Inficon 550-300A, Руководство по эксплуатации

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10-4
Error Messages and Warnings
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E44 Cathode current is too low!
Signal MPKZN on MSV board is active. Cathode current is too low, I < 0.2 A.
MSV board is defective.
Defective ion source plug or cable.
W45
Emission for cathode 1 can not
be switched on.
Signal MSIBE on MSV board is not active. Emission of cathode 1 cannot be
switched on. The Module 1000 switches over to cathode 2. Order new ion source.
Cathode 1 is defective
Defective ion source plug or cable.
MSV board is defective.
W46
Emission of cathode 2 cannot
be switched on.
Signal MSIBE on MSV board is not active. Emission for cathode 2 cannot be
switched on. The Module 1000 switches over to cathode 1. Order new ion source.
Cathode 2 is defective
Defective ion source plug or cable.
MSV board is defective.
E47
Emission on both cathodes
cannot be switched on!
Signal MSIBE on MSV board is not active. Emission on both cathodes cannot be
switched on! After having exchanged the ion source it must be possible to switch
on both cathodes manually via the service menu.
Both cathods are defective. Replace the ion source.
Defective ion source plug.
MSV board is defective.
W49
Several specimens in
succession are defective!
Execute reference
measurement.
Leak test device detects several defective specimens in succession.
Check the setting, for which number of pieces the error is reported.
Background signal has been increased very high.
Repeat the reference measurement.
E50
No communication with turbo
pump.
No communication with drive electronic unit TC 600.
Fuse F10 on wiring backplane has blown.
Connector RS 485 on cross wiring backplane or electronic drive control TMH 071
nit plugged.
Electronic drive control TC 600 defective, replace TMH 071
MC 68 is defective
E52
Turbopump frequency is too
low!
The speed of the turbomolecular pump TMH 071 is too low after a 5 min. starting
period.
Prepressure of TMH 071 is too high
Turbo molecular pump TMH 071 is faulty.
Electronic drive control TMH 600 is faulty.
W53
Temperature of the electronic
unit is too high! (55°C)
Ambient temperature is too high.
Unfavourable placement of the leak test device. (heat accumulation)
Fan failure
Air filter very soiled;
Defective temperature sensor
No. Displayed Message Description and possible solutions