Inficon 550-300A, Руководство по эксплуатации

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Maintenance tasks
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7.3 Maintenance schedule
Legend for the Maintenance
Schedule
• IService segment ICustomer
• IIService segment IICustomer with INFINICON training
• IIIService segment IIIauthorized INFICON service technician
• XPerform maintenance work according to operating hours or time
• X
1
Perform maintenance work according to operating hours
• X
2
Perform maintenance work according to time
• 1 depending on the environment and use
• 2 Relevant to the process
7.4 Maintenance intervals
The maintenance schedule for the Modul1000 can be subdivided in 4 maintenance
groups.
• 1500 hours maintenance
• 5000 hours maintenance
• Maintenance every two years
Assembly Maintenance tasks Operating hours/Years Service
segment
Spare
Modul1000
1500 5000 15000
Part No.
1/4 1 2 3
Vacuum system
Valve block Clean the valves, replace seals for valves X
1
III 200000594
Take apart the valve bloc and clean it X
1
III 200002002
Replace the filter of the flood gas line 1 X
1
I, II,III 200000683
Adjust the Pirani X III
Recalibrate the internal test leak X
2
TMH 071 Replace the lubricant reservoir X
2
I, II and III 200000577
Change the bearings (recommended) X
2
III
Electric
Fans assembly Replace the filter inserts of the cover 1 X
1
I 200001552
Clean the fan, chassis and turbo-molecular
pump 1 X
1
I