FX-3R Maintenance
Guide
9-6
9-4. Replacing the Vacuum Pump Parts
The reference replacement timing for the consumable parts listed below is one year after starting of
the operation. Replace or clean the consumable parts while referring to the procedure below. All
parts that need to be replaced are included in the consumable part set (part No. 40068178).
[List of Replacement Parts] (Consumable part set part No.: 40068178)
Table 9-4-1 Consumable Parts for Vacuum Pump
Inspection
location
Q’ty
Contents Method
Suction valve interference
prevention rubber
4
Check for deformation, wear, hardening, or
crack.
Visual check
Suction and exhaust
valves
12
Check for deformation, hardening, or
chipping.
Visual check
Exhaust valve backup
4
Check for unusual wear, hardening, or crack. Visual check
Cup packing
4
Check for unusual wear, hardening, or crack. Visual check
Gasket
4
Check for deformation, hardening, or crack.
Visual check
Inside of
vacuum
pump
Suction valve backup
4
Check for unusual wear, hardening, or crack. Visual check
Nylon tube
4
Check for deformation
Visual check
External
parts
Silencer
1
Check for deformation
Visual check
<Preparations for replacement work>
1)
Make sure that the vacuum pump
c
is not operated.
(Great care should be taken since the vacuum pump is hot immediately after it has been
stopped.)
2)
Open the cover of the electrical component unit.
SL6061292TN
SEMS cap bolt with washer
M6
×
12
WP0841601SC
Flat washer M8
c
40047064
Vacuum pump
assembly
d
Pump support
Figure 9-4-1 Vacuum Pump
3)
Disconnect the air tubes from the vacuum pump. Remove the pump support
d
with an Allen
wrench.
4)
Pull out the vacuum pump from the main unit. (Pay special attention to the cables when pulling
out the vacuum pump.)
Rev. 1.00