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INSTALLATION 3-7

INSTALLATION                                                                                                    3-7

_______________________________________________________________________

Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com

Fig. 3-1. Front view of controller for End-Hall ion source.

Содержание eHC 15015A

Страница 1: ... 9350 Internet www ionsources com Copyright 2007 by Kaufman Robinson Inc All rights reserved No part of this publication may be reproduced without written permission December 2007 VERSION 3 AUTOMATED CONTROLLER MANUAL FOR eH End Hall Ion Source with Hollow Cathode Models eHC 3005A eHC 30010A eHC 15015A ...

Страница 2: ...ons Between Controller Components 3 3 3 5 Connect Controller to Ion Source 3 6 4 INITIAL OPERATION 4 1 4 1 Gas 4 1 4 2 Power On 4 1 4 3 Operating Mode 4 1 4 3 1 Auto Gas Mode 4 1 4 3 1 1 Program Select 4 2 4 3 1 2 Gas Setpoints 4 2 4 3 1 3 Keeper Current Setpoint 4 3 4 3 1 4 Emission Setpoints 4 3 4 3 1 5 Discharge Parameters 4 4 4 3 1 6 Enable 4 4 4 3 1 7 Standby 4 5 4 3 1 8 Setpoint Adjustment 4...

Страница 3: ...10 6 4 3 Communication overview 6 10 6 4 4 Commands queries and responses 6 10 6 4 4 1 VRB Verbose Command 6 11 6 4 4 2 COM Enable RS 232 Command or Status Query 6 12 6 4 4 3 IDN Unit Identification Query 6 13 6 4 4 4 RST Reset Command 6 14 6 4 4 5 TST Self Test Query 6 14 6 4 4 6 OUT System Level Output Control Command or Status Query 6 15 6 4 4 7 MDE Mode Set Command or Mode Query 6 15 6 4 4 8 B...

Страница 4: ...2 Input Power Requirements 3 2 3 3 Pin descriptions for the rear panel BD 15 female MFC output connectors 3 5 6 1 Remote program selection using pins 16 and 34 on the DB 37 6 2 6 2 Pin descriptions for the analog inputs on the DB 37 connector 6 4 6 3 Pin descriptions for the analog outputs on the DB 37 connector 6 5 6 4 Run Fault and Beam Good pin descriptions 6 6 6 5 Pin descriptions for the fema...

Страница 5: ...ns CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com 1 SAFETY Caution High Voltage Only technically qualified personnel should install maintain and troubleshoot the equipment described herein The Auto Controller and power supplies for the End Hall ion source must be in stalled in a grounded 19 inch 483 mm rack mount cabinet before operation ...

Страница 6: ...and dimensions of each controller are outlined in the following table This section gives a general overview of the Auto Controller package with more detailed information in the later sections of this manual Table 2 1 Controller Specifications Nominal Input voltage Maximum Input Current Maximum Output Weight Height x Depth Auto Controller 115 V 1Φ 50 60 Hz 208 230 V 1Φ 50 60 Hz 0 75 A 0 38 A 15 V 5...

Страница 7: ...e rear panel Four relay contacts are also available on the rear panel if additional positive shut off valves are desired for the gas feed system Three of the gas channels are available for use with the ion source while gas channel 4 is dedicated to the hollow cathode The Auto Controller is connected to the Keeper Emission and Discharge power supplies through an RS 485 interface When the RS 485 int...

Страница 8: ... and the Keeper and Discharge power supplies The Discharge Pow er Supply provides voltage and current to the anode of the End Hall ion source This power supply communicates to the Auto Controller through a RS 485 in terface Additional information can be found in the individual manual for the Discharge Power Supply 2 5 Mass Flow Controller s The mass flow controller MFC or controllers are supplied ...

Страница 9: ... MFC on pin 8 2 Mass flow read back from MFC 0 5 volt signal from the MFC referenced to pin 10 3 No contact 4 Valve off Connected to common when MFC setpoint is set to zero or when unit is in the standby mode otherwise floated 5 15 volts DC for MFC supply voltage referenced to pin 9 6 15 volts DC for MFC supply voltage referenced to pin 9 7 No contact 8 Setpoint out to MFC 0 5 volts referenced to ...

Страница 10: ... 5 _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Fig 2 1 Front view of controller for End Hall ion source ...

Страница 11: ... Analog Remote Short Red Wire Short Black Wire RS 232 Remote Interlock 2 6 GENERAL DESCRIPTION AND SPECIFICATIONS _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Fig 2 2 Rear view of controller for End Hall ion source ...

Страница 12: ...m the completeness of order If any damage has occurred contact Kaufman Robinson Inc in addition to the shipping company to report the damage see Section 8 Retain packaging materials for any future shipments Table 3 1 is an inventory list for the controller package The inventory list is for the standard package so some items may or may not be included depending on the particular order Refer to the ...

Страница 13: ...Φ 50 60 Hz 208 230 V 1Φ 50 60 Hz 0 75 A 0 35 A Keeper Power Supply 115 V 1Φ 50 60 Hz 208 230 V 1Φ 50 60 Hz 14 A 7 5 A Emission Power Supply 115 V 1Φ 50 60 Hz 208 230 V 1Φ 50 60 Hz 14 A 7 5 A Discharge Power Supply 115 V 1Φ 50 60 Hz 208 230 V 1Φ 50 60 Hz 14 A 14 A The discharge power supply output will be limited to 1500 watts when operat ing with a nominal 115 volt ac input The Auto Controller Kee...

Страница 14: ...e connectors located on the rear panel of the Discharge Power Supply and tighten the screw above the appropriate connector Insert the end of the operating cable BLACK wire into one of the negative connectors located on the rear panel of the Discharge Power Supply and tighten the screw above the appropriate connector Insert the end of the operating cable RED wire into one of the negative connectors...

Страница 15: ... The RS 485 connectors are not device specific so they can be plugged into any of the RS 485 connectors Attach the other ends of the three RS 485 cables to the connectors labeled RS 485 located on the power supply back panels one for the Keeper one for the Emission and one for Discharge as shown in figure 3 2 Attach the ion source MFC cable to the connector labeled MFC 1 located on the back panel ...

Страница 16: ...ector or the female DB 9 connector These remote interfaces require knowledge of the ion source operation which is given in the next two sections of this manual The detailed descriptions for remote control are in Section 6 REMOTE AU TOMATED CONTROL of this manual The connections between the pressure regulators and the flow controller valves should be made with clean passivated or hydrocarbon free s...

Страница 17: ...on source manual The ion source installation procedures cover installation of the ion source vacuum cables gas tubing inside the vacuum chamber as well as electrical and gas feedthroughs in the wall of the vacuum chamber Once installed connect the operating cable to the electrical feedthrough As the final installation step turn off the front panel power switches on the Auto Controller Keeper Power...

Страница 18: ...________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Fig 3 1 Front view of controller for End Hall ion source ...

Страница 19: ... Analog Remote Short Red Wire Short Black Wire RS 232 Remote Interlock 3 8 INSTALLATION _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Fig 3 2 Rear view of controller for End Hall ion source ...

Страница 20: ...other process gases please contact Kaufman Robinson Inc The bottle regulator and mass flow controller s should be in stalled and gas lines evacuated as described in Section 2 4 3 of the Ion Source manual 4 2 Power On Switch on the front panel power switches to the Auto Controller and the Keep er Emission and Discharge power supplies These switches are the rocker type switches located on the far le...

Страница 21: ... without change Otherwise the parameters will be ramped to the newly selected program 4 3 1 2 Gas Setpoints There are four gas channels Pressing and releasing the Gas Channel Select button will increment to viewing the gas setpoint in sccm for the next gas channel for each program In the Auto Gas mode the gas is automatically adjusted to maintain constant discharge current and voltage once the ion...

Страница 22: ...ed by selecting the gas channel and turning the knob on the front panel of the gas controller before the auto controller is enabled For the initial operation leave the gases set at the programmed setpoint s 4 3 1 3 Keeper Current Setpoint The setpoint for the keeper current in amps is shown in the display labeled KeeperAmps on the Keeper Power Supply Notice that the yellow setpoint LED below the d...

Страница 23: ...ps Notice that the yellow setpoint LED below the display is on to indicate that the setpoint is being viewed Once the Auto Controller is enabled the run values will be displayed and the green run LED will be on The discharge voltage and current setpoints can be adjusted using the Setpoint Adjust knob on the front of the discharge controller These adjustments can be made when the Auto Controller is...

Страница 24: ...ash to indicate that the program has not been saved The new values can be acquired by pressing and holding the acquire setpoints button until the program LED stops flashing Once the controller is enabled the discharge voltage and current can be adjusted Adjusting the discharge current when the auto controller is enabled also adjusts the Emission current In this case the Emission current becomes a ...

Страница 25: ...int Adjustment Repeatedly pressing and releasing the Select Program button will cycle through the programs If more than two seconds elapses before the Select Program button is pressed and released the Auto Controller will commit to the program being viewed when it is in the enable state 4 3 2 Gas Only Mode When gas only mode is selected the Auto Controller functions as a gas controller only Indepe...

Страница 26: ...tion above 120 V 4 3 2 1 Constant Current Mode The operating condition selected for this demonstration is with a 2 5A 120 V discharge which is Constant Current Mode operation These conditions are based on a vacuum pump speed of 800 liters per second Operating parameters for other pump speeds and gases can be found in the Ion Source Manual Note that the operating range of the ion source may be limi...

Страница 27: ...er Sup ply And wait a couple of seconds for the keeper to start the hollow cathode as indicted by the Keeper Amps display reading 1 5 amps Reduce the flow to gas channel 4 to 10 sccm Press the white Enable Standby button on the Emission Power Sup ply Press the white Enable Standby button on the Discharge Power Supply Adjust the gas flow for channel 1 using the Gas Adjust Knob on the Auto Controlle...

Страница 28: ...rating range of the ion source Press the white Enable Standby button on the Auto Controller Select Gas 4 using the white Gas Channel Select button on the Auto Controller and then turn the Gas Adjust knob to 10 sccm Gas should be allowed to flow through the hollow cathode for 15 minutes at 10 sccm before proceeding to the next step Select Gas 1 using the white Gas Channel Select button on the Auto ...

Страница 29: ...n on the Discharge Power Supply Adjust the gas flow for channel 1 using the Gas Adjust Knob on the Auto Controller until the discharge current is approximately 2 5 A Operate the ion source for at least 10 minutes to clean any contami nates from the ion source that may have been introduced while at atmosphere The discharge current will vary slightly during this time Adjust the gas flow after the 10...

Страница 30: ...or discharge voltages of 120 volts or more The discharge current is usually set to maximum while the operat ing voltage is set to the desired value on the front panel The gas flow to the ion source is then adjusted to control the ion source current Constant current mode is typically used for discharge voltages less than 120 volts The discharge voltage is usually set to maximum while the oper ating...

Страница 31: ...igh enough pressure that a Paschen discharge can be established when the keeper voltage Vk of 800 volts is applied The Paschen discharge heats the hollow cathode until surfaces inside the cathode tube are hot enough for thermionic emission Once the thermionic emission is established only about 10 40 volts are required to keep the hollow cathode ignited using 1 5 amps of keeper current Ik After ign...

Страница 32: ..._______________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com or plasma beam ...

Страница 33: ...______________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Fig 5 1 Schematic block diagram of ion source and power supplies ...

Страница 34: ...r panel DB 25 connector to enable the pro gram selected from the front panel 6 2 Remote Control using the DB 37 Connector The DB 37 connector is an extended control set which gives the operator full access to the Auto Controller inputs and outputs There are two main options when using the DB 37 connector for remote control of the Auto Controller One option is to enable one of the four programs sto...

Страница 35: ...the valve off command to the mass flow controller The gas relays are also de energized and the valve off commands are sent to the mass flow controllers when the Auto Controller is in standby This is true except for gas channel 4 which is dedicated to the hollow cathode The hollow cathode gas will flow at a preprogrammed minimum flow if a setpoint value less than this minimum is programmed The prep...

Страница 36: ...l Setpoints Using the Gas Only Mode When the Gas Only mode is selected from the front panel the Auto Con troller continuously responds to the applied gas setpoints once the Auto Controller is enabled 6 2 3 Remote Analog Setpoint Option on the DB 37 Connector The remote analog setpoint option allows active control over the setpoints while the Auto Controller is enabled in the auto gas mode The four...

Страница 37: ...n Reference for gas channel setpoints See section 6 2 3 1 below 22 Discharge Current Setpoint 0 5 volts corresponds with 0 to the maximum level of discharge current in amps for the Discharge Power Supply that is being used Referenced to pin 7 or 8 26 Keeper Current Setpoint 0 5 volts corresponds with 0 2 amps This should usually be set to 1 5 amps 30 Gas Channel 2 Setpoint Referenced to pin 13 31 ...

Страница 38: ...channel 1 MFC Referenced to pin 27 10 Channel 3 Gas Flow Output 0 5 volt corresponds with 0 to the maxi mum output in sccm for the channel 3 MFC Referenced to pin 27 20 Discharge Current Output 0 5 volts corresponds with 0 to the maximum level of discharge current in amps for the Discharge Power Supply that is being used 21 Discharge Voltage Output 0 5 volts corresponds with 0 to the maximum level...

Страница 39: ...de or error message is cleared when the remote enable pin 36 is released from common pin 7 or 8 The Beam Good function gives a real time check of the operating parameters If the operating parameters are in range the two Beam Good pins are shorted together If the operating parameters are out of range then the beam good pins are open The conditions for Beam good are Discharge Voltage within 12 8 vol...

Страница 40: ...sion current in amps for the Emission Power Supply being used Referenced to pin 7 or 8 5 Auxiliary 12 volts Referenced to pin 7 or 8 6 Emission Voltage Output 0 5 volts corresponds with 0 to the maximum output voltage for the Emission Power Supply Referenced to pin 7 or 8 7 Common 8 Common 9 Channel 1 Gas Flow Output 0 5 volts corresponds with 0 to the maxi mum output in sccm for the channel 1 MFC...

Страница 41: ...tput 0 5 volts corresponds with 0 to the maxi mum level of discharge current in amps for the Discharge Power Sup ply that is being used 21 Discharge Voltage Output 0 5 volts corresponds with 0 to the maxi mum level of discharge voltage in volts for the Discharge Power Sup ply that is being used 22 Discharge Current Setpoint 0 5 volts corresponds with 0 to the maxi mum level of discharge current in...

Страница 42: ...l select pin 18 is connected to common pin 7 or 8 37 Keeper current output 0 5 volts corresponds with 0 2 amps Referenced to common pin 7 or 8 6 3 Interlock A two pin interlock is located on the rear panel The interlock pins must be shorted to allow operation of the Auto Controller When the interlock pins are open the auto controller remains in Standby and the Auto Controller display says Int Loc ...

Страница 43: ...ave a male DB 9 connector to connect to the female connector on the rear panel of the Auto Controller 6 4 2 Communication settings The baud rate is 9600 b s with 8 data bits one stop bit and no parity The baud rate can be changed if desired See the Auto controller setup docu ment in the appendix if another baud rate is required 6 4 3 Communication overview The acceptable command response behavior ...

Страница 44: ...nd All commands are upper case sensitive Lower case commands and que ries will be interpreted as invalid commands Any command or query that requires a response must be terminated at the minimum with a Carriage Return CR character ASCII 13 or Hex 0x0D However the exact response is determined by whether Terse or Verbose mode is active as described below in the Verbose Command section All commands ar...

Страница 45: ...mmand will enable disable or query the status of RS232 remote control of the auto controller depending on the parameter following it The default power up state is Disabled In order to Enable the RS232 remote control Remote must be selected using the front panel Local Remote button Once Enabled the RS 232 remote control locks out all front panel controls except for the ON OFF switch and Gas Select ...

Страница 46: ...emote control state If the unit is in Verbose the response is Enabled or Disabled If the unit is in Terse the response is 1 or 0 Example COM 0 cr lf Disable RS 232 remote control Example COM 1 cr lf Enable RS232 remote control Example COM cr lf Get present output state If COM is not Enabled then the response to commands will be Comm Inactive in both Terse and Verbose modes The unit will respond to...

Страница 47: ... Terse mode Command RST Example RST cr lf Note The only recoverable errors are HLP 10 Start Failure HLP 11 Run Fault HLP 12 Gas Fault 6 4 4 5 TST Self Test Query The TST command performs a unit self test and report results A non zero return value will correspond to the associated front panel error message as outlined below If more than one error is active during the query a string of all active HL...

Страница 48: ...te Parameter Response 0 Standby 1 Enabled return current state Example OUT 0 cr lf Put the unit in Standby Example OUT 1 cr lf Enable the unit Example OUT cr lf Get present state of output If the unit is in Verbose the response will be Standby or Enabled If the unit is in Terse the response will be 0 or 1 If the RS 232 is not enabled the unit will respond with Comm Inactive 6 4 4 7 MDE Mode Set Co...

Страница 49: ...ust be in STANDBY If the COM is not Enabled the command is ignored both in Terse and Verbose Example MDE cr lf Returns present mode If the unit is in Verbose the response is Auto Gas Manual Gas or Gas Only If the unit is in Terse the response is 0 1 or 2 6 4 4 8 BEAM Beam Good Query The BEAM query Indicates if a stable operating point has been achieved Command BEAM Response is 1 if beam good 0 if ...

Страница 50: ...eral form of the program read write command is Command P program parameter value The parameter and value fields are optional The command can be turned into a query by substituting for the program parameter and value fields The interpretation of the query is dependent on where the appears as outlined below Set or query the active program number P program cr lf Set active program to program P cr lf ...

Страница 51: ... for each parameter may have decimal points and decimal places included or omitted if there are no significant digits beyond the decimal point However if the first significant digit falls after a decimal point then a zero must precede the decimal point or an Invalid Command response will be generated Decimal places beyond the anticipated place will be truncated Example P4 GS1 10 cr lf Set program ...

Страница 52: ...d and appear in the order shown Any value that is to remain unchanged can be omitted but the comma delimiter between parameters must be included in the input string In the second example DSI and BSV remain unchanged in the target pro gram Example P1 ALL GS1 GS2 GS3 GS4 DSV DSI BEI BSV KPI cr lf Example P1 ALL GS1 GS2 GS3 GS4 DSV BEI KPI cr lf When using the ALL command in Terse mode to get all the...

Страница 53: ...set to maximum while the other is set to the desired operating value The gas flow determines the discharge parameter that has been set to maximum If the Auto Controller is in the Gas Only mode all the setpoints and queries will still be valid but only the gas will be enabled when issuing the OUT 1 command Issuing the OUT 0 command will dis able the gas In using the ALL parameter to set targets the...

Страница 54: ...he Ion Source and Hollow Cathode to prevent damage Review the ion source and hollow cathode manuals to determine appropriate operating conditions Contact KRI for assistance in establishing operating conditions if necessary 6 4 4 10 R Monitor Command for Reading the Actual Feedback Values The R command is used to get the actual feedback values from the auto controller It uses the same parameters as...

Страница 55: ...llow Cathode with BV Hollow Cathode without BV Gas Only Unknown In TERSE the responses are 0 1 2 3 or 4 respectively 6 4 4 12 LRN Learn Command or Learn Query The current status of LRN can be queried any time The COM must be active to set the LRN flag Setting the LRN flag with COM in active is ignored Setting the LRN mode using the serial command temporarily overrides the LRN mode setting establis...

Страница 56: ..._____ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Example LRN 0 cr lf Example LRN 1 cr lf Example LRN cr lf In VERBOSE the response is On or Off In TERSE the response is 1 or 0 respectively ...

Страница 57: ...onal function of displaying help codes and error messages If it becomes necessary to display a help code or an error message the Auto Controller may switch to standby mode depend ing on the particular code or message The front panel display will alternate between displaying HLP and a number for the help code The error messages will be displayed by alternating two abbreviated words A description of...

Страница 58: ... failed The discharge did not start Press and release the STANDBY ENABLE button or remove the remote enable signal to clear the code The unit remains in STANDBY until STANDBY EN ABLE is pressed again or the remote enable signal is reapplied Anode has an insulating coating and needs to be cleaned Hollow Cathode did not start In this case HLP 10 is also dis played on the Keeper Power Sup ply Review ...

Страница 59: ...ting condition the gas flow may be too high or too low De crease or increase flow Open or shorted discharge an ode cable Inspect in vacuum discharge cable and replace if necessary Not all damage to the discharge cable may be appar ent in this case replacing the cable may be the only evidence the cable was faulty HLP 12 Initial Gas Failure The gas flow did not initialize during the start up sequenc...

Страница 60: ...Make sure there is power to the power supplies and that they are turned on Int LOC Open Interlock An open interlock prevents the Auto Controller from going to the ENABLE state and holds it in STANDBY This is a user defined fault in re mote operation Review the in terlock scheme for the system in question Not Rdy Not Ready Auto Controller held in STAND BY Insufficient line voltage Fault will clear ...

Страница 61: ...ntact KRI HLP 7 RS 485 Serial Communication Lost Communication for remote RS 485 communication was detected and then lost Check connection of the RS 485 cables Make sure Auto Controller has in put power and is turned on HLP 8 RS 232 Interface Serial Common Error High current flowing in the ground connection of the serial interface between the unit and the PC Shows up only in remote RS 232 operatio...

Страница 62: ... no blockage of the vents on the rear panel Ambient temperature is too high Reduce ambient temperature be low 40 C Not Rdy Not Ready Keeper Pow er Supply is in STANDBY Insufficient line voltage Message will clear itself when there is sufficient line voltage 7 3 Emission and Discharge Power Supplies The Emission and Discharge front panel displays have the additional func tion of displaying help cod...

Страница 63: ...he RS 485 cables Make sure Auto Controller has in put power and is turned on HLP 8 RS 232 Interface Serial Common Error High current flowing in the ground connection of the serial interface between the unit and the PC Shows up only in remote RS 232 operation Display says HLP 8 for 5 seconds Informational display only No action taken on unit operation Unit recovers from error condition if the probl...

Страница 64: ... end Hall ion source in auto mode it will learn how to reach the operating conditions the first time a program is used The next time the feedback will home in more quickly Since this effects the starting gas flow it may be desirable to turn this off for some applications Turn the setpoint knob to select off if desired When finished press and release the Operating Mode button Note that the learn mo...

Страница 65: ...troller beeps if the operating parameters have been changed without saving them or when a fault occurs Turn the Gas Adjust knob to select the desired number of beeps When finished press and release the Operating Mode button 8 The display should now be alternating between P35 and 0 or 1 This deter mines the functionality of pin 35 on the DB35 connector When set to 0 pin 35 serves as the gas ratio p...

Страница 66: ... under this Limited Warranty is at KRI s option to repair or replace any defective equipment or parts of the equipment without charge to the purchas er which are returned shipping prepaid to the KRI facility 1306 Blue Spruce Unit A Fort Collins Colorado 80524 USA For return or repair of equipment pur chaser must contact KRI for a Return Materials Authorization prior to shipment of the equipment to...

Страница 67: ...ation repairs or replacement during Warranty or repairs there after please contact Kaufman Robinson Inc 1306 Blue Spruce Dr Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 www ionsources com Please include the following details relating to the problem encountered or the item to be returned Product Serial number Detailed description of problem Date of purchase Name and address of com...

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