Granville-Phillips Micro-Ion 354 E Series, Инструкция по эксплуатации, Страница: 43 / 54

Micro-Ion E Module Instruction Manual 354011, Rev. A
43
Appendix A Specifications
N
2
or Air Pressure Measurement Specifications
Measurements will change with different gases and mixtures.
Absolute Pressure Range
Torr 5 x 10 -7 to 5 x 10 –3
mbar 6.66 x 10 -7 to 6.66 x 10 -3
Pa 6.66 x 10
-5
to 6.66 x 10
–1
Overpressure Limit
Overpressure is the pressure at which the Micro-Ion E gauge shuts OFF with
increasing pressure.
Torr 1 x 10 –2
Pa 1.33 x 10 –2
mbar 1.33
X-ray Limit
X-ray limit is the absolute lowest indication from the gauge. It is not possible
to make repeatable measurements near the x-ray limit.
Torr < 3 x 10
–10
mbar < 4 x 10 –10
Pa < 4 x 10
–8
Response Time
< 25 msec
Temperature Specifications
Operating Temperature
0 to 40 º C (32 to 104 º F) ambient, non-condensing
Storage Temperature
–40 to +70 º C (–40 to +158 º F)
8akeout Temperature
200 º C (392 º F) maximum with electronics removed