ISVT IMC1300, Инструкция по эксплуатации, Страница: 50 / 54

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Upstream Pressure Control Command
<Pressure Read Command>
RPD
- Read Pressure Data
- Return Value : 8byte data
EX)
<Host> 'RPD<CR>'
<IMC1300> '0.1<CR>'
Return Value means 0.1
RPS
- Read Pressure control Set-point
- Return Value : 8byte data
EX)
<Host> 'RPS<CR>'
<IMC1300> '100.0<CR>'
Return Value means 100
RPU
- Read Pressure control Unit
- Return Value : 6byte data
EX)
<Host> 'RPU<CR>'
<IMC1300> 'mTorr<CR>' or ' Torr<CR>'
RPR
- Read Pressure control Range
- Return Value : 6byte data
EX)
<Host> 'RPR<CR>'
<IMC1300> ' 1000<CR>'