FX-3R Maintenance
Guide
5-14
Rev. 1.00
5-11. Replacing the Support Table Motor (BU Motor)
1) Remove the support table as described below.
1. Stretch the transport width as much as possible.
2. Remove 12 (
∗
) pan head screws
d
from the support table
c
to detach the table.
∗
For the number of screws, the L-specification uses 12 pcs. while the XL-specification
uses 14 pcs.
Figure 5-11-1 Support Table
2) Loosen the tension support fixing screw
f
, and move the tension support assembly
e
in the
arrow direction to loosen the tension of the support table ball screw driving timing belt
3) Loosen the set screws
h
to take out the support table BU motor assembly
g
together with the
torque support.
4) Loosen the set screws
i
to detach the torque support assembly from the shaft of the BU motor
j
.
5) Assemble the parts and components in the reverse order of above steps 1) to 3). When
assembling the parts and components, perform the following adjustments.
•
Adjust the gap between the torque support and BU motor assembly. (section 5-11-1)
•
Adjust the tension of the support table driving timing belt. (section 5-11-2)
•
Place the support table surface horizontally. (section 5-11-3)
•
Obtain the support table offset. (section 3-11 in MS Parameter)
Figure 5-11-2 Support Table Drive System
Figure 5-11-3 BU Motor Assembly
c
40001018
BU table (L)
d
SM1040801SN
Flat head screw
M4
×
8
f
SL6051492TN
SEMS cap bolt with washer
M5
×
14
g
40000927
BU motor
assembly
h
SL6051442TN
SEMS cap bolt with washer
M5
×
14
i
SM8050852TP
Set screw M5
×
8
j
E94327290A0
BU motor
assembly
e
Tension support
assembly
Toque support