J.A. Woollam M-2000, Руководство по оборудованию

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M-2000® Hardware Manual ©2023 J.A. Woollam Co. 91

For Sample Tilt Alignment: choose ‘Skip’, ‘Manual’, or ‘Automatic’
Automatic option only available for systems with automated tip/tilt
stage.

For Sample Height Alignment: choose an option:
Figure 5-4. Sample Height Alignment options.
o
A “Quick” sample height alignment searches a narrow Z range
around the Z-height entered in the Sample Thickness box. This
option is recommended (to save time) if mapping or many
measurements will be made. Click ‘Set to Current Position’ to
enter current Z-position into the Sample Thickness box – useful if
a sample with similar thickness was last aligned.
o
A “Robust” sample height alignment searches the full Z range of
the base. This option is recommended if sample thickness is not
known, if the sample was not previously aligned, or if a sample
with similar thickness was not last aligned.
o
The “Pinhole Camera” option is the fastest alignment and works
well if the offset correction is valid.
o
‘Skip’ may be checked if the sample alignment has already been
completed. This is not recommended if the current sample has
not yet been aligned.
8. When finished, click ‘Ok’ to start the measurement sequence. The Align
Sample window appears (unless ‘Skip’ was selected for both tilt and Z
alignment). If manual alignment options were selected, perform the
alignment and click ‘Cancel Alignment’ when finished to close the
alignment screen. If automatic alignment options were selected, the
software will automatically perform the sample alignment and no action
is necessary. Ellipsometric data acquisition will start after the sample
alignment selections are executed.
9. System Status will show measurement progress.