Inficon IMM-200, Руководство по эксплуатации

Страница: 38 / 67

8 | Maintenance and Calibration Procedures INFICON
38 / 67 074-733-P1A IMM-200 Operating Manual
Slight adjustment of density may be necessary in order to achieve T
x
= T
m
8.3 Determine Tooling
1 Place a test substrate in the system substrate holder.
2 Make a short deposition and determine the actual thickness.
3 Calculate tooling from the relationship shown in equation [2].
4 Round off percent tooling to the nearest 0.1%.
5 When entering the new value for tooling into the program, T
m
equals T
x
if
calculations are done properly.
Tooling (%) = TF
i
(T
m
/T
x
) [2]
where T
m
= Actual thickness at substrate holder T
x
= Thickness reading in IMM-200
TF
i
= Initial tooling factor
It is recommended that a minimum of three separate evaporations be made when
calibrating tooling. Variations in source distribution and other system factors will
contribute to slight thickness variations. An average value tooling factor should be
used for final calibrations.
8.4 Laboratory Determination of Z-Ratio
A list of Z-Ratio values for materials commonly used is available in Appendix A:
Material Table [
}
57]. For other materials, Z-Ratios can be calculated from the
following formula:
Z = (d
q
μ
q
/ d
f
μ
f
)
1/2
[3]
Z = 9.378x10
5
(d
f
μ
f
)
-1/2
[4]
where:
d
f
= density (g/cm
3
) of deposited film
μ
f
= shear modulus (dynes/cm
2
) of deposited film
d
q
= density of quartz (crystal) (2.649 g/cm
3
)
μ
q
= shear modulus of quartz (crystal) (3.32 x 10
11
dynes/cm
2
)
The densities and shear moduli of many materials can be found in a number of
handbooks listing physical properties of materials.