J.A. Woollam M-2000, Руководство по оборудованию

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88 ©2023 J.A. Woollam Co. M-2000® Hardware Manual
System Check Unsuccessful
If the System Check is not successful (that is, the error bars on the determined
parameters exceed the acceptance limits), a message box describing the error
will be displayed.
Figure 4-68. System Check error.
To view the calibration parameters, select Hardware > System Information >‘View
Hardware Log’
In most circumstances, the error bars on the Ps (polarizer), Cs (compensator),
and As (analyzer) azimuthal calibration parameters all should be less than ±0.01°.
If the system check is not successful, check the following:

The system is aligned and the light intensity is adequate.

If the intensity is greater than 40, try reducing the intensity by half and
calibrating again. This will prevent the detector from being overloaded
with light at certain analyzer positions during calibration.

Read Chapter 11 Performance Checks and/or Chapter 12 Troubleshooting
for possible problems and solutions. If a successful system check still
cannot be performed, contact the J.A. Woollam Co. for assistance.
Note: The SiO2 thickness varies significantly from wafer to wafer (20-
30nm). 25nm is the nominal thickness. Your wafer may have SiO2
thicker or thinner than 25nm.
4.10 Instrument Shutdown
1. Save any necessary data and/or model files.
2. Select (L

) Exit button in upper right-hand corner of program screen.
3. Exit Windows.
4. Turn off the Computer, Monitor, EC box and the Lamp Power Supply
Module (M-2000 box). There is no particular order for the turning off
system components.