Inficon 550-300A, Руководство по эксплуатации

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5-1
Working Modes
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5 Working Modes
There are the following vacuum modes:
• Vacuum,
• Commander,
• Auto Leak Test.
In this operating mode, it is possible to use a partial flow pump.
The sniffer version of the Modul1000 also provides the operating mode:
• Sniff.
5.1 Vacuum
In standard Vacuum mode, the Modul1000 id operated as „Stand Alone“ leak detec-
tor.
The unit under test or the vacuum chamber are only evacuated via the inlet flange of
the leak detector. The pumping speed on the inlet of the leak detector depends on
the used fore-vacuum pump and on the conductivity ratios of the device.
If the pressure is lower than 0.4 mbar, the device will switch over to the Measuring
mode and display the measured leak rate.
When measuring, the pumping speed at the inlet is 2.5 l/s.
The effective pumping speed at your chamber is dependent on the integration of the
Modul1000.