Description
11
The sniffer line belonging to the XL Sniffer Adapter is the SL3000XL.
FINE throttle flange
The FINE throttle flange is on the "FINE Sniffer" connection and is the connection to
the LOW FLOW connection of the XL Sniffer Adapter. It also includes the connection
to the FINE input of the backing pump.
GROSS throttle flange
The GROSS throttle flange is on the "GROSS FOREPUMP" connection and con-
nects the backing pump with the LDS3000.
Pressure sensor PSG500
The pressure sensor PSG500 is on the second FINE connection.
TMP
"TMP" is the abbreviation for turbo molecular pump.
MSB
"MSB" is the term for the connection block.
4.3
XL Sniffer Adapter
a
Connection SL3000XL, connection for the sniffer line on the front
b
The Status LED indicates the status of the XL Sniffer Adapter. A permanently lit status LED
shows that the XL Sniffer Adapter is supplied with voltage.
Fig. 2
XL Sniffer Adapter - Front view
XL Sniffer Adapter
a
b
