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ISVT IMC1300 Скачать руководство пользователя страница 42

42

Pressure Control

Front Panel에 있는 key 중에서 [P.CON MODE] key를 누르면 Pressure Control
Mode로 들어갈 수 있으며, 아래의 그림은 Pressure Control에 사용할 MFC로
[ 1 ], [ 2 ], [ 3 ] Channel을 Setup Menu에서 선택한 모양이고, Channel 번호
왼쪽 편에 "p" 라고 나타난다.
여기서 "p" 라고 선택하지 않은 Channel의 MFC는 따로 [P.CON MODE] key를
눌러 Flow Mode로 간 다음 독립적으로 사용 할 수 있다.

1. Pressure Setting 값 변환 하기
[숫자] key를 이용하여 Pressure Setting 값을 변경할 수 있다.
원하는 압력 값을 맞추고 [ENT] key를 누르면 저장된다.

2. Flow "On/Off" 하기
위의 상태에서 [FLOW ON] 또는 [FLOW OFF] key를 눌러 수행한다.
이 때 "p" 라고 선택한 Channel의 MFC는 모두 동시에 On 또는 Off된다.

3. Gain, Phase Lead, Control Channel 등 Parameter 바꾸기.
[MENU/ESC] key를 누르면 Pressure Control Setup Menu로 들어갔다
나왔다 할 수 있으므로 기존에 설정한 값을 변경할 수 있다.

p1: 0 p2: 0
p3: 0

4: 0

P.Set : 1.0000 Torr

Press :

0.0000

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Содержание IMC1300

Страница 1: ...ISVT Type IMC1300 Instruction Manual 302 608 2 Bora dong Giheung gu Yongin si Kyeonggido Korea Tel 82 31 284 0791 Fax 82 31 284 0792 Web site http www isvt co kr E mail isvt isvt co kr...

Страница 2: ...2 WARRANTY Flow Pressure Controller IMC1300 1 Interface Demo Program Internet Home Page...

Страница 3: ...3 IMC1300 Flow Pressure Controller IMC1300 FLOW PRESSURE CONTROLLER 1 2 4 5 7 8 0 3 6 9 ON SET OFF MENU PCON ESC ENT ALL...

Страница 4: ...4 IMPORTANT Install Operation Manual Connection Grounding Manual CAUTION Flow Pressure Controller IMC1300 195 265VAC 50 60Hz 110VAC SAFETY WARNING Controller NOTE Manual...

Страница 5: ...5 CUSTMMER SUPPORT IMC1300 Flow Pressure Controller...

Страница 6: ...Components 13 Front Panel Display 14 Rear Panel 15 Rear Panel Components 15 Electrical Connections 16 Labels 20 Chapter Four System Setup Overview 21 Main Menu 22 Zeroing 23 Range Setup 24 System Set...

Страница 7: ...CB MFC Capacitance Manometer Display Board Display 1MFC 1CM Option Upstream Pressure Control Board Pressure Control Mode Channel MFC Channel Gas Control Display Pressure Control Channel Channel Flow C...

Страница 8: ...Electrical Input Power 195 265VAC 50 60 Hz 85VA max default 98 135VAC 50 60 Hz 85VA Optional Fuse rating 250 VAC 2 A Output Power 15VDC 5 2 7A Input Signal 0 5 000VDC for MFC 0 10 000VDC for Capacitan...

Страница 9: ...9 Chapter Two Installation Unpack Unpacking Check List IMC1300 Control Unit Manual this book Power Cable Optional Items...

Страница 10: ...10 Mounting Top View Front View Rear View Figure 1 Controller Dimensions 226 76 241 88 6 35 10 31 Slot Thru Type 208 87 190 208...

Страница 11: ...11 Cutting Size Figure 2 Cutting Size Dimension Installation Environment Operating Environmental Requirements 15 50 59 122 Chassis Grounding Cutting Size...

Страница 12: ...12 Control Applications Figure 3 Upstream Pressure Control...

Страница 13: ...IMC1300 Front Panel Page 14 Table 2 Figure 4 IMC1300 Front Panel Components Set point Display Actual Flow Display Key Pad 1000 3 1000 cc 4 1000 1000 cc 2 1000 1 1000 FLOW PRESSURE CONTROLLER IMC1300...

Страница 14: ...6 8 channel Scroll key 5 8 channel channel channel Flow On channel MENU ESC key Menu toggle key main Menu Sub menu Sub menu Scroll key Enter key Numeric key Flow Setting Range ON OFF ON OFF SET key Ch...

Страница 15: ...ure Control Card Interface Card TTL Flow On Off RS232C Serial Interface D Type Connector Figure 5 IMC1300 Rear Panel Components Channel Card Upstream Pressure Control Card Power On Off Switch TTL Flow...

Страница 16: ...ssignment Cable Color 1 No Connection 2 Flow or Pressure Signal Red 3 15VDC Supply Green 4 Power Ground Grey 5 15VDC Supply White 6 Set point Command Signal MFC only Orange 7 Signal Ground Brown 8 Sig...

Страница 17: ...le Color 1 No Connection 2 Pressure Signal Red 3 15 VDC Supply Green 4 Power Ground Grey 5 15 VDC Supply White 6 No Connection 7 Signal Ground Brown 8 Signal Ground Black 9 No Connection 9 pin D sub C...

Страница 18: ...On 5 On Ch5 Low On 6 On Ch6 Low On 7 On Ch7 Low On 8 On Ch8 Low On 9 Digital Ground 10 No Connection 11 No Connection 12 No Connection 13 No Connection 14 No Connection 15 No Connection 15 pin 3 D sub...

Страница 19: ...ut Pin No Assignment 1 No Connection 2 Transmit data 3 Receive data 4 No Connection 5 Digital Ground 6 No Connection 7 No Connection 8 No Connection 9 No Connection 9 pin D sub Connector male Table 5...

Страница 20: ...erial M1270212100 ISVT Co Ltd Made in Korea Model Number IMC1300 XXXX Y Z X Channel Card M MFC Control Card dual 2 channel B Pressure Display Card dual 2 channel O No Card Y Function card P Upstream P...

Страница 21: ...le Range Gas Zeroing Control Ratio Accumulation Gas Pressure Control Automatic Upstream Pressure Control System Setup Main Menu Main Display Default Set point Flow MENU ESC key Menu Switch MENU ESC To...

Страница 22: ...Menu Sub Menu Up Down scroll key key Cursor Sub Menu ENT key Main Menu Sub Menu List Zeroing Range Setup Ratio Accumulation Pressure Control System Setup Display Main Menu Zeroing Range Setup Ratio Ac...

Страница 23: ...low 0 Zero Shift Shift Zeroing ENT key Rear Panel Channel MFC Zeroing Success Sub Menu MFC Zeroing Channel MFC Zeroing key Channel 1 All key All 1 2 3 4 5 6 7 8 All Channel 2 ENT key 3 Success Sub Men...

Страница 24: ...Range Setup Sub Menu 2 Display ENT key Channel 1 MFC Range Unit Note Range 1000 3 MFC Range Unit CH1 MFC 1000 SCCM CH2 MFC 1000 SCCM CH3 MFC 1000 SCCM CH4 MFC 1000 SCCM Next Channels Exit Channel 1 S...

Страница 25: ...25 4 Range ENT key 5 Down scroll key key Cursor Unit key 1 SLM or 2 SCCM Range 139 sccm Range 100 sccm N2 Gas MFC Ar Gas Ar Gas Correction factor 1 39 1 Range 139 ENT 2 Unit SCCM ENT Sub Menu...

Страница 26: ...el control TTL TTL Signal Flow On Off RS232 PC Serial Interface control D Net 4 Control Mode Local 2 Sys BAUD Rate RS232C Serial Interface Baud rate 9600bps 19200bps 38400bps 57600bps 115200bps 5 Rate...

Страница 27: ...lay Digit 4 Digit 5 Digit 2 Rate 4 Digit 5 Digit 4 Digit MFC Display Resolution 1000 4 Digit 4 Display CHs MFC Display CHs MFC Total Display User Channel Display 4 CHs Default Default CHs 5 Sys Initia...

Страница 28: ...28 6 LCD Brightness 1 key 2 LCD Brightness DN KEY1 UP KEY2 ESC Cancel ENT Save...

Страница 29: ...ssure Controller Control Mode Local TTL RS232 3 Local mode Control Front Panel System Setup Main Menu System Setup Sys CTRL Mode Chapter Channel Display Flow Setting Flow On Off Channel Control Ratio...

Страница 30: ...el Board Check Channel Board 2 Channel 1 2 Channel Display 4 Channel 1 2 3 4 Channel Display 4 Channel 5 6 7 8 Channel Channel Display Cursor key Scroll 1 key 1 0000 0000 cc 2 0000 0000 cc 3 0000 0000...

Страница 31: ...31 2 key 1 0000 0000 cc 2 0000 0000 cc 3 0000 0000 cc 4 0000 0000 cc...

Страница 32: ...f IMC1300 Flow Pressure Controller key key key key Channel Flow Setting 1 SET key 2 Flow Setting Channel Channel 3 key Setting Enter 2 Channel Setting 100 Range 1000 1 0000 0000 cc 2 0100 0000 cc 3 00...

Страница 33: ...MFC On Gas Channel Channel Flow On 2 Channel Setting 100 Range 1000 Flow On 3 Channel Flow On Off ON OFF key ALL key ON ALL key 1 0000 0000 cc 2 0100 0100 cc 3 0000 0000 cc 4 0000 0000 cc 1 0000 0000...

Страница 34: ...r Channel MFC Slave MFC Master Channel Flow Slave Channel Control Ratio Setup Main Menu Ratio Setup Sub Menu Master Channel Slave Channel 3 Ratio mode ON Off User Ratio Setup Master CH 1 Slave CH Rati...

Страница 35: ...Menu 2 key Master Channel 2 3 key Slave Channel 4 key 3 ENT key ENT key 3 5 key 4 ENT key ENT key 4 5 key Ratio Mode 6 On key Off Ratio Control Master Slave 7 key Exit ENT key ESC key Ratio Setup 1 00...

Страница 36: ...Setting Slave Channel Full Scale Range 100 setting 1 MFC 3 Ratio Control MFC Full Scale Range Master 1000 sccm Slave 1 1000 sccm Slave 2 1000 sccm Slave 1 setting 500 sccm Slave 2 setting 250 sccm Mas...

Страница 37: ...ter 1000 sccm Slave 1 2000 sccm Slave 2 5000 sccm Slave 1 setting 1000 sccm Slave 2 setting 2500 sccm Master 1000 sccm Slave Ch MFC Master 500 sccm Slave 1 500 sccm Slave 2 1250 sccm 1 0000 0000 cc 2...

Страница 38: ...1 Main Menu Accumulation Sub Menu 2 ON key On ENT key Acc Time 3 ESC key Channel MFC Flow On 4 Accumulation Mode Acc Time Line Flow 5 0 Flow 2 3 Accumulation Ctrl Acc Mode Off Exit Key0 CLR Acc Time...

Страница 39: ...ck Pressure Control Card Sub Menu Pressure Control Setup Main Menu Pressure Control Sub Menu Automatic Upstream Pressure Control Setup 1 Gain key Gain 1 4 200 800 Pressure Control Overshoot 2 Phase Le...

Страница 40: ...splay C CHs None Pressure Control MFC 1 key C CHs 1 1 2 C CHs 2 12 Pressure Control MFC C CHs 1 1 1 key C CHs 1 Channel Channel 4 Mode On Off Cursor Mode ON key Off On Pressure Control Pressure Mode O...

Страница 41: ...500 1000 2000 5000 10000 20000 25000 Capacitance Manometer Range 100 mtorr Range 0 1 Display 100 00 mtorr 6 Zeroing Capacitance Manometer Zeroing MFC Shift Capacitance Manometer Display Resolution 5...

Страница 42: ...nnel Setup Menu Channel p p Channel MFC P CON MODE key Flow Mode 1 Pressure Setting key Pressure Setting ENT key 2 Flow On Off FLOW ON FLOW OFF key p Channel MFC On Off 3 Gain Phase Lead Control Chann...

Страница 43: ...al Mode TTL I O Flow On Off RS232 Serial PC Interface Interface Option TTL Flow On Off Option 15 pin 3 Monitor Connector Connector Flow On Off Connector Pin Assignment page 18 Table 5 TTL On Off Comma...

Страница 44: ...32C Serial PC Interface Option 9 pin Connector RS232C Interface Connector Pin Assignment page 19 Table 6 RS232C Serial Interface Connector Pin out 1 MENU ESC Main Menu System Setup Sys CTRL Mode 2 RS2...

Страница 45: ...pt READ Command which is beginning with B character All commands must begin sharp character and ending with the carriage return CR XXX YYYY CR XXX Command YYYY Parameter CR Carriage Return Value INVAL...

Страница 46: ...eturn Value 7 56 1byte data EX Host RA1 CR IMC1300 1000 0 CR Host RA2 CR IMC1300 1000 0 1000 0 CR Host RA5 CR IMC1300 1000 0 1000 0 1000 0 1000 0 1000 0 CR RS1 RS8 Read Set point Data Return Value 6by...

Страница 47: ...MS CR IMC1300 11001011 CR Return Value means that LSB11001011MSB is MFC Flow ON OFF Status Each bit means each Channel MSB is 8Ch and LSB is 1Ch 1 means MFC Flow ON and 0 mean MFC Flow OFF String 1100...

Страница 48: ...anged Set point is changed to Zero EX Host SR1 1000 CR IMC1300 OK CR CH1 Range set by 1000 SS1 SS8 Set Set point Return Value OK or Parameter Range Parameter means Set point Value Value is Range or le...

Страница 49: ...r Ch is Flow OFF Host SFA 11001010 CR IMC1300 OK CR SZ1 SZ8 Set Zero Return Value OK or EX Host SZ1 CR IMC1300 OK CR or FL CR OK means zero success FL means zero failed SU1 SU8 Set Unit Return Value O...

Страница 50: ...0 1 CR Return Value means 0 1 RPS Read Pressure control Set point Return Value 8byte data EX Host RPS CR IMC1300 100 0 CR Return Value means 100 RPU Read Pressure control Unit Return Value 6byte data...

Страница 51: ...Each bit indicate each Channel MSB is 8Ch and LSB is 1Ch Bit 1 mean Pressure control ON and Bit 0 mean Pressure control OFF Therefore 0 means that Ch5 Ch6 pressure control On and the other channel is...

Страница 52: ...K or Parameter 0 01 50000 Caution If Range is changed Set point is changed to Zero EX Host SPS 1 CR IMC1300 OK CR Pressure control CM range set 1 torr If Range small less than 1 torr Unit was set auto...

Страница 53: ...e means that 0 is equal to 0x30 hex value 0x30 hex is equal to binary MSB 00110000 LSB Each bit indicate each Channel MSB is 8Ch and LSB is 1Ch Bit 1 mean Pressure control ON and Bit 0 mean Pressure c...

Страница 54: ...se lead Time Return Value OK or Parameter 0 01 1 00 sec EX Host SPT 0 01 CR IMC1300 OK CR Pressure control phase lead Time is 0 01 sec SPZ Set Pressure Zero Return Value OK or FL Faliure Parameter Non...

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