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Granville-Phillips

®

 Micro-Ion

®

 

E

Vacuum Gauge Module with
Analog or RS–232 Output

Instruction manual part number 354011E

Revision A - October 2013

Series 354

Instruction Manual

Customer Service/Support

For customer service within USA, 8 AM to 5 PM
Mountain Time Zone, weekdays excluding holidays:

Granville-Phillips

6450 Dry Creek Parkway
Longmont, CO  80503 USA

Phone:

+1-800-776-6543

Phone:

+1-303-652-4400

FAX:

+1-303-652-2844

Email:

[email protected]

Brooks Automation, Inc.

15 Elizabeth Drive
Chelmsford, MA  01824 USA

Phone:

+1-978-262-2400

For customer service, 24 hours per day, 7 days per week,
every day of the year including holidays within the USA:

Phone: +1-800-367-4887

www.brooks.com

Содержание Micro-Ion 354 E Series

Страница 1: ...Instruction manual part number 354011E Revision A October 2013 Series 354 Instruction Manual Granville Phillips Micro Ion E Vacuum Gauge Module with Analog or RS 232 Output...

Страница 2: ......

Страница 3: ...800 776 6543 Phone 1 303 652 4400 FAX 1 303 652 2844 Email co csr brooks com Brooks Automation Inc 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 1 978 262 2400 For customer service 24 hours per da...

Страница 4: ...og Output or RS 232 Digital Interface Catalog Numbers for Series 354 Micro Ion Modules CE Marked Power supply and cable are not included Analog Output 354001E Y D T RS 232 Interface 354010E Y D T Fila...

Страница 5: ...upply 13 Wiring for Analog Module 14 Wiring for RS 232 Module 15 Grounding 15 2 4 Eliminating Radio Frequency Interference 16 Chapter 3 Operation Overview 17 3 1 Analog versus RS 232 Operation Procedu...

Страница 6: ...ge ON OFF Status 31 RD Read Vacuum Pressure 32 N2 or Air Pressure 32 Correction Factor 32 SO Set Overpressure Limit 33 RST Reset Module to Programmed Values 33 RS Read Module Status 33 VER Read Firmwa...

Страница 7: ...operation Chapter 5 explains RS 232 module operation Chapter 6 explains troubleshooting Micro Ion E gauge testing removal and replacement and module return procedures Appendix A provides specification...

Страница 8: ...nstructions Read instructions Read all instructions before installing or operating the product Follow instructions Follow all installation operating and maintenance instructions Retain instructions Re...

Страница 9: ...u if the hazardous materials document is required When returning equipment to Brooks Automation Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules...

Страница 10: ...10 Micro Ion E Module Instruction Manual 354011 Rev A...

Страница 11: ...lation Procedure The module installation procedure includes the following steps 1 Locating the module 2 Attaching the module vacuum chamber fitting to its mate on the vacuum chamber 3 Assembling and c...

Страница 12: ...ondensing or 85 C 185 F non operating Bakeout temperature with the electronics removed from the module is 200 C 392 F Locate the module away from internal and external heat sources and in an area wher...

Страница 13: ...ogether b Seal the O ring Step 3 Assemble and connect wiring Connecting Cable Cable is user supplied Brooks Automation Granville Phillips does not supply cable Install externally shielded cable Connec...

Страница 14: ...gative connection for 24 Vdc power supply 2 Power supply input Positive connection for 24 Vdc power supply 4 Analog output Analog output produces a 0 to 10 Vdc output in linear proportion to the logar...

Страница 15: ...RS 232 digital communication Pins 2 3 and 5 connect to computer communication port 2 RS 232 RDX 3 RS 232 common 5 Not used Reserved 4 Not used Reserved 6 Not used Reserved 7 24 Vdc power supply input...

Страница 16: ...ud on the vacuum chamber Figure 2 4 Vacuum Chamber Ground Connection 2 4 Eliminating Radio Frequency Interference The module has been tested and found to comply with U S Federal Communications Commiss...

Страница 17: ...g the switches installed between wiring pins 1 and 2 Micro Ion E gauge ON OFF and reading Micro Ion E gauge ON OFF status Table 3 1 lists tasks that may be performed if the module has an analog output...

Страница 18: ...eration Command Task Instructions UNL Unlock interface functions Page 27 TLU Toggle functions to locked or unlocked state Page 28 SB Set baud rate Page 28 FAC Reset values to factory defaults Page 30...

Страница 19: ...s that is being used You may use a switch installed between pins 1 and 2 on the module 9 pin connector to turn the Micro Ion E gauge ON or OFF 4 2 Preparing to Operate the Module Before putting the mo...

Страница 20: ...OFF To turn the Micro Ion E gauge OFF and ON install a switch between pins 2 24 Vdc power ground and 1 gauge ON OFF on the 9 pin connector as illustrated in Figure 4 1 Close the switch to turn the gau...

Страница 21: ...a voltage and pull up resistor to monitor the ON OFF status of the Micro Ion E gauge Output is low sink when the Micro Ion E gauge is ON Output is high source when the Micro Ion E gauge is OFF Figure...

Страница 22: ...air you must apply a correction factor to determine the actual pressure for the gas that is being used N2 or Air Pressure The 0 to 10 Vdc output is in linear proportion to the logarithm of vacuum pres...

Страница 23: ...ed pressure for N2 or air is 5 x 10 5 pressure units the correction factor is 0 30 and the actual pressure of the neon is 1 67 x 10 4 pressure units 4 8 Overpressure Limit The Micro Ion E gauge shuts...

Страница 24: ...24 Micro Ion E Module Instruction Manual 354011 Rev A...

Страница 25: ...figure the module 5 2 Preparing to Operate the Module Before putting the module into operation you must install the module in accordance with the instructions on pages 11 16 If you need application as...

Страница 26: ...nd FAC command to reset communication values to factory defaults see page 30 Re send set unlock or toggle command Return module to factory see page 40 SYNTX ER Command was improperly entered Module do...

Страница 27: ...ration is 9600 baud eight bits one stop bit no parity 5 6 RS 232 Command Set Table 5 2 lists RS 232 commands for the Micro Ion E module UNL Unlock Interface Functions In default operating mode some in...

Страница 28: ...00 baud Example SB command from host SB2400 Response from module PROGM OK Valid values are 1200 2400 4800 9600 default or 19200 baud The module communicates in half duplex mode Neither the module nor...

Страница 29: ...to calculate the total response time for each task listed in Table 5 5 Table 5 5 Response Time per Command Type Command Response Time in msec Time H IGS read Micro Ion E gauge status 3 3 msec RD read...

Страница 30: ...to 5 x 10 3 Torr 6 66 x 10 1 Pa 6 66 x 10 3 mbar you must send the ion gauge on IG1 command to turn the Micro Ion E gauge ON and enable pressure readings IG1 command from host IG1 Response from modul...

Страница 31: ...Micro Ion E gauge is OFF and the module will return a 9 99E 09 error response to the RD read pressure command The status LED indicates the operating status of the Micro Ion E gauge Figure 5 2 illustra...

Страница 32: ...lue is not a valid representation of pressure see page 38 Correction Factor If the process gas is a gas other than N2 or air use the following equation and the correction factors listed in Table 5 8 t...

Страница 33: ...d baud rate and overpressure limit to the module non volatile memory NVRAM RST command from host RST Response from module None Sending the RST command has the same effect as cycling power to the modul...

Страница 34: ...t represents the Granville Phillips internal part number and firmware version for the module The example response indicates the internal part number is 16497 and the firmware version is 01 VER command...

Страница 35: ...ce If the module requires repair Phone 1 303 652 4400 or 1 800 776 6543 within the USA or Email co csr brooks com For Global Customer Support go to www brooks com and click on Service to locate the Br...

Страница 36: ...product damage or personal injury due to electrical shock or fire Install only those replacement parts that are specified by Brooks Automation Granville Phillips Do not install substitute parts or per...

Страница 37: ...utput cable is improperly connected or faulty If conductance is inadequate reconnect port to a larger conductance port on the vacuum chamber or install larger conductance plumbing see page 12 If plumb...

Страница 38: ...emory NOVRAM Send FAC command to reset communication values to factory defaults see page 30 Re send set unlock or toggle command Return module to factory see page 40 SYNTX ER Command was improperly en...

Страница 39: ...urement associated with vacuum leaks or adsorbed gases within the gauge 1 Shut OFF power to the module 2 Remove the 9 pin subminiature D connector from the module 3 Remove the module from the vacuum c...

Страница 40: ...easure the resistance across the grid pins The reading should be approximately 0 9 Measure the resistance of the grid pins to the gauge case The reading should be infinity 10 Measure the resistance of...

Страница 41: ...dvise you if the hazardous materials document is required When returning equipment to Brooks Automation Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and...

Страница 42: ...Chapter 6 42 Micro Ion E Module Instruction Manual 354011 Rev A...

Страница 43: ...s the pressure at which the Micro Ion E gauge shuts OFF with increasing pressure Torr 1 x 10 2 Pa 1 33 x 10 2 mbar 1 33 X ray Limit X ray limit is the absolute lowest indication from the gauge It is n...

Страница 44: ...vacuum pressure exceeds 1 x 10 2 Torr 1 33 Pa 1 33 x 10 2 mbar output indicates pressure value of 9 99E 09 Pressure Measurement unit Torr Interface RS 232 two wire half duplex Communications Format A...

Страница 45: ...D male Power Requirements 24 Vdc 15 12 W maximum Physical Specifications Weight 340 g 12 oz Case Material Powder coated extruded aluminum Materials Exposed to Vacuum 304 stainless steel tantalum tungs...

Страница 46: ...46 Micro Ion E Module Instruction Manual 354011 Rev A...

Страница 47: ...ament is heated to such a temperature that electrons are emitted and accelerated toward the grid by the potential difference between the grid and filament All of the electrons eventually collide with...

Страница 48: ...definition of ionization gauge sensitivity frequently denoted by S Micro Ion gauge sensitivity for N2 or air is 20 Torr 0 15 Pa 15 mbar The module electronics for the gauge varies the heating current...

Страница 49: ...e pins 41 Micro Ion E gauge schematic 47 Micro Ion E gauge status wiring 21 removing electronics assembly 40 vacuum chamber ground connections 16 wiring terminals module with analog output 14 module w...

Страница 50: ...5 materials exposed to vacuum 45 weight 45 Power supply requirements 45 wiring 13 Preparing to operate the module analog 19 RS 232 25 Pressure correction factors 23 32 gases other than N2 or air 23 32...

Страница 51: ...ture 43 weight 45 T Temperature bakeout 43 operating 43 storage 43 Theory of operation Micro Ion E gauge 47 module 47 Troubleshooting precautions 35 symptoms causes solutions 36 W Weight 45 Wiring ana...

Страница 52: ...52 Micro Ion E Module Instruction Manual 354011 Rev A...

Страница 53: ......

Страница 54: ...to 5 PM Mountain Time Zone weekdays excluding holidays Granville Phillips 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 800 776 6543 Phone 1 303 652 4400 FAX 1 303 652 2844 Email co csr brooks...

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