Inficon 550-300A, Руководство по эксплуатации

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Error Messages and Warnings
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E54
Temperature of the electronic
unit is too high! (60°C)
Ambient temperature is too high.
Unfavourable placement of the leak test device. (heat accumulation)
Fan failure
Air filter very soiled;
Defective temperature sensor
W55
Temperature of electronic unit is
too low (<2°C).
Temperature sensor on the wiring backplane shows that T<2 °C. Longer warm up
period of the ext. of the ext. booster pump!
Ambient temperature too low
Temperature sensor is defective.
E56 Inlet pressure p1 too low!
Output voltage Pirani p1 U < 0.27 V.
Pirani Sensor p1 defective.
Electronic unit of Pirani on E/A board defective.
Cable connection defective.
E58 Foreline pressure p2 too low!
Output voltage Pirani p2 U < 0.27 V;
Pirani Sensor p1 defective.
Electronic unit of Pirani on E/A board defective.
Cable connection defective.
E60
p2>10 mbar after 5 minutes
since power on
p2 > 10 mbar after t >5 minutes after switching on the leak test equipment.
Ending pressure of the booster pump is too high.
Leak in the high vacuum system of pre-vacuum connection.
Fore-pump is faulty.
Valve V2 does not open because the speed rate of 6 Hz for TMh 071 is not
exceeded.
Pressure measurement is incorrect
E61 Emission failed.
Emission should be switched on. MSV subassembly indicates a fault. MENB
emission current not within range.
Both cathods are defective. Replace the ion source.
Connector of ion source is not plugged in.
MSV board is defective.
W62
Flow through capillary to low.
Possibly,leaks cannot be
detected.
The intake pressure of the sniffer line is monitored in the sniffer mode. If the
pressure drops below a minimum value, the flow through the capillaries is too low.
The minimum value can be set within certain limits via the menu. The default value
is 0.06 mbar.
Filter is blocked in the filter tip
Sinter filter is contaminated in the filter tip
Capillaries are blocked by penetrating contamination.
Lower pressure limit is too high.
E63 Capillaries are broken
The intake pressure of the sniffer line is monitored in sniffer mode. If the pressure
exceeds a specified maximum, the gas flow through the capillaries is too high. The
maximum value can be set within certain limits via the menu. The default value is
2.0 mbar.
Capillaries are broken or torn.
Upper pressure limit too low
No. Displayed Message Description and possible solutions