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074-733-P1A IMM-200 Operating Manual

2. The instrument is also connected to earth ground through the 24 V power cable.

The power supply is in turn connected to earth ground by the sealed three

conductor power cable, which must be plugged into a socket outlet with a

protective earth ground terminal. Extension cables must always have three

conductors including a protective earth terminal.

Whenever a user supplied power supply is used, the connector shield on the 24 V

power cable must be connected to the mains protective earth ground terminal

through the user supplied power supply.

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Содержание IMM-200

Страница 1: ...Operating Manual IMM 200 074 733 P1A ...

Страница 2: ...INFICON Two Technology Place East Syracuse NY 13057 9714 ...

Страница 3: ...tional Mounting Bracket Kit 17 4 6 Initial Power On Verification 19 5 Installation and Interfaces 21 5 1 Avoiding Electrical Interference 21 5 2 Connecting the Instrument 24 5 3 Indicators and Switches 24 5 3 1 Status LED 24 6 Special Features 26 6 1 Introduction 26 6 2 50 60 Hz Line Frequency 26 6 3 Start Stop Measurement 26 6 4 Crystal Type 27 6 5 Crystal Life and Starting Frequency 28 7 Etherne...

Страница 4: ...ooling 38 8 4 Laboratory Determination of Z Ratio 38 9 Troubleshooting and Error Messages 41 9 1 Troubleshooting 41 9 2 Troubleshooting Sensors 42 9 3 Troubleshooting Computer Communication 47 10 Measurement Theory 49 10 1 Basics 49 10 2 Monitor Crystals 50 10 3 Period Measurement Technique 52 10 4 Z Match Technique 53 10 5 Active Oscillator 53 10 6 ModeLock Measurement 56 11 Appendix A Material T...

Страница 5: ...eliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequential damages related to the use of this product Due to our continuing program of product improvements specifications are subject to change without notice Copyrights 2020 All rights reserved Reproduction or adaptation of any part of this document without permission is unlawfu...

Страница 6: ...2 Declaration of Conformity INFICON 6 67 074 733 P1A IMM 200 Operating Manual 2 Declaration of Conformity ...

Страница 7: ...iting of such non conformity specifying in reasonable detail the nature of such non conformity If Seller is not provided with such written notification Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED WHETHER OF MERCHA...

Страница 8: ...M 200 Operating Manual These instructions do not provide for every contingency that may arise in connection related to the installation operation or maintenance of this equipment Should you require further assistance please contact INFICON ...

Страница 9: ...called IMM 200 a power supply a sensor head containing a quartz crystal and software to communicate to IMM 200 This IMM 200 Operating Manual provides user information for installing programming and operating IMM 200 When reading the Operating Manual please pay particular attention to the Notes Cautions and Warnings found throughout the text The Notes Cautions and Warnings are defined in Definition...

Страница 10: ...reserved 102 reserved Frequency 4 5 MHz to 6 0 MHz Raw rate Measured rate updated every 100 ms expressed in Å s Rate filtered Raw rate value averaged over the rate filter time updated every 100 ms Thickness Calculated thickness expressed in kÅ updated once every 100 ms Deposition status 0 thickness maximum thickness 1 thickness maximum thickness 98 unknown 99 not in measure Activity 0 to 820 Cryst...

Страница 11: ...3 Plus Cable length 100 m LED Indicators Status Unit status Operating Environment Usage Indoor only Humidity Up to 85 RH non condensing Temperature 0 50 C 32 122 F Altitude Up to 2000 m Installation overvoltage Category II per IEC 60664 Pollution degree 2 per EN 61010 Storage temperature 10 60 C 14 140 F Cleaning Use a mild nonabrasive cleaner or detergent taking care to prevent the cleaner from e...

Страница 12: ...ncy when followed CAUTION Failure to heed these messages could result in damage to the instrument WARNING This symbol alerts the user to the presence of important operating and maintenance servicing instructions DANGER Immediate danger death or very severe injuries can occur DANGER Risk of Electric Shock Dangerous voltages are present which could result in personal injury 4 2 2 General Safety Info...

Страница 13: ...which is susceptible to transient power line voltages Disconnect power whenever making any interface connections Refer all maintenance to qualified personnel DANGER Risk of Electric Shock There are no user serviceable components within the IMM 200 case Potentially lethal voltages are present Refer all maintenance to qualified personnel ...

Страница 14: ...e conductors including a protective earth terminal If a user supplied power supply is used the power supply connector must have a shield which is grounded to AC line ground DANGER Warning of Electrical Shock Never interrupt the protective earth circuit Any interruption of the protective earth circuit inside or outside IMM 200 or disconnection of the protective earth terminal may cause dangerous vo...

Страница 15: ...t first speaking with a Customer Support Representative Obtain a Return Material Authorization RMA number from the Customer Support Representative If a package is sent to INFICON without an RMA number the package will be held and the sender will be contacted This will result in delays in servicing IMM 200 Prior to being given an RMA number a Declaration Of Contamination DOC form may need to be com...

Страница 16: ...ly kit 230 V with 4 5 m 14 8 ft power cord extension 961 021 G6 Power supply kit 230 V with 9 0 m 29 5 ft power cord extension 961 021 G7 Power supply kit IL 240 V 961 021 G8 Power supply kit IL with 4 5 m 14 8 ft power cord extension 961 021 G9 Power supply kit IL with 9 0 m 29 5 ft power cord extension 961 021 G10 Power supply kit UK 240 V 961 021 G11 Power supply kit UK with 4 5 m 14 8 ft power...

Страница 17: ...if the mounting bracket falls from a wall or ceiling onto a person In systems with a high amount of vibration using the optional mounting bracket with vibration isolating mounting feet will greatly reduce any influence vibration has on IMM 200 The optional mounting bracket with the neoprene mounting feet is shown below PN 785 201 G1 Item 1 shows the neoprene mounting feet 070 2104 item 2 is a stai...

Страница 18: ...t of IMM 200 and the mounting bracket approximately 0 68 kg 1 5 lbs NOTICE When mounting IMM 200 into a fixed position ensure there is enough room to disconnect the power cord when needed PN 070 2104 contains neoprene If you are mounting IMM 200 and the mounting bracket in a clean room and neoprene is not compatible with your clean room you can use the mounting bracket with stainless steel shock a...

Страница 19: ...and 4 carry 24 V dc pins 1 and 2 are ground Whenever a user supplied power supply is used the connector shield on the 24 V power cable must be connected to the mains protective earth ground terminal through the user supplied power supply If a good crystal is connected the Status LED illuminates and remains steadily on This status indicates proper operation of IMM 200 If a good crystal is not conne...

Страница 20: ...nstrument case There are no user serviceable components within the instrument case Dangerous voltages may be present whenever power is present Refer all maintenance to qualified personnel This symbol indicates where the protective earth ground is connected inside IMM 200 Never unscrew or loosen this connection ...

Страница 21: ...l enclosure covers sub panels and braces in place and fully secured with the screws and fasteners provided Verifying Establishing Earth Ground If ground must be established the following procedure is recommended Where soil conditions allow drive two ten foot copper clad steel rods into the ground six feet apart Pour a copper sulfate or a salt solution around each rod to improve the ground s conduc...

Страница 22: ...ound by the sealed three conductor power cable which must be plugged into a socket outlet with a protective earth ground terminal Extension cables must always have three conductors including a protective earth terminal Whenever a user supplied power supply is used the connector shield on the 24 V power cable must be connected to the mains protective earth ground terminal through the user supplied ...

Страница 23: ...re cases when a solid copper strap 0 8 mm thick x 25 4 mm wide 0 030 in x 1 in is required because of its lower RF impedance Minimizing Noise Pickup from External Cabling When IMM 200 is fully integrated into a deposition system there can be many wire connections Each connection is a potential path for electrical noise to reach the inside of IMM 200 The likelihood of these wires causing a problem ...

Страница 24: ...ables conforming to the Ethernet standard are required If a cable is not available one can be made according to the following instructions Cable type Ethernet shielded patch cable CAT5e quality or better with FCC68 connector Pin Assignment 8 1 Pin Signal Description 1 TD Transmission data 2 TD Transmission data 3 RD Receive data 4 nu Not used 5 nu Not used 6 RD Receive data 7 nu Not used 8 nu Not ...

Страница 25: ...re has been downloaded and passed the integrity check boot loader flash 3 0 5 second on 2 second off 5 second on 1 second off The firmware is invalid off The unit is in diagnostics mode or the unit has encountered an error or no power is applied to the device flash 1 second on 4 seconds off The unit is in idle mode blinking 1 second on 1 second off The unit is in Measure mode and a crystal failure...

Страница 26: ...mmand indicates to IMM 200 to either start measuring frequency or to stop measuring frequency The unit is placed into idle when the stop measurement command is sent This command is very useful when using a rotary sensor head Since IMM 200 does not control the indexing of the rotary head it has no way of knowing when a crystal switch is being performed Therefore whenever a crystal switch is done a ...

Страница 27: ...ial shape without an inversion These crystals have a stress coefficient that is equal and opposite to the stress coefficient of AT cut crystals In other words a tensile film deposited on BT cut crystals has a frequency shift in the opposite direction to that of the same film on AT cut crystals IT Cut Crystals Like SC cut crystals IT cut crystals are used in OCXOs oven controlled crystal oscillator...

Страница 28: ...cating 3 to 5 life spent is just as good as if not better than a crystal indicating 0 to 2 life spent As deposited material is added to the crystal the percent crystal life increases up to a maximum of 100 It is usually not possible to use a monitor crystal to 100 crystal life Normally a crystal is changed after a specific amount of crystal life is consumed Useful crystal life is dependent on the ...

Страница 29: ...s with a login dialog IMM 200 is shipped with both the username and password unset empty so leave them blank and click OK to login The IP address for IMM 200 is under Network Make sure that the IP address for the Remote Host under Channel 1 Connection is set to the same subnet as the new IP It is not used but the IP must be compatible If the IP address is unknown the easiest way to access the devi...

Страница 30: ...7 Ethernet Communications INFICON 30 67 074 733 P1A IMM 200 Operating Manual DEV ID set to 129 0x81 by slave for all Responses from slave PIDX ignored set to 0 ...

Страница 31: ...ystal Cut Type RQA 3 Request Write Value PID 308 DAT0 DAT3 0 00000001 BT cut Request 15 bytes 00000009030134000000000001178a Response 11 bytes 008101050401340000735b 7 4 3 Request Read Write Attribute Combination Message Set up request for several PID values to be returned together with the 703 Combination message The DATA section of the 703 message has the following format DAT0 N number of PIDs i...

Страница 32: ... DAT7 DAT8 234 Crystal Life DAT9 DAT10 231 Frequency Request 22 bytes 000000100702bf00000500cd00e600e900ea00e7d490 Response 11 bytes 008101050802bf0000c42c Send 703 Combination message Read Attribute Request for the data RQA 5 Request Read Attribute PID 703 Request 11 bytes 000000050102bf000028a8 Response 39 bytes 008101210202bf00000000001392054ec00000000100000065000000104155d21452d fc79f1969 Time...

Страница 33: ...me 113 x string 20 last byte always null Manufacturer Model Number 114 x string 20 last byte always null Firmware Revision 115 x string 20 last byte always null Hardware Revision 116 x string 15 last byte always null AC Line Frequency 150 x x U32 4 Sensor Module Status Unit Status 200 x U32 4 Timestamp 205 x U64 8 User Timer 206 x U64 8 Filtered Rate 207 x F64 8 Raw Rate 208 x F64 8 Thickness 209 ...

Страница 34: ...ter Time 306 x x F32 4 Crystal Cut Type 308 x x U32 4 Sensor Module Reset 404 x Default Parameters 405 x Calculate Checksum 406 x Zero Timer and Thickness 420 x Zero Thickness 421 x Zero Timer 422 x Stop Measuring 425 x Start Measuring 426 x Combination Commands 703 x x See notes Write Attribute Request Message contains list of PIDs Data Type U16 preceded by the number of PIDs in the list Data Typ...

Страница 35: ...0x8F50 0xFBEF 0xEA66 0xD8FD 0xC974 0x4204 0x538D 0x6116 0x709F 0x0420 0x15A9 0x2732 0x36BB 0xCE4C 0xDFC5 0xED5E 0xFCD7 0x8868 0x99E1 0xAB7A 0xBAF3 0x5285 0x430C 0x7197 0x601E 0x14A1 0x0528 0x37B3 0x263A 0xDECD 0xCF44 0xFDDF 0xEC56 0x98E9 0x8960 0xBBFB 0xAA72 0x6306 0x728F 0x4014 0x519D 0x2522 0x34AB 0x0630 0x17B9 0xEF4E 0xFEC7 0xCC5C 0xDDD5 0xA96A 0xB8E3 0x8A78 0x9BF1 0x7387 0x620E 0x5095 0x411C 0...

Страница 36: ...define CRC_INITIAL 0xFFFFu uint16_T CRC_u16InitCrc16 void return CRC_INITIAL uint16_T CRC_u16CalcCrc16 const uint8_T pu8Data const uint16_T u16CrcInit const uint16_T u16Len uint32_T u32Calc u16CrcInit uint32_T u32Dec u16Len while u32Dec u32Calc au16CrcTable u32Calc uint32_T pu8Data 0xFFu u32Calc 8 return uint16_T u32Calc bool_T CRC_bCheckCrc16 const uint8_T pu8Data const uint16_T u16CrcInit const ...

Страница 37: ...mination of Z Ratio 38 8 2 Determine Density The bulk density values retrieved in Appendix A Material Table 57 are sufficiently accurate for most applications Follow the steps below to determine density value ü Place a substrate with proper masking for film thickness measurement adjacent to the sensor so that the same thickness will be accumulated on the crystal and substrate 1 Set the density to ...

Страница 38: ...t is recommended that a minimum of three separate evaporations be made when calibrating tooling Variations in source distribution and other system factors will contribute to slight thickness variations An average value tooling factor should be used for final calibrations 8 4 Laboratory Determination of Z Ratio A list of Z Ratio values for materials commonly used is available in Appendix A Material...

Страница 39: ... film thickness with either a multiple beam interferometer or a stylus type profilometer 6 Using the density value from step 1 and the recorded values for Fco and Fc adjust the Z Ratio value in thickness equation 5 to bring the calculated thickness value into agreement with the actual thickness If the calculated value of thickness is greater than the actual thickness increase the Z Ratio value If ...

Страница 40: ... 1 is thin compared to material 2 use material 2 Z Ratio value for both materials 3 If the thickness of both materials is similar use the Z Ratio value of material 1 for material 1 and then use a value for Z Ratio which is the weighted average of the two Z Ratio values for deposition of material 2 and subsequent materials ...

Страница 41: ...sconnect power whenever making any interface connections Refer all maintenance to qualified personnel Troubleshooting IMM 200 SYMPTOM CAUSE REMEDY 1 The power ON LED is not illuminated a A circuit breaker is tripped b The power cord is unplugged from the wall or the back of IMM 200 c There is incorrect voltage a Have qualified personnel reset the circuit breaker b Reconnect the power cord c Have q...

Страница 42: ...to IMM 200 b There is poor electrical contact in the transducer the feedthroughs or the in vacuum cable c There is a failed crystal d There is no crystal e Two crystals are placed into the crystal holder f The frequency of the crystal is out of range a Use an ohmmeter or DVM to check the electrical continuity or isolation as appropriate b Use an ohmmeter or DVM to check the electrical continuity o...

Страница 43: ...ing attracted by the sensor magnet and contacting the crystal sputtering sensor head a Replace crystal or use an alloy crystal Consult the factory b Thermally condition the source thoroughly before deposition Use a shutter to protect the crystal during source conditioning c Clean and polish the crystal seating surface on the crystal holder Refer to the appropriate sensor manual d Check the crystal...

Страница 44: ...r a There is intermittent or poor electrical contact the contacts are oxidized b The leaf spring has lost retentivity ceramic retainer center insulator c There is RF interference from the sputtering power supply d The cables are not connected or are connected to the wrong input a Use an ohmmeter or DMM to check electrical continuity Replace the ceramic retainer b Bend the leaves to approximately 4...

Страница 45: ...re is too high b There is excessive heat input to the crystal c The crystal holder is not seated properly in the holder d There is crystal heating caused by a high energy electron flux often found in RF sputtering e There is poor thermal transfer from the water tube to the body CrystalSix f There is poor thermal transfer a Check the cooling water flow rate The cooling water temperature must be les...

Страница 46: ...y maintaining consistent sweep frequencies sweep amplitudes and electron beam position settings c Make certain the crystal surface is clean Avoid touching the crystal with fingers Make use of an intermediate adhesion layer d Make certain the source sweep frequency is not beating with the IMM 200 measurement frequency 7 There is a large drift in thickness greater than 200 Å for a density of 5 00 g ...

Страница 47: ... mm 0 00225 in diameter orifice is not installed on the supply side of solenoid valve assembly CrystalSix or Crystal12 sensors a Program a relay b Ensure the air supply is regulated at 80 90 psi c Clean material accumulation as needed d Refer to the sensor operating manual for the alignment procedure e Install the orifice as shown in the CrystalSix or Crystal 12 Operating manual 9 3 Troubleshootin...

Страница 48: ...erating Manual Symptom Cause Remedy c Verify that the IP address and submask in IMM 200 match the information in the computer 2 There is an incomplete or erroneous response There is an incorrectly formatted message Verify that the communication message is formatted correctly ...

Страница 49: ...d Lostis 3 that the change in frequency F Fq Fc of a quartz crystal with coated or composite and uncoated frequencies Fc and Fq respectively is related to the change in mass from the added material Mf as follows Mf Mq F Fq 1 where Mq is the mass of the uncoated quartz crystal Simple substitutions lead to the equation that was used with the first frequency measurement instruments Tf K F df 2 where ...

Страница 50: ... anharmonics they are a combination of the thickness shear and thickness twist modes The response at about three times the frequency of the fundamental is called the third quasiharmonic There are also a series of anharmonics slightly higher in frequency associated with the quasiharmonic The monitor crystal design depicted above is the result of several significant improvements from the square crys...

Страница 51: ...in an unwanted oscillation is substantially reduced The use of an adhesion layer has improved the electrode to quartz bonding reducing rate spikes caused by micro tears between the electrode and the quartz as film stress rises These micro tears leave portions of the deposited film unattached and therefore unable to participate in the oscillation These free portions are no longer detected and the w...

Страница 52: ...cy equal to 2 Fr where Fr is the reference oscillator s frequency The monitor crystal period is n Fr m where n is the number of counts in the second accumulator The precision of the measurement is determined by the speed of the reference clock and the length of the gate time which is set by the size of m Increasing one or both of these parameters leads to improved measurement precision Having a hi...

Страница 53: ...lts in a time frame that was practical for process control To achieve this new level of accuracy it requires only that the user enter an additional material parameter Z for the film being deposited This equation has been tested for a number of materials and has been found to be valid for frequency shifts equivalent to Ff 0 4Fq Keep in mind that equation 2 was valid to only 0 02Fq and equation 3 wa...

Страница 54: ...slope is less steep any noise in the oscillator circuit translates into a greater frequency shift than that which would be produced with a new crystal In the extreme the basic phase frequency shape is not preserved and the crystal is not able to provide a full 90 degrees of phase shift The impedance Z is also noted to rise to an extremely high value When this happens it is often more favorable for...

Страница 55: ...3 P1A IMM 200 Operating Manual 55 67 happened except that the film thickness is suddenly apparently thinner by an amount equivalent to the frequency difference between the fundamental and the anharmonic that is sustaining the oscillation ...

Страница 56: ...int At frequencies well below the fundamental the crystal impedance is capacitive and at frequencies slightly higher than resonance it is inductive in nature This information is useful if the resonance frequency of a crystal is unknown A quick sweep of frequencies can be undertaken until the output of the phase comparator changes marking the resonance event For AT crystals we know that the lowest ...

Страница 57: ...io Material Name Ag 10 500 0 529 silver AgBr 6 470 1 180 silver bromide AgCl 5 560 1 320 silver chloride Al 2 700 1 080 aluminum Al2 O3 3 970 0 336 aluminum oxide Al4 C3 2 360 1 000 aluminum carbide AlF3 3 070 1 000 aluminum fluoride AlN 3 260 1 000 aluminum nitride AlSb 4 360 0 743 aluminum antimonide As 5 730 0 966 arsenic As2 Se3 4 750 1 000 arsenic selenide Au 19 300 0 381 gold B 2 370 0 389 b...

Страница 58: ...00 parlyene union carbide Ca 1 550 2 620 calcium CaF2 3 180 0 775 calcium fluoride CaO 3 350 1 000 calcium oxide CaO SiO2 2 900 1 000 calcium silicate 3 CaSO4 2 962 0 955 calcium sulfate CaTiO3 4 100 1 000 calcium titanate CaWO4 6 060 1 000 calcium tungstate Cd 8 640 0 682 cadmium CdF2 6 640 1 000 cadmium fluoride CdO 8 150 1 000 cadmium oxide CdS 4 830 1 020 cadmium sulfide CdSe 5 810 1 000 cadmi...

Страница 59: ... copper II sulfide Dy 8 550 0 600 dysprosium Dy2 O3 7 810 1 000 dysprosium oxide Er 9 050 0 740 erbium Er2 O3 8 640 1 000 erbium oxide Eu 5 260 1 000 europium EuF2 6 500 1 000 europium fluoride Fe 7 860 0 349 iron Fe2 O3 5 240 1 000 iron oxide FeO 5 700 1 000 iron oxide FeS 4 840 1 000 iron sulfide Ga 5 930 0 593 gallium Ga2 O3 5 880 1 000 gallium oxide beta GaAs 5 310 1 590 gallium arsenide GaN 6...

Страница 60: ... sesquioxide In2 Se3 5 700 1 000 indium selenide In2 Te3 5 800 1 000 indium telluride InAs 5 700 1 000 indium arsenide InP 4 800 1 000 indium phosphide InSb 5 760 0 769 indium antimonide Ir 22 400 0 129 iridium K 0 860 10 189 potassium KBr 2 750 1 893 potassium bromide KCl 1 980 2 050 potassium chloride KF 2 480 1 000 potassium fluoride KI 3 128 2 077 potassium iodide La 6 170 0 920 lanthanum La2 ...

Страница 61: ...m boride MoO3 4 700 1 000 molybdenum trioxide MoS2 4 800 1 000 molybdenum disulfide Na 0 970 4 800 sodium Na3 AlF6 2 900 1 000 cryolite Na5 Al3 F14 2 900 1 000 chiolite NaBr 32 00 1 000 sodium bromide NaCl 2 170 1 570 sodium chloride NaClO3 2 164 1 565 sodium chlorate NaF 2 558 1 645 sodium fluoride NaNO3 2 270 1 194 sodium nitrate Nb 8 578 0 492 niobium Nb2 O3 7 500 1 000 niobium trioxide Nb2 O5 ...

Страница 62: ...e PbSe 8 100 1 000 lead selenide PbSnO3 8 100 1 000 lead stannate PbTe 8 160 0 651 lead telluride Pd 12 038 0 357 palladium PdO 8 310 1 000 palladium oxide Po 9 400 1 000 polonium Pr 6 780 1 000 praseodymium Pr2 O3 6 880 1 000 praseodymium oxide Pt 21 400 0 245 platinum PtO2 10 200 1 000 platinum oxide Ra 5 000 1 000 radium Rb 1 530 2 540 rubidium Rbl 3 550 1 000 rubidium iodide Re 21 040 0 150 rh...

Страница 63: ...de SnTe 6 440 1 000 tin telluride Sr 2 600 1 000 strontium SrF2 4 277 0 727 strontium fluoride SrO 4 990 0 517 strontium oxide Ta 16 600 0 262 tantalum Ta2 O5 8 200 0 300 tantalum V oxide TaB2 11 150 1 000 tantalum boride TaC 13 900 1 000 tantalum carbide TaN 16 300 1 000 tantalum nitride Tb 8 270 0 660 terbium Tc 11 500 1 000 technetium Te 6 250 0 900 tellurium TeO2 5 990 0 862 tellurium oxide Th...

Страница 64: ...86 uranium dioxide V 5 960 0 530 vanadium V2 O5 3 360 1 000 vanadium pentoxide VB2 5 100 1 000 vanadium boride VC 5 770 1 000 vanadium carbide VN 6 130 1 000 vanadium nitride VO2 4 340 1 000 vanadium dioxide W 19 300 0 163 tungsten WB2 10 770 1 000 tungsten boride WC 15 600 0 151 tungsten carbide WO3 7 160 1 000 tungsten trioxide WS2 7 500 1 000 tungsten disulfide WSi2 9 400 1 000 tungsten silicid...

Страница 65: ...nual 65 67 Formula Density Z Ratio Material Name ZnSe 5 260 0 722 zinc selenide ZnTe 6 340 0 770 zinc telluride Zr 6 490 0 600 zirconium ZrB2 6 080 1 000 zirconium boride ZrC 6 730 0 264 zirconium carbide ZrN 7 090 1 000 zirconium nitride ZrO2 5 600 1 000 zirconium oxide ...

Страница 66: ......

Страница 67: ...074 733 P1A 2020 ...

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