Granville-Phillips Micro-Ion 354 E Series, Инструкция по эксплуатации, Страница: 40 / 54

Chapter 6
40
Micro-Ion E Module Instruction Manual 354011, Rev. A
Figure 6-1 Removing Micro-Ion E Gauge Assembly
6. Use a digital multimeter to measure the resistance between the
filament pins (see Figure 6-2). The reading should be approximately
0.2
Ω
.
7. Measure the resistance of filament pins to the gauge case. The reading
should be infinity.
8. Measure the resistance across the grid pins. The reading should be
approximately 0
Ω.
9. Measure the resistance of the grid pins to the gauge case. The reading
should be infinity.
10. Measure the resistance of the collector pin to the gauge case. The
reading should be infinity.
If resistance values are not the specified values, the Micro-Ion E gauge is
defective. Contact Brooks Automation / Granville-Phillips customer service
to order a replacement gauge.
Phillips-head screws (4)
Flange
Gauge collar plate
Gauge tube pins
Alignment notch
Module housing