Granville-Phillips Micro-Ion 354 E Series, Инструкция по эксплуатации, Страница: 39 / 54

Maintenance
Micro-Ion E Module Instruction Manual 354011, Rev. A
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6.3 Micro-Ion E Gauge
Continuity Test
If a problem with pressure measurement is traced to the module, the
Micro-Ion E gauge can be tested with an ohmmeter.
This test should only be performed while the Micro-Ion E gauge is exposed
to atmospheric pressure and the electronics is removed from the module.
The continuity test can detect an open filament or shorts between gauge
elements, but may not detect inaccurate pressure measurement associated
with vacuum leaks or adsorbed gases within the gauge.
1. Shut OFF power to the module.
2. Remove the 9-pin subminiature D connector from the module.
3. Remove the module from the vacuum chamber.
4. Remove the four Phillips-head screws from the gauge collar plate (see
Figure 6-1).
5. While holding the flange, gently pull the Micro-Ion E gauge assembly
away from the housing. The gauge tube pins will disconnect from the
module.
Removing or replacing the Micro−Ion E gauge in a high
voltage environment can cause an electrical discharge
through a gas or plasma, resulting in serious property
damage or personal injury due to electrical shock or fire.
Vent the vacuum chamber to atmospheric pressure and shut off
power to the module before you remove or replace the
Micro−Ion E gauge.