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Exicor 150AT User Manual 77
Performance Specifications
Retardation Range: 0 – 316 nm
Retardation
Repeatability
(1)
:
Regular Speed: ±0.01 nm (Re
≤
1 nm), otherwise ±
1%
High Speed: ±0.03 nm (Re
≤
3 nm), otherwise ± 1%
Background Noise level
(2)
(without sample):
Regular Speed: 0.01 nm
High Speed: 0.03 nm
Fast Axis Repeatability
(1)
: ±0.1° at Re > 1 nm
Measurement Time:
Regular Speed: ~ 0.5 seconds per data point
(depends on step size)
High Speed: 100 points/second MAX (not including
data communication time)
(1)
Repeatability Conditions :
•
Standard system. Options such as different spot sizes will change the
repeatability specifications
•
Repeatability = the 3
σ
value from 100 sequential measurements is less than the
specified value
•
System tests performed in a laboratory environment (temperature 18-24°C,
stable to within 1°C/hour)
•
Sample in a fixed position
•
Machine stabilized for 1 hour with auto-offset time interval of 5 minutes
•
Testing material: Polished, parallel-face optical element
(2)
Noise Floor Conditions:
•
Standard system. Options such as different spot sizes will change the noise
floor specifications
•
Definition: the average of 100 sequential measurements with no sample in the
light beam
•
System tests performed in a laboratory environment (temperature change <1ºC
during for one hour prior to and during measurement)
•
Machine turned-on for minimum of 1 hour before test with auto-offset time
interval of 5 minutes