Inficon 560-319, Перевод оригинальной инструкции по эксплуатации

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Installation
5.4 Installing the GROSS throttle flange on the connection block
1
Remove the blank flange from one of the GROSS ports of the connection block.
2
Remove the protective cover from the GROSS throttle flange.
3
Attach the GROSS throttle flange with the centering ring on the GROSS port and
attach with the clamping ring.
5.5 Installation of the pressure sensor PSG500
The pressure sensor is included in the delivery scope of the LDS3000.
1
Remove the blank flange on the second FINE connection of the connection block.
2
Attach the pressure sensor PSG500 on the FINE connection with the centering
ring.
3
If the second GROSS connection of the connection block is open, close the con-
nection with a blank flange.
5.6 Creating hose connections
See also Fig. 1 : „Connection diagram of XL Sniffer Adapter set, LDS3000, backing
pump, PSG500“ auf Seite 10 .
► Connect the "HIGH FLOW" output of the XL Sniffer Adapter with "XL HIGH
FLOW" input of the backing pump.
► Connect the "LOW FLOW" output of the XL Sniffer Adapter with the filter of the
FINE throttle flange: Screw the hose installed on the XL Sniffer Adapter onto the
filter on the FINE throttle flange with a luer lock connection.
► Connect the FINE throttle flange on the LDS3000 with the "FINE" connection of
the backing pump. For details on this work step, refer to the operating instructions
provided by the manufacturer of the backing pump.
► Connect the GROSS throttle flange on the LDS3000 with the "GROSS" connec-
tion of the backing pump. For details on this work step, refer to the operating in-
structions provided by the manufacturer of the backing pump.
5.7 Creating data connections
See also Fig. 1 : „Connection diagram of XL Sniffer Adapter set, LDS3000, backing
pump, PSG500“ auf Seite 10 .
► Replace the data cable between the MSB box and the turbo molecular pump
1
Open the cable tie above the MSB box.