
FX-3R Maintenance
Guide
5-19
Rev. 1.00
For details about how to replace the parts and connect the cables and piping inside the solenoid
valve assembly, see Figure 5-13-2.
Figure 5-13-2 Solenoid Valve Assembly L Specification
43mm
C-OUT
STOP
WAIT
STOPPER
SHAPE Y
BU(EN)
BU(EN)
SHAPE Y
STOPPER
C-OUT
WAIT
STOP
搬送ユニット L用
搬送ユニット R用
Figure 5-13-3 Solenoid Valve Assembly XL Specification
Amplifier
Solenoid
va
lv
e
d
[For transport unit L]
[For transport unit R]
c
e
f
g
h
j
i
k
l
11
12
Amplifier
Solenoid
va
lv
e
For transport unit L
For transport unit XL