Inficon 550-300A, Руководство по эксплуатации

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10-6
Error Messages and Warnings
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W64 Pre-amplifier signal is too high.
In the most insensitive measurement range the pre-amplifier signal has exceeded
10 V for 10 s.
Strong helium contamination of the high-vacuum system.
The pre-amplifier is faulty.
High contamination in the mass spectrometer.
E68 TMP frequency too low!
TMP frequency of nominal speed dropped in sniffer mode.
Sniffer not connected!
Sniffer line leaky.
Frequency converter is faulty. Replace TMH 071.
W69
Signal difference between test
leak and air too small!
Signal difference between test leak and < 2 x 10E-14 A.
Incorrect operation during calibration
Test leak too low!
Test leak is empty.
W70
Supply voltage
+/-15 V too low.
DC/DC converters on the MSV board generate to low output voltages.
Fuse F3 on the MSV board is defective.
DC/DC transformer on MSV board is defective.
Jumpers for DC/DC transformer on the MSV board are incorrectly plugged.
W71
Supply voltage
+/-15 V too high.
DC/DC converters on the MSV board generate to high output voltages.
DC/DC transformer on MSV board is defective.
E73 Emission off (p2 too high)
The emission is switched off when the pressure is p2 > 22 mbar
If the pressure decreases after the intake valve has been closed, the leak test
device goes back to the stand-by mode.
Air penetration during the measuring mode.
Polluted valves
W75
Maximum of evacuation time of
100 mbar was exceeded.
The pressure limit of 10 mbar was not reached within the set evacuation time .
Test sample has got a GROSS leak.
The evacuation time is incorrectly adapted to the sample volume.
W76
The maximum evacuation time
until the measuring mode was
exceeded.
The pressure limit of 0.4 mbar was not reached within the set evacuation time .
Test sample has got a GROSS leak.
The evacuation time is incorrectly adapted to the sample volume.
W77 Peak not in Range
The signal maximum could not be detected within the mass calibration range. The
signal maximum has shifted to mass range alignment limits.
Incorrect basic setting of the anode voltage. Perform a manual mass calibration
and reset the anode voltage via service menu .
Leak rate signal was unstable during the mass calibration. Calibrate again.
Wrong or incorrect test leak. Check internal test leak and repeat the calibration
with the external test leak.
W78
Differences of signal between
open and closed test leak is too
low.
Amplifier-voltage difference between the open and closed test leak is
d
2 x 10E-
14 A.
Internal test leak is defective.
The external test leak valve is defective or not closed.
No. Displayed Message Description and possible solutions