spin processor These icons a...

Страница 9: ...cy Machine Off circuit it should be powered by a system with EMO capability If your safety department or policies allow simply having the incoming power plug far enough away from the spin processor pr...

Страница 10: ...ress the EMO button to immediately interrupt system power EMO Figure 1 3 EMO Emergency Machine Off PROCEDURE 1 4 PROTECTIVE APPAREL Always wear personal protective equipment when handling any potentia...

Страница 11: ...system Access can only be gained by removal of the bottom panel which is secured by screws Only LTC factory trained qualified technicians should be permitted to work on an uncovered machine Use all pr...

Страница 12: ...icing of the spin processor while it is energized 1 5 2 STATIC ELECTRICITY BONDING AND GROUNDING WARNING Friction caused by liquids moving can cause a static electricity buildup If this charge is not...

Страница 13: ...ormal operations were measured to be 51 dB A Readings of less than 80 dB A are considered non hazardous 1 5 5 CHEMICAL HAZARDS AND COMPATIBILITY The following section outlines some general guidelines...

Страница 14: ...g electrical equipment Keep all chemicals in a well ventilated area preferably in a cabinet designed for such storage WARNING Flammable liquids should be stored and transported in approved safety cans...

Страница 15: ...and death Gastrointestinal pain cramps nausea vomiting and diarrhea may also result The single lethal dose for a human adult about 250 ml 8 ounces Skin Contact May cause irritation with redness and pa...

Страница 16: ...ty Data Sheets Inhalation Produces damaging effects on the mucous membranes and upper respiratory tract Symptoms may include irritation of the nose and throat and labored breathing May cause lung edem...

Страница 17: ...ectrical circuits You must be within sight or calling distance of another employee who has the following qualifications Knows how to remove power from the equipment Knows how to apply artificial respi...

Страница 18: ...troducing additional hazards do not install substitute parts or make any unauthorized modification to the system 16 Contact Laurell Field Service for service and repair to ensure that safety features...

Страница 19: ...Some are reportedly more effective than others in terms of efficiency The oldest abatement technology is to exhaust this effluent into the house solvent system which is normally present in a wafer man...

Страница 20: ...ucts as opposed to disposal as normal refuse Controlled recycling of products after the end of their useful life will thereby avoid all negative impact on the environment We also feel that this is a v...

Страница 21: ...1 6 4 5 SCFM 0 Hg Other conversions see below 20 Hg 28 Hg or 1 6 4 5scfm or 0 68bar 0 95bar or 0 047cm m 0 11cm m or 68kpa 95kpa or 47Lpm 127Lpm 508torr 711torr Exhaust see section 2 1 8 below Drain...

Страница 22: ...rements were taken in the exhaust duct 3 inches from the system after the first elbow 2 1 9 VACUUM PUMP OPTION LTC provided oil less vacuum pump 25 28 635 711mm Hg with a flow volume of 4 5 scfm 0 11c...

Страница 23: ...5 PSI breaking pressure be installed on all supply tubing connected to the spin processor Refer to installation drawing s in Section 5 for guidance 2 2 1 SPIN PROCESSOR CONNECTIONS Follow the outline...

Страница 24: ...echnologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 24 2 2 1 1 COMPRESSION FITTING ASSEMBLY 2 2 2 DIMENSIONAL DRAWINGS...

Страница 25: ...ain only configuration Exhaust is optional on the LITE model Figure 2 2B is the down flow exhaust option An exhaust source of approximately 0 5 to 2 5 H2O column as measured with a differential pressu...

Страница 26: ...Date 7 26 2011 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a...

Страница 27: ...rocessor Two cables and one vacuum sensor hose are required which can be detached at the rear of the remote control box see photo below Figure 2 3A for plumbing and electrical hook up Figure 2 3A INDE...

Страница 28: ...0 Lite Series Revision Date 7 26 2011 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express wri...

Страница 29: ...assigned through Spin 3000 Figure 3 1 is an example of the Run Mode screen Relevant information specific to the operation mode selected is displayed See Section 3 3 Keypad for illustrations Figure 3...

Страница 30: ...uit breaker with manual reset This breaker is located on the body of the spin processor housing near the AC cord entry location Indeck systems have the breaker switch on the remote controller s rear p...

Страница 31: ...t and a Low Vacuum error message will appear on the LCD display1 Once vacuum has been re established it is necessary to press the START key on the keypad to re start the program from where it stopped...

Страница 32: ...ecommend a constant CDA N2 supply even when the processor is not in use An interlock pressure sensor monitors nitrogen pressure This interlock will report a Need CDA error if the pressure should drop...

Страница 33: ...express written permission from a corporate officer 33 3 3 KEYPAD All operator actions are initiated through the membrane switch keypad figure 3 5 Figure 3 5 KEYPAD NEVER flood or spray solvent such...

Страница 34: ...s mode is selected a number of keys become active as indicated by illuminated green LEDs These illuminated keys can be used to navigate the keyboard and display Using the select process mode key the u...

Страница 35: ...run mode is selected a number of keys become active as indicated by illuminated green LEDs From the run mode the user can enter the Select Process Mode Edit Mode or Info Mode The Up arrow and Down ar...

Страница 36: ...b 6 or Tab 7 keys can be used to switch the highlighted field into an editable field key The FWD 15 or REV 14 keys are used to move from step to step with in a program Vacuum can be turned on or off F...

Страница 37: ...e to allow access to their respective submenus 4 INFO press this key to view Statistical Configuration and About information This key is active when the green LED is illuminated Highlight the desired...

Страница 38: ...active when the green LED is illuminated 8 VACUUM this key toggles the vacuum valve on and off This key is interlocked such that the vacuum cannot be turned off while a program is running or the chuc...

Страница 39: ...will go back to the previous step within a program This function allows the wrapping of the first step to the last within a program This function can be enabled to operate in the run mode by modifyin...

Страница 40: ...reating programs using the Spin 3000 software any 10 character name can be assigned Line 1 of figure 3 10B is an example of a program name created in Spin 3000 To edit a program use the Up arrow or Do...

Страница 41: ...Mode Program Name shows the operation mode that the user is in and the program name Step Step of steps the 1st field is the current step and the 2nd field is the total number of steps in the program...

Страница 42: ...d shows the actual rpm while the right most field shows the set point value Negative speeds may be entered which causes the motor to rotate in the opposite direction HPD 2 only Valv Following the Valv...

Страница 43: ...A B C up to 16 possible sensors If enabled a letter appears A dot indicates the sensor is inactive This field has a sub menu where the sensor names are displayed and what will happen if they are trigg...

Страница 44: ...normally on or normally off See figure 3 12A sensors A B and C are set to off and sensor D is set to on The resultant action associated with each sensor is shown in figure 3 12B Sensor A will provide...

Страница 45: ...Type field in figure 3 12C has the characters WANS The W indicates that a Warning command is associated with sensor A The A indicates that an Abort command is associated with sensor B The N indicates...

Страница 46: ...ng the Start key again the processor will begin processing from the stop point If Stop is pressed and the user leaves the Run Mode the program will revert back to the beginning of the program Pressing...

Страница 47: ...property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 47 Figure 3 13 Any system fault or error mes...

Страница 48: ...the 1st field is the current step and the 2nd field is the total number of steps in the program When editing a program the FWD or REV keys can move from step to step by pressing the FWD or REV key Th...

Страница 49: ...ions per minute The left most field shows the actual rpm while the right most field shows the set point value Negative speeds may be entered which causes the motor to rotate in the opposite direction...

Страница 50: ...s and sensors If valves are designated as MXL the submenu will show MXL beside the associated valves Press the F2 key to exit a submenu Sens Following the Sens label is a field indicating enabled sens...

Страница 51: ...es the highlighted field to be editable When a Tab or Tab key is pressed the highlighted field will blink this is an indicator that the field is now changeable When a Tab or Tab key is pressed the bli...

Страница 52: ...ion from a corporate officer 52 Figure 3 17 Figure 3 18 Figure 3 18 shows 4 of the 7 possible valves The last 3 valves are on the next page as indicated by the off screen line indicator in the upper l...

Страница 53: ...cer 53 3 4 4 INFO MODE SCREENS Press the Info Mode key to access information on the spin processors Statistics Configuration and About Figure 3 20 shows the Info Mode screen Figure 3 20 Figure 3 21A s...

Страница 54: ...he oldest error message will be over written Runs Total This field shows the spin processor total number of runs Runs Time This field shows the total usage time of the spin processor Motor Temperature...

Страница 55: ...ams Maximum This field shows the maximum number of programs 20 allowed in the 650 controller This can be modified by the user Programs Maximum Steps This field shows the maximum number of steps 51 all...

Страница 56: ...use of a purge program YES in the field enables a purge program to run When YES the purge command operates in conjunction with the delay and program parameters User defined Purge Delay Min When purge...

Страница 57: ...alibration 3 4 4 3 INFO MODE ABOUT DISPLAYED FIELDS see figures 3 23A To access the entire screen use the Right arrow key to scroll to the right Model This field shows the spin processor model S N Thi...

Страница 58: ...the F2 key Sensor configuration is done at the factory at time of order 8 When finished press the Run Mode key Example of an etch program This is for example only the user must find the best parameter...

Страница 59: ...not maintained The remaining process time will be maintained 5 Done will be displayed when the process is completed and the lid has not yet been opened for wafer removal Restarting the same sequence...

Страница 60: ...the screw down chuck is to remove the screw cover insert see figure 3 14a Once the insert is removed you will notice 2 screw heads fig 3 14b Use a 9 64 Allen wrench to remove both screws and gently p...

Страница 61: ...s optional with our other spin processors All models equipped with a HPD2 motor have an additional lid interlock which prevents the opening of the lid while the tool is in operation All HPD2 motors ha...

Страница 62: ...tive spin speeds The below example is meant to show how agitation programming is possible Use the Cpm field to enter an agitation rate 15 30 or 60 cpm or the user can build their own program and rate...

Страница 63: ...ependent on substrate size shape and weight in conjunction with chuck diameter vacuum holding area and weight All substrates regardless of size or shape must be centered on the vacuum chuck Off center...

Страница 64: ...0 Lite Series Revision Date 7 26 2011 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express wri...

Страница 65: ...to allow drying of residual moisture Any questions regarding the maintenance of your spin processor can be addressed at support laurell com Care should be taken not to flood the process chamber durin...

Страница 66: ...and can cause significant damage to your spin processor 4 1 ERROR MESSAGES The detection of abnormal operating conditions will cause the spin processor to shut down while in the process of running a...

Страница 67: ...r action detected Check sensor action Aborted by Sensor Sensor action detected Check sensor action Waiting for Sensor Sensor action detected Check sensor action Motor Fault Motor controller stopped Op...

Страница 68: ...un Hot Purge Motor hot while running purge program Allow motor to cool before running next process Vac Purge Vacuum lost during purge program Check vacuum source CDA Purge N2 CDA lost during purge pro...

Страница 69: ...acuum value being read by sensor Note the vacuum setpoint can be changed contact the factory for the adjustment procedure 4 1 2 REMOVING CLEANING AND INSTALLING THE VACUUM VALVE The vacuum valve is an...

Страница 70: ...d or distributed without express written permission from a corporate officer 70 3 The main assembly consists of 3 pieces and 3 small o rings Small o rings Backside view of the 3 piece assembly 4 If yo...

Страница 71: ...olvent 7 Reassemble the center valve assembly in the same order that the valve was disassembled If any o rings or parts appear degraded contact the factory 8 Take the first section and carefully snap...

Страница 72: ...wafer on the chuck and press the vacuum key Using a bottle of DI water spray water around the periphery of the substrate where it meets the chuck while manually rotating the chuck Check to see if the...

Страница 73: ...igure 4 2 Wet Testing 1 75 and 200mm Chuck 4 1 4 CLEANING AND REPLACING THE CHUCK O RING To remove the o ring from the chuck insert a thin blunt instrument or o ring puller into the o ring groove and...

Страница 74: ...inish as opposed to the relatively smooth texture of the Viton material some Viton O rings are brown in color The vacuum chuck s O ring seal should NEVER deflect 0 002 50 microns If you experience sub...

Страница 75: ...TFM LITE LTC P N O Ring Location Qty AS568B Material Durometer Compatibility 6200 2335 1 75 NPP TFM LP Vacuum Chuck Face 1 028 EPDM 50 Solvents 6200 2336 1 75 NPP TFM LP Vacuum Chuck Face 1 028 Viton...

Страница 76: ...All Std Chucks 1 024 Viton 50 Acids Toluene 6200 2235 1 75 NPP TFM Micro Fragment Adapter 1 001 5 EPDM 70 Solvents 6200 2236 1 75 NPP TFM Micro Fragment Adapter 1 001 5 Viton 70 Acids Toluene 6200 02...

Страница 77: ...032 Viton 70 Acids Toluene 6200 2217 Triple Labyrinth Seal 1 029 EPDM 70 Solvents 6200 2216 Triple Labyrinth Seal 1 029 Viton 70 Acids Toluene 6200 2335 HPD2 1 75 NPP TFM LP Vacuum Chuck Face 1 028 EP...

Страница 78: ...ciency corrections in time This is performed at the factory and is normally not required again NOTE Contact the factory for detailed instruction 4 2 REPLACEMENT PARTS Please visit our web site http 2k...

Страница 79: ...11 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate of...

Страница 80: ...ate 7 26 2011 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a c...

Страница 81: ...ate 7 26 2011 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a c...

Страница 82: ...11 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate of...

Страница 83: ...2011 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate...

Страница 84: ...al is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 84 Figure 5 3 3 Installation Tubing...

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