ISVT IMC1300, Инструкция по эксплуатации, Страница: 52 / 54

52
<Pressure Set Command>
SPS
- Set Pressure control Set-point
Return Value : OK or ?!
Parameter : 0 ~ range
EX)
<Host> 'SPS 100<CR>'
<IMC1300> 'OK<CR>'
Pressure control set-point set 100
SPR
- Set Pressure control Range
Return Value : OK or ?!
Parameter : 0.01 ~ 50000
※ <Caution> ※
If Range is changed, Set-point is changed to Zero.
EX)
<Host> 'SPS 1<CR>'
<IMC1300> 'OK<CR>'
Pressure control CM range set 1 torr
If Range small less than 1 torr, Unit was set automatically
mTorr and displayed.
SPO
- Pressure Control CH Flow ON/OFF
Return Value : OK or ?!
Parameter : 0 ~ 1
Parameter means that 0: Off, 1: On
EX)
<Host> 'SPO 1<CR>'
<IMC1300> 'OK<CR>'
It is Flow On that Pressure Control selected CH